High Vacuum Angle Valve, XL Series Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage
H2 H1 1/8" (3.18) 0.086" (2.18) KFG2F0122-N02 25 8 1/4 26.7 17.2 5 1.5 1.1 17 d KDM 0.098" (2.5) 5/32" (4) KFG2F0325-N02 23 8 1/4 26.7 17.2 5 1.8 1.6 17 KB 1/4" (6.35) 5/32" (3.95) M L2 L1 KFG2F0704-N02 28 12 1/4 27.5 16.3 6 3.3 6 17 KR 5/16" (8) 0.236" (6) KFG2F0906-N03 32 14 3/8 29.4 17 6.6 5.3 17 19 Applicable tubing KA 3/8" (9.53) 1/4" (6.35) KFG2F1163-N03 38 17 3/8 30.5 16.1 7.6 5.6
M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5
Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 L2 max Y 2 Y Y Y Y D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7
Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = Y = C2 J axis X axis K axis T axis D2 = C2 = C L2 = [mm] [mm] [mm] Size Y L2max D2 30 3 to 25 Y-2 5 to 7.9 50 1 to 36 Y 5 to 14.9 63 1 to 41 Y 5 to 16.9 80 1 to 50 Y 8 to 19.9 100 1 to 60 Y 8 to 24.9 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 218
Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = L2 = Y = C2 J axis X axis D2 = C2 = C K axis T axis (mm) (mm) (mm) d1 Size 30 50 63 80 100 d1 Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y 3 to 25 1 to 36 1 to 41 1 to 50 1 to 60 D2 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 Size 30 50 63 80 100 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 2.5 4 to 7.5 4 to 8 6.8 to 11 6.8 to 13 11-7
(If not specifying dimension C2, indicate instead.)
L1 (3 x P) Q1 = M C2 = C Y = C1 = C C2 Y = L2 = L2 (3 x P) C2 = C L2 = Q2 = M L1 = X = DD2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 X 8 to 18 9.5 to 20 L1 max X 2 X 2 L2 max Y Y Size 10 15 Size 10 15 Size 10 15 3.5 to 4.9 3.5 to 5.9 257 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern
(If not specifying dimension C2, indicate instead.)
Applicable tube O.D. 4 (5/32") 64.2 4 (5/32") 92.2 29.9 6 64.6 6 92.6 28 8 (5/16") 68 8 (5/16") 96 29.9 28 1/4 64.6 1/4 92.6 3 42.5 3 42.5 3 51.5 (Max. 58.5) Panel thickness 1 to 3.2 Panel thickness 1 to 3.2 IN OUT 76 A Panel mount / Without flow adjustment valve Panel mount / With flow adjustment valve 93 88 58 78 29.9 29.9 28 18 28 18 42.5 3 3 42.5 51.5 (Max. 58.5) Panel thickness 1 to
100 80 80 2 3 4 5 10 20 30 40 50 3 2 30 20 40 10 5 4 1 m2max m1max m3max m1max m2max m3max Load weight (kg) Load weight (kg) Air Cushion Stroke Unit: mm Horizontal collision: P = 0.5 MPa MY3B63 Maximum collision speed with fixed intermediate position Cushion stroke Bore size (mm) 2000 16 13 Collision speed (mm/s) 1000 20 16 Air cushion, L unit H unit 25 18 500 400 300 32 22 40 25 200 50 28
Controller side PLC side For 4 Axes JXC73/83 L JXC C2 (Terminal no.) (R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.
K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.
28 80 22 Courtesy of Steven Engineering, Inc. !
10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.
16.5 22 28 Reference dimensions after Uni thread installation.
NVHS2000 1/8, 1/4 1/8 40 56 36 28 22 25 NVHS3000 1/4, 3/8 1/4 53 74 45 48 28 30 NVHS4000 1/4, 3/8, 1/2 3/8 70 80 48 54 36 30 D I M E N S I O N S S E R I E S (N)VHS 3 P O R T VA LV E H O W T O O R D E R S E R I E S (N)VHS S H U TO F F V A LV E S (N)VHS 00 W I T H L O C K I N G FA C I L I T Y Standard N North American B O D Y S I Z E A N D A P P L I C A B L E FRL S E R I E S 2 2000 3 2500,
14.3 14 28 47 1 4 3 8 3 8 KQ2V10-U02 Applicable tubing 20.6 31 18.5 28 34 10 18.5 21 27 20.3 14 KQ2V10-U03 KQ2V12-U03 17 Connection thread 36.5 39.5 20 22.5 30.5 31.5 12 22 39 30.8 20.9 25.2 34 1 2 KQ2V12-U04 Reference dimensions after Uni thread installation.
M14 x 2 11 200 2 128 15 M8 x 1.25 47 43.5 MY1C50 84.5 29 100 230 19 12.5 29.5 27.5 39.5 130 32 M16 x 2 13.5 230 5.5 152 16 M10 x 1.5 50 60 MY1C63 104 32.5 115 (mm) XX Z NW PA PB PG Q PP QW QQ RR SS TT UU W WW Model NF NH VV W1 118 120 90 10 380 26 90 28 35 10 35 24 144 22 MY1C50 83.5 400 81 28 74 128 142 140 110 12 436 42 110 30 49 13 43 28 168 25 MY1C63 92 460 103 105 30 152 Y 2 x d R WX
28 Bore size With air cushion Air cushion type is not available for 21-/22-CJ2.