ZK2-C

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

SFOD-OMT0005CN

20m * Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) (2) 1 2 (5.5) (14) (1) B1 A1 5 6 (17.7) (3) 2 1 (18) A6 B6 (6.3) 15 16 (11) (30.7) -58- 14.3 ()[5m ] (1) (2) LE CP B A B-1 2 A A-1 1 (L) B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shield Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

Step Motor Controller (Servo / 24 VDC)

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

Step Motor Driver （ Pulse input type ）

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

High performance type Step Motor Controller (Servo/24 VDC)

13 Actuator cable type A B-5 Red 7 A A-5 Black 6 Robot cable Nil B B-6 Orange 9 B A-6 Black 8 Standard cable S 3 Electric actuator side Controller side 14.2 (2) 1 2 (8) (1) (14) 18 A1 B1 17.7 5 6 (3) 1 2 A6 B6 L 15 16 30.7 11 2 Actuator cable [8 to 20 m] (1) (2) A B-1 Brown 2 A A-1 Red 1 UCable length (L) B B-2 Orange 6 B A-2 B-3 A-3 Yellow 5 8m*1) 8 Green 3 Blue 4 10m*1) A Shield (

CY1

(except for 50 and 63) b C CY1B6 -SCY1B, #1 CY1B10 -SCY1B, #2 CY1B15 -SCY1B, #3 CY1B20 -SCY1B20, #1 CY1B25 -SCY1B, #4 CY1B32 -SCY1B, #5 CY1B40 -SCY1B, #6 CY1B50 -SCY1B, #7 CY1B63 -SCY1B, #8 H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Rotary Table/

bolt B Adjustment bolt B Adjustment bolt B adjustment amount adjustment amount adjustment amount 90 Rotation 90 Rotation 90 Rotation 9 Rotary Table Series MSQ Construction o i t !

Pneumatic Transfer System Series MF

G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A G G RG RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350 R440 D 93 129 F 10 15 G 6 7 H 610 700 A 600 743 A 680 797 A 643 740 15 32 15 32 15 32 Y Note 2) Y Note 2) Y Note 2) X 558 to 573 685 to 708 X 518 to 533 558 to 581 X 541

MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23

MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23

CXT

22.5 17 19 22.5 24.5 27 30.5 9 9.5 13 14 12.5 16 MG Bore size (mm) MGP MGQ MGG Reed switch Solid state switch @ HS A B D-F7NWV D-F7BWV D-F7NV D-F7PV D-F7BV D-J79C D-A72 D-A73 D-A80 D-A73C D-A80C D-A79W MGC MGF 32, 40 CY1 MY1 (mm) D-A72 D-A73 D-A80 D-A73C D-A80C D-A79W D-F7NV D-F7PV D-F7BV D-J79C D-F7NWV D-F7BWV Auto switch model A B Hs A B Hs A B Hs A B Hs A B Hs A B Hs Symbol Standard stroke

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70

A_HEC-OM-K001

HED003-W2 A B 13 19 HED003-C2A B (Temperature Controller) HED003-HW13 19 (Heat Exchanger) HED005-W2 A B 13 19 HED005-C2A B (Temperature Controller) HED005-HW13 19 (Heat Exchanger) HED007-W2 A B 13 19 HED007-C2A B (Temperature Controller) HED007-HW13 19 (Heat Exchanger) Keep this manual available whenever necessary.

Servo Motor Controller (24 VDC)

Cable color Tarminal no. 8 8m* Vcc B-1 Brown 12 GND A-1 Black 13 A 10m* A B-2 Red 7 B 15m* A A-2 Black 6 B B-3 Orange 9 C 20m* B A-3 Black 8 *produced upon receipt of order Z B-4 Yellow 11 Z A-4 Black 10 3 signal Tarminal no.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

14 Power cable b View b View a a Wiring Cable description Color Signal description Pin no.

MHZ2/MHZJ2

When closed 8.8 When open 22.8 7 Standard Type/Series MHZ2 Finger Position/Options Side Tap Mounting Type [1N1] Through Hole in Opening/Closing Direction [2N2] 4-MM Attachment mounting thread C C B A 4-H Attachment mounting hole S S O O B A Unit: mm Unit: mm Model A 3 4 5 6 Model A 3 4 5 6 B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 B 5.7 7 9 12 H 2.9 3.4 4.5 5.5 1

CYPSeries

x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis Cylinder

CYPSeries

x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8m/s] M2 M1 M3 m x g m x g Guide shaft mounting surface m x g Guide central axis Cylinder