Compact Cylinder

32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Other intermediate strokes can be manufactured upon receipt of order.

Mechanically Jointed Rodless Cylinders

Maximum Allowable Load / MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 100 200 100 100 50 50 40 30 40 30 50 40 30 20 20 20 10 10 Load weight (kg) Load weight (kg) Load weight (kg) 63 10 5 4 3 5 4 3 50 40 63 50 63 50 5 4 3 2 2 32 40 32 40 25 2 1 1 32 25 20 20 25 1 0.5 0.4 0.3 0.5 0.4 0.3 16 16 20 0.5 0.4 0.3 16 0.2 0.2 0.2 0.1 0.1 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

63 80 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32 40 50 63 80 8 8 12 12 16 16 16 50 57 64 80 100 112 132 34 36 46 58 61 75 95 60 70 78 100 125 138 155 8 8 12 12 16 16 16 50 57 64 80 100 112 132 34 36 46 58 61 75 95 60 70 78 100 125 138 155 5.5 6.6 9 9 9 12 14 5.5 6.6 9 9 9 12 14 44 48 60 74 78 100 120 44 48 60 74 78 100 120 114 136 167 190 211 237

Electric Actuator

Series LECSS LECSS1-S5 LECSS1-S7 LECSS2-S5 LECSS2-S7 Model Compatible motor capacity [W] 100 200 100 200 Absolute 18-bit encoder Compatible encoder (Resolution: 262144 pulse/rev) Single phase 100 to 120 VAC Three phase 200 to 230 VAC (50/60 Hz) Power voltage [V] (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz) Main power supply Three phase 170 to 253 VAC Single phase 85 to 132 VAC Allowable

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 100 Non-lube Double acting, Double rod (40 to 63) 20 25 32 40 50 63 80 100 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20 25 32 40 50 63 80 100 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63/80/100 1.5 MPa 1.0 MPa

155

Pilot Solenoid Valve Specification How to Order Pilot Valve SF4 50 X240 5 T Z SF4-lll-50-X240 Pilot solenoid valve specification Conduit terminal, DIN terminal, M12 connector Electrical entry q w e r DC 24 V, Other (Option) Coil rated voltage V q Rated voltage w Electrical entry AC (50/60 Hz) 100 V, 200, Other (Option) 1 2 3 4 5 6 7 9 T D DO 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60

Cylinder with Lock Series CLS

+0.3 +0.1 50 +0.3 +0.1 63 +0.3 +0.1 64 0.1 0.3 72 0.1 0.3 80 0.1 0.3 100 0.1 0.3 100 0.1 0.3 126 0.1 0.3 Y-12 Y-14 Y-16 Y-18 Y-20 Y-25 125 140 160 180 200 250 25 +0.084 0 28 +0.084 0 32 +0.1 0 40 +0.1 0 40 +0.1 0 50 +0.1 0 8 46 M30 x 1.5 100 27 42 CLM2 8 48 M30 x 1.5 105 30 47 U1 L1 8 55 M36 x 1.5 110 34 46 CLG1 8 70 M40 x 1.5 125 42.5 54 RR1 8 70 M45 x 1.5 125 42.5 54 CL1 9 86 M56 x 2 160

Mini Free Mount Cylinder

D-M9N D-M9B D-M9P Auto switch part no.

48

Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 CAT.NAS100-78 CAT.NAS100-101 Front matter 2 Electric Actuators RotaryTable Step Motor (Servo/24 VDC) Miniature Step Motor (Servo/24 VDC) Rod type Slide table type Basic type High precision type Series LEPY Series LEPS Series LER Series LERH Stroke

24

[kg] Load mass m [kg] 63 63 MGPW 50, 63 50 50 50, 63 MGQ 50, 63 40 40 40 MGG 10 10 50, 63 40 40 40 MGC 32 32 32 32 32 32 MGF 5 10 30 50 51 100 101 300 200 5 10 30 50 51 100 101 300 200 MGZ Stroke [mm] Stroke [mm] MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 MGT 50 50 100 100 100 80 80 80 100 100 Load mass m [kg] Load mass m [kg] 80 100 80 10 10 80 D5 10 100 29 30 50 51 300 200 5 10 100

Air Slide Table

50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Standard Strokes Bore size [mm] Standard stroke [mm] Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 1000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 1900 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 1900 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 100 25

Dual Rod Cylinder Series CXSJ/CXS

20 30 40 50 100 5 10 20 30 40 50 100 Overhang l (mm) Overhang l (mm) Graph (4) V = 800 (mm/s) (V = 700 mm/s for 15, 20) CXSJM CXSJL Graph (3) V = 600 (mm/s) CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 10 Mass m (kg) 10 0.1 CX2 0.1 CXW 6 6 CXT CXSJ 0.02 0.02 10 20 30 40 50 100 5 10 20 30 40 50 100 5 CXS Overhang l (mm) Overhang l (mm) Note) V = 700 mm/s for 15, 20.

CHKD/CHKG

) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100

ISO Standard Hydraulic Cylinder

63 80 100 32 40 50 63 80 100 Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100.

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 6-16-72

XM, XY

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

RS MI Roller Type/Round Bar Type/Chamfered Type Lever Type (With shock absorber) Friction coefficient = 0 Graph (2) Graph (1) Lever Type (With shock absorber) Friction coefficient = 0.1 Graph (3) 100 200 200 50 130 130 50 50 100 100 50 40 40 40 Mass of transferred object m (kg) Mass of transferred object m (kg) Mass of transferred object m (kg) 32 40 Example 1 30 40 50 40 50 20 30 30 32

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 0 10 20 30 40 Work load [kg] Work load [kg] LEJS40B LEJS63B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same

Compact

400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg]