Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder Y Z X N N Y X S + Stroke LS + Stroke ZZ + Stroke LX LZ Standard port Non-locking type manual release 45 Relief port 32, 40 (mm) LZ LX LT LD I DL B2 A 11 8 8 8 13 F Bore size H2 HC 30 28 28 25 LH LS G H H1 MM 134 104 102 102 AL K LC 22 17 17 13 B 41 32 32 26 B1 D 55 40 40 40 4 4 4 4 7 6.8 6.8 6.8 7 5.5 5.5 5 46.5 37.5 33.5 28 14 12 10 8 21 19.5 19.5 15.5 29.3 27 24 50 45 45 41 6 6 5 8 8 8
Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch
(If not specifying dimension C2, indicate "" instead.) C1 = C (mm) (mm) Size Size L1 max. L2 max.
Weight [g] JXC-C2-1 160 JXC-C2-3 300 JXC-C2-5 480 DIN rail L For 3 Axes For 4 Axes 5.25 12.5 (Pitch) JXC92 JXC73/83/93 7.5 AXT100 DR * For , enter a number from the No. line in the table below.
5 6.8 102 3.2 M8 x 1.25 15 24 M20 x 1.5 1/8 131 25 45 25 8 8 13 55 20 22 10 47 4 28 40 62 19.5 17 32 6 8 33.5 5.5 6.8 102 3.2 M10 x 1.25 15 30 M26 x 1.5 135 1/8 -X 32 45 25 8 8 13 55 20 22 12 47 4 28 40 64 19.5 17 32 6 8 37.5 5.5 6.8 104 3.2 M10 x 1.25 15 34.5 M26 x 1.5 137 1/8 40 50 27 11 10 16 75 23 24 14 54 4 30 55 88 21 22 41 8 10 46.5 7 7 134 3.2 M14 x 1.5 21.5 42.5 M32 x 2 171 1/4
22 20.5 14.5 24.5 30.5 34 (32.5) 23 (21.5) 36 24.5 28 17 27 38 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.
(If not specifying dimension C2, indicate instead.)
A1 L1 MM U1 A E1 R1 C J G5-S Polished round 12 50, 63 Y-05C 3 x 18l 16 + 0.3 + 0.1 27 28 60 M18 x 1.5 15 55.5 27 12 38 I-04 I-05 I-08 I-10 40 50, 63 80 100 + 0.070 0 12 0.1 0.3 16 69 22 24 55 M14 x 1.5 15.5 20 CV Polished round 18 80 Y-08C 4 x 25l + 0.070 0 12 0.1 0.3 16 74 27 28 60 M18 x 1.5 15.5 20 28 + 0.3 + 0.1 37 36 71 M22 x 1.5 19 76.5 28 18 55 + 0.070 0 18 0.1 0.3 28 91 37 36 71 M22
A1 L1 MM U1 A E1 R1 C J G5-S Polished round 12 50, 63 Y-05C 3 x 18l 16 + 0.3 + 0.1 27 28 60 M18 x 1.5 15 55.5 27 12 38 I-04 I-05 I-08 I-10 40 50, 63 80 100 + 0.070 0 12 0.1 0.3 16 69 22 24 55 M14 x 1.5 15.5 20 CV Polished round 18 80 Y-08C 4 x 25l + 0.070 0 12 0.1 0.3 16 74 27 28 60 M18 x 1.5 15.5 20 28 + 0.3 + 0.1 37 36 71 M22 x 1.5 19 76.5 28 18 55 + 0.070 0 18 0.1 0.3 28 91 37 36 71 M22
Typ. 11 16 28 4-28 B 2 1/2 4-28 B2 4-28 B4 4-28 B3 4-28 B1 4-28 B5 4-28 B6 Elbows: 1/4-28 Male to Tube Fibre Gasket Supplied 3 8 9 32 Typ. 1 2 3 8 15 32 15 32 3 8 17 32 17 32 Typ. 5/16 Hex Typ. 29 4-28 LB 3 1/2 4-28 LB 2 1/2 4-28 LB2 4-28 LB4 4-28 LB3 4-28 L B1 4-28 LB5 LTees: 1/4-28 Male to Tube Fibre Gasket Supplied Note: Also available as Reducing L-Tee combinations similar to
Please delete the unnecessary part. 1.4-12 Series CM2 Rear Flange (G) CM2G Bore size Stroke (mm) Bore Stroke range A B2 C2 D H2 I AL E F B FD B1 FT FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13 26 30 5 8 18 8 28 15.5 13 34 7 4 60 20 75 8 41 20 1 to 300 17 32 37 6 8 22 10 33.5 19.5 13 40 7 4 60 25 75 8 45 26 1 to 300 17 32 37 6 8 22 12 37.5 19.5 13 40 7 4 60 32 75 8 45 26
-2 8-28-3 3 Series CXSJ Specific Product Precautions Be sure to read before handling.
-2 8-28-3 3 Series CXSJ Specific Product Precautions Be sure to read before handling.
D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V
D-F9BAL Bore size (mm) D 18.5 16 -9 -6 -4 -3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward Auto Switch Mounting Dimensions (mm) CXSJ6, 10 C3 Bore size 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9, D-F9 W,D-M9 C1 A1 D-A9V
75 161 9 15 40 40 50 4 28 75 174 Use a thin wrench when tightening the piston rod.
24 24 9 18 21 21 43 43 28 28 17 26 44 44 54 23 23 39 3.6 LQ1T41-R12 6 12 12 29 26 54 39 3.6 LQ1T41-R22 10 6 12 6 24 20 24 9 18 21 21 43 38.5 43 28 23 28 3.6 LQ1T41-R23 6 6 12 7 20 29 14 28 17 26 44 44 54 23 39 3.6 LQ1T41-R26 12 3 12 6 24 15 24 9 18 21 14 21 43 33 43 28 16.5 28 1.8 LQ1T41-R32 6 12 6 15 24 15 14 21 14 33 43 33 16.5 28 16.5 3.6 LQ1T41-R34 3 12 3 1.8 LQ1T51-R2 19 10 19 7 29 20
120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 17 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control motor Control motor Control motor Step motor (Servo/24 VDC) Servo
Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage
Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage