Table of Contents

220 77.5 80 50 40 18 9 88 35 3 9 4.6 74 226 187 38 110 235 93 96 70 50 20 11 115 44.5 3.3 11 6.4 84 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Electric Actuator

, 200 30, 50, 100, 150, 200, 250, 300 30, 50, 100, 150, 200, 250, 300 Stroke [mm] Note 1) Acceleration/Deceleration at 3000 [mm/s2] 44.0 8.8 88.2 44.0 26.5 66.1 88.2 66.1 24.3 Note 2) Horizontal Work load [lb] Acceleration/Deceleration at 2000 [mm/s2] 66.1 13.2 132 66.1 39.7 110 132.2 110 37.5 Actuator specifications Electric specifications Acceleration/Deceleration at 3000 [mm/s2] 16.5 3.3

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

For wiring specifications. 2 194 212 3 245 263 4 296 314 5 347 365 6 398 416 7 449 467 8 500 518 Stations Formula L1 = 51 x n + 92 L2 = 51 x n + 110 L L1 L2 ( ): 2(B)/4(A) port Rc 3 4 1211 Series VFS5000 Manifold Specifications Manifold with Exhaust Cleaner Serves to protect working environment. Valve exhaust noise dampening: 35 dB or more.

Refrigerated Air Dryers

130 Terminal block Specifications 175 7.5 110 15 4 x 7 Part no.

High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

MNB

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501

MNB

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

(n2) n=2, 4, 6, 8, 110+50(n2) n=2, 4, 6, 8, Same side Accessory n=2, 4, 6, 8, Double knuckle joint (with pins) 1 10 90 100 110 0.37 0.43 0.43 0.87 1.27 Dif. sides 20 90 100 110 2 Factors in parentheses are for iron tube style.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 Bore (mm) 20 25 32 40 81 93 106 131 156 12.5 25 37.5 50 75 100 35 17 68 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 35 17 72 12.5 85 97 110 135 160 185 25 37.5 50 75 100 125 72 35 17 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 19 77 46 Refer to p.1.4-

CHKD/CHKG

140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145 170 195 220 245 12.4 15.5 CHKGB25 CHKGB63 10.4 16 CHKGB32 CHKGB80 10.5 22 CHKGB40 CHKGB100 13.5 26.5 282 Compact Hydraulic Cylinder: 16 MPa CHKG Series Specific Product Precautions

Cylinder with Lock

12, 16, ) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16) 90 + 50 Different surfaces (n = 2, 4, 6, 8, ) (n = 4, 8, 12, 16, ) n 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) 100 + 50 (n 2) (n = 2, 4, 6, 8, ) 110 + 50 (n 2) (n = 2, 4, 6, 8, ) Same surface 1 10 90 100 110 Different surfaces Same surface 20 75 90 100 110 2 Different surfaces 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) 110

CL

151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 12.5 68 81 93 106 131 156 25 37.5 50 75 100 20 17 35 12.5 72 85 97 110 135 160 185 25 37.5 50 75 100 125 25 17 35 12.5 72 85 97 110 135 160 185 25 37.5 50 75 100 125 32 17 35 12.5 77 90 102 115 140 165 190 25 37.5 50 75 100 125 40 17 46 Over 301 stroke: Long stroke. 9-2-22 21 Series

Electric Actuator Triple Axis P&P Unit

Please inform P/A of any changes in the motor specifications. 6) For motor details, please refer to Applicable motors on page 23. 9 Triple Axis P&P Unit Dimensions (reference drawing for assembling) 30 40 30 Stroke+240(Table movement range) 200 180 2-8H7depth10 4-M8 x 1.25 thread depth 16 Urethane stopper 110 280 (150) (Refer to 4) (Refer to 4) Home position gauge (Refer to 4) L 15 15 110

Dual Rod Cylinder Series CXSJ/CXS

Standard Stroke Housing (mm) Plate Model Standard stroke Manufacturable stroke range CXSJ6 CXSJ10 CXSJ15 CXSJ20, 25, 32 10, 20, 30, 40, 50 60 to 100 10, 20, 30, 40, 50, 75 80 to 150 110 to 150 10, 20, 30, 40, 50, 75, 100 6 to 32 Bore size (mm) CXSJM (Slide bearing) CXSJL (Ball bushing bearing) 110 to 200 Strokes beyond the standard stroke range are available as a special order. 0.1 CXSJ6

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

3.3 69 113 105 A section 5.8 1.7 4.8 Stroke + 430 170 8-9 A section detail (Switch groove) 20 110 (T-slot pitch) 80 11.5 76 4-8H10 depth 5 45 Stroke + 97 110 30 110 18 9.4 33 10 4.5 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

VQZ1000/2000/3000

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

Air Cylinder

140 162 110 130 100 Do not disassemble the trunnion type.

ISO Cylinder

234 314 C85Fl-lT 137 214 291 Without magnet 101 to 150 mm stroke C85Nl-lT 177 256 344 C85El-lT 181 260 349 C85Fl-lT 167 240 327 Basic weight 1 to 50 mm stroke CD85Nl-lT 45 49 93 120 208 278 CD85El-lT 47 51 96 124 213 283 CD85Fl-lT 43 48 87 110 193 261 51 to 100 mm stroke CD85Nl-lT 150 233 312 CD85El-lT 154 238 317 CD85Fl-lT 141 218 295 With magnet 101 to 150 mm stroke CD85Nl-lT 181 259 348

5 Port Solenoid Valve Series VQZ1000/2000/3000

90 110 130 70 70 Note) The L dimension of 2 to 6 stations is the same.