Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: IM5 (M5 Female Thread Through Type), Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: M3X0.5, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: R04 (Ø4 Plug-In Reducer), Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: R06 (Ø6 Plug-In Reducer), Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: 01 [R 1/8(w/M5 Female)], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: IM5H [M5 Female Thread Through Through Type (w/Mounting Hole)], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: M5 Female Thread Through Type, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: M3X0.5, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: N01 [NPT 1/8 (w/M5 Female Thread)], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: Ø4 Plug-In Reducer, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: Ø6 Plug-In Reducer, Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: 01 [R 1/8(w/M5 Female)], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: ±2%F.S., Port Size: IM5H [M5 Female Thread Through Through Type (w/Mounting Hole)], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

High Vacuum Angle Valve, XL Series

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

Electric Actuator

Body fixed A L Maintenance L (mm) A (mm) 20 24 30 31 Model Bolt Warning LEF;16 LEF;25 LEF;32 LEFS40 3.5 4.5 5.5 6.6 M3 M4 M5 M6 Maintenance frequency Perform maintenance according to the table below.

17

x 0.8 KK 9 NH NW 53 NE NF MY1B25 MY1B32 MY1B40 110 9 5.5 16 24.5 54 M6 x 1 9.5 5.6 18 40.2 39 110 40.5 55 42 9 M5 x 0.8 30 MY3A MY3B 140 11 6.6 19 M8 x 1.25 2 28.5 68 M5 x 0.8 16 10 6.8 22 50.2 49 64 140 70 52 50 12 M6 x 1 37 170 14 8.5 23 M10 x 1.5 2 35 84 M6 x 1 15 13 170 8.6 85 26.5 62.7 62 61.5 75 64 12 M6 x 1 45 MY3M Centralized piping YW P PA PB Q PP RR QW T TT WW XXX YH Z ZZ Model

CM2

230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com With air cushion With rod boot MB Cushion valve Width across flats B3 Width across flats 1.5 MB1 CA2 e CS1 9 C76 l 9 f Built-in One-touch fittings h C85 ZZ + Stroke One-touch fitting port size P C95 CP95 NCM NCA DH1 H G FZ FY FX B1 FT B FD AL E F A B2 C2