Integrated Controller

Vertical/Lead 5 16 14 12 10 8 6 4 2 0 50 100 150 200 250 300 350 400 450 7 3000 mm/s2 3000 mm/s2 6 Work load: W [kg] Work load: W [kg] 5 4 10 mm/s2 5000 mm/s2 3 2 1 0 0 0 Speed: V [mm/s] 50 100 200 150 250 300 350 400 450 Speed: V [mm/s] EQFS16HC/Ball Screw Drive Horizontal/Lead 2.5 Vertical/Lead 2.5 20 18 16 14 12 10 8 6 4 2 0 13 12 11 10 9 8 7 6 5 4 3 2 1 0 50 100 150 200 250 3000 mm/s2

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

5 !6 !7 !

Table of Contents

2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

SX

SX 000-50-2ANote : SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 X5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Gasket u supplied as an accessory.) 3 5 3 5 3 5 3 5 3 5 3 5 For 45(N)F (D-sub connector) (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting

Air Cylinder Series CS1

32 40 8 60 55 34 39 28 4 5 M36 x 1.5 4 x 40 110 86.5 76.5 +0.1 0 0.1 0.3 0.080 0.142 40 50 8 67 70 44 32 4 5 M40 x 1.5 4 x 40 125 94.5 84.5 42.5 CG1 +0.1 0 0.1 0.3 0.080 0.142 40 50 8 67 70 44 40 4 5 115 105 M45 x 1.5 4 x 55 125 180, 200 250 300 42.5 +0.1 0 0.1 0.3 0.080 0.142 50 63 9 86 66 M56 x 2 53 50 5 6 144 132 5 x 65 160 75.5 MB +0.12 0 0.1 0.3 0.100 0.174 63 80 9 71 M64 x 2 66 63

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

225 200 175 188 313 150 163 288 125 138 263 23 100 113 238 36 75 100 213 54 12.5 37.5 50 88 54 4 17 75 250 225 200 175 188 313 150 163 288 125 138 263 23 100 113 238 36 75 100 213 54 12.5 25 37.5 50 88 69 5 24 87 250 225 200 175 200 325 150 175 300 125 150 275 25 100 125 250 51 75 112 225 64 12.5 25 37.5 50 100 69 5 24 87 250 225 200 175 200 325 150 175 300 125 150 275 25 100 125 250 51

HRX-OM-Q026

Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.2.2 List of parameters . 5-4 5.3 Main Display . 5-7 5.3.1 Main display . 5-7 5.3.2 Items on the main display . 5-7 5.4 Alarm Menu . 5-8 5.4.1 Alarm menu . 5-8 5.4.2 Items shown on the alarm menu display . 5-8 5.5 Check Monitor Menu . 5-9 5.5.1 Check monitor menu . 5-9

Air Slide Table

= 100 6 6 V = 100 5 5 V = 200 4 4 V = 200 3 3 V = 300 V = 300 2 2 V = 500 V = 500 1 1 0 0 0 50 100 150 200 250 300 0 50 100 150 200 250 300 350 400 L3: Overhang Allowable range: 400 mm L3: Overhang Allowable range: 300 mm Allowable overhang L [mm] Allowable overhang L [mm] 178 MXQ Series interchangeable type MXQ 6A-mZm, MXQ 6-mZm Height Determine the overhang.

Base Mounted Metal Seal/Rubber Seal Series VQ

EX121-SMB1(-XP) (5) EX121-STA1(-XP) (5) EX121-SSH1(-XP) (5) EX121-SPA1 EX121-SUW1(-XP) (5) VQC EX121-SAB1(-XP) (5) SQ EX120-SUH1(-XP) (5) q EX121-SSL1(-XP) (5) EX121-SSL2(-XP) (5) VQ0 EX121-SFU1(-XP) (5) EX121-SDN1 EX121-SCS1(-XP) (5) VQ4 EX121-SCS2(-XP) (5) VQ5 EX120-SMJ1(-XP) (5) AXT100-2-P (2) U S w e r t U S U S AXT100-2-F (2) U S VQZ AXT100-2-TB1 (4) AXT100-2-TB2 (4) VQD Note 1) A

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

With external pilot specifications (Pitch) 20.5 15.8 9.5 17.5 P = 16 11.9 9.2 25.2 11.8 5.4 30.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 49.9 E 3/5 E 3/5 E 3/5 E 3/5 63.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 1 P P 1 1 P PE One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 3/8" PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16

Air Cylinder

(0) 1 () 0 () 7 (5) 6 (4) 4 (2) 3 (1) CA2 25 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5 (0) 1 () 0 () 7 (5) 6 (4) 4 (2) 3 (1) CS1 32 11.5 (9) 10.5 (8) 7.5 (5) 6.5 (4) 1.5 (0) 0.5 (0) 7 (5) 6 (4) 3.5 (1.5) 2.5 (0.5) 2 (0) 1 (0) 8 (6) 7 (5) 5 (3) 4 (2) 40 17.5 15.5 13.5 11.5 6.5 5.5 12 11 8.5 7.5 7 6 13 12 10 9 CS2 * ( ): Setting position for the auto switch with

1

, 275, 300 (CXWM16 to 25) 225, 250 (CXWM32) 225, 250, 275 (CXWL16 to 25) 225 (CXWL32) CXWM 16, 20, 25, 32 25 to 200 CXWL 16, 20, 25, 32 225, 250, 275 25 to 200 ML1 25, 32, 40 1001 to 2000 100 to 1000 CY3B 20, 25, 32, 40 2001 to 3000 100 to 1000 CY1B 50, 63 From 2001 200 to 2000 2001 to 4000 (25, 32) 2001 to 5000 (40) 2001 to 6000 (50, 63) REA 25, 32, 40, 50, 63 200 to 1000 (5), 10, 15, 20

5 Port Solenoid Valve

S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 3 66 62 4 72 2 1 3 39 12 12 12 12 12 5 2 x M4 mounting hole 4 x M4 mounting hole Input block SI unit Stations D side 1 2 3 4 5 6 7 8 n U side 3(R) port C8: 8 (For A, B port metric size) N9: 5/16" (For A, B port inch size) Input connector M8 socket Input connector M12 socket Communication connector M12 plug DIN rail clamping screw Plug-in

10

M18 x 1.5 31.5 1/4 94 5 10.5 210 63 16 5 M18 x 1.5 31.5 3/8 94 9 12 210 80 16 5 M22 x 1.5 38 3/8 114 11.5 14 258 100 16 5 M26 x 1.5 38 1/2 114 17 15 258 * Model without air cushion is designed to include rubber bumpers.

MB

5 !6 !7 !

Metal Seal/Rubber Seal Series VQ Body Ported

mA), Holding 0.5 VA (5 mA) 110 VAC Inrush 0.55 VA (5 mA), Holding 0.55 VA (5 mA) 3 position exhaust center 200 VAC Inrush 1.0 VA (5 mA), Holding 1.0 VA (5 mA) 220 VAC Inrush 1.1 VA (5 mA), Holding 1.1 VA (5 mA) Use dry air to prevent condensation when operating at low temperatures.

Air Cylinder Series CM2

(3) 6 (4) 9.5 (7) 0 () 10.5 (8) 0.5 () 3 (1) 4 (2) 6 (4) 7 (5) CJP 20 6.5 (4) 5.5 (3) 0 () 1 () 1.5 (0) 2.5 (0.5) 5 (3) 6 (4) 9.5 (7) 0 () 10.5 (8) 0.5 () 3 (1) 4 (2) 6 (4) 7 (5) CJ2 25 7.5 (5) 6.5 (4) 1 (0) 2 (0) 2.5 (0.5) 3.5 (1.5) 6 (4) 7 (5) 10.5 (8) 0.5 (0) 11.5 (9) 1.5 (0) 4 (2) 5 (3) 7 (5) 8 (6) CM2 32 40 11.5 6 7 13.5 7.5 8.5 11 12 15.5 5.5 17.5 6.5 9 10 12 13 CG1 ( ): Setting position

smcmaintenancepartslist

Contents Bore size (mm) Seal Kit List Description Material Note No. 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR Gasket A NBR Gasket B NBR Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4

MGP

50 100 100 100 80 100 Load weight m (kg) 100 Load weight m (kg) 80 80 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 8 Compact Guide Cylinder Series MGP Horizontal Mounting Ball Bushing 1 7 l = 50mm V = 200m/s 1 8 l = 100mm V = 200m/s MGPL12 to 25 MGPL12 to 25 10 10 25 20 25 5 5 25 25 25 20