Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC12V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing

Base Mounted), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: F (G), Body/Seal Material: H (Body SUS, Seal FKM)

Base Mounted), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: T (NPTF), Body/Seal Material: H (Body SUS, Seal FKM)

Base Mounted), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: N (NPT), Body/Seal Material: H (Body SUS, Seal FKM)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: G, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Sub-Base Plumbing

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Sub-Base

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPTF, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Sub-Base

IR1000/2000/3000

Example 1) 0.4MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2MPa setting 2pcs., 0.4MPa setting 2pcs., 0.8MPa setting 1pc. with 5 stations IRM20-5G-021221 Copper-free specifications Ozone Resistant Specifications 3 Accessory (pressure gauge) Nil None Fluoro rubber is used for rubber seal materials.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

M-3G Material PVC Applicable model M3 Stainless steel 304, NBR M-3G2 PVC M-5G1 Stainless steel 304, NBR M-5G2 Gasket Stainless steel 316, Special FKM M5 M-5G3 M-5AL-6, M-5ALH-6 M-5HL-4, 6, M-5HLH4, 6 Nylon 66, GF30% M-5GH For KQ2 M6 thread Stainless steel 304, NBR M6 M-6G KQ2 Series, 10-32 UNF 10-32 UNF M-10/32G M-01H-4, M-5H-4 M-5HL-4, M-5HLH-4 C3604 (With electroless nickel plated

This is a legacy product, and replaced byVFS2110-6G

This is a legacy product, and replaced byVFS2220-6G-02T

This is a legacy product, and replaced byVK334-6G, VALVE, SOL, BASE MOUNTED, VALVE, VK300 SOL VALVE 3-PORT, 2A, VK300 NO SIZE RATING, 0.18734 lb

IR1000/2000/3000

T PPA 8 8 stations Example 1) 0.4 MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2 MPa setting 2 pcs., 0.4 MPa setting 2 pcs., 0.8 MPa setting 1 pc. with 5 stations IRM20-5G-021221 AL For high/low temperature environments Thread type (Thread on the manifold base) T L For high temperature For low temperature Nil N F Rc NPT G Accessory (Pressure gauge) Specifications Nil None Symbol

FSQ seies

. @3.4, o.2mn1, 2 w1r6 (red, b ack). 0.5m ' . lmpacl sistance J00m/s: {30 6G) . hsu aron resistance ---50Mo or more underl6sr vo tage soovDc (belw6n case and cabre) . w thsland vo tage l500VAC 1 min (between case aid bte) .Ambiontlemperalure 50 140"F (10-60"C) ' Polecton skucture lEC529 spec.lP67, warelprcoj (JtS C 0920), oibrcoj ' Suffx L lor the modelwlth a 3m long lad wir.

This is a legacy product, and replaced byVK334-6G-01T, VALVE, SOL, BASE MOUNTED, VALVE, VK300 SOL VALVE 3-PORT, ND, VK300 BASE MT 1/8, .27734 lb

Precision Regulator Series IR1000/2000/3000

Ozone resistant Example 1) 0.4 MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2 MPa setting 2 pcs., 0.4 MPa setting 2 pcs., 0.8 MPa setting 1 pc. with 5 stations IRM20-5G-021221 4 For High/Low Temperature Environments Standard model no. T Stations Accessory (Pressure gauge) For high/low temperature environments 2 2 stations Nil None ... ...

This is a legacy product, and replaced byVK332-6G-01T, VALVE, SOL, BODY PORTED, VALVE, VK300 SOL VALVE 3-PORT, DA, VK300 BASE MT 1/8, 0.2376 lb

This is a legacy product, and replaced byVK332-6G-01T, VALVE, SOL, BODY PORTED, VALVE, VK300 SOL VALVE 3-PORT, CD, VK300 BODY PT 1/8NPT, .22000 lb

This is a legacy product, and replaced byVK334-6G, VALVE, SOL, BASE MOUNTED, VALVE, VK300 SOL VALVE 3-PORT, 2D, VK300, .20240 lb

This is a legacy product, and replaced byVK332-6G-01T, VALVE, SOL, BODY PORTED, VALVE, VK300 SOL VALVE 3-PORT, CA, VK300 BODY PORT 1/8NPT, .21735 lb