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Note) When "JUMP instruction" is set for the control system, the "Da.9 Dwell time" and "Da.10 M code" setting details will differ. In cases when you selected "LOOP" as the control system, the "Da.10 M code" should be set differently from other cases. If "degree" is set for Pr.1 Unit setting", circular interpolation control cannot be carried out.

be soefod only afd reqLr res lhe B type manlal overtide Cannot combine lritl' H or'Y' oplions connector w lh 300mrn lead wire M vvsoz+ i T m"*.r,r*l I Eslle.r{lrq anifold Number of stations. J r + ' + t i t t t t t l t | l , b o r j | | | , ' l l l " ' r e , l l l t t l Sealtype . | | E ' r l Valve s-port Body Ported liT T.T""n l l l l E f f i .

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

How to Order Rated pressure range ISE20B 0 to 1 MPa ISE20B M5 L M For positive pressure For vacuum/ compound pressure ZSE20B L M M5 q w e r t y u q Rated pressure range w Output specification e Unit specification ZSE20B 0 to 100 kPa ZSE20BF 100 to 100 kPa Symbol Description Symbol Description Nil Units selection function*1 M SI unit only*2 P Units selection function (Initial value psi)*1

kit with 0.6 m lead wire L kit with 1.5 m lead wire Lead wire housing assembly 16 L kit with 3.0 m lead wire M kit, 26 pins Circular connector housing assembly 17 32 Series VS 8-2/VS 8-4 S R S R Manifold Component Part No. !

(mm) L L Dd9 d l l d m t Used snap ring t m Used snap ring Part No.

Standard type For 90 For 180 Positioning pin hole Positioning pin hole Counter-clockwise 3 3 A port A port A port 3 22.5 3 22.5 84 e 96 ng e 3 ra ng on ra ti B port n ta 3 90 tio 4 ro 7 ta m 1 Clockwise ro e e u s i g m w 3 m 6 k C n c l o ni a u 8 r Mi im 3 n 1 o ti e ax ta ng ro m M u ra m ni Mi 180 n tio e C s ta l i o w c k ro m mu xi Ma Positioning pin hole Positioning pin hole Position

1_P] Normal output [ ] 50% of maximums rated flow PF2M701: 0.5 L/min, PF2M702: 1.0 L/min PF2M705: 2.5 L/min, PF2M710: 5 L/min PF2M725: 12.5 L/min, PF2M750: 25 L/min PF2M711: 50 L/min, PF2M721: 100 L/min [P_1] Set value [F 1] [oUt1] Page 35 [ ] 5% of maximums rated flow PF2M701: 0.05 L/min, PF2M702: 0.1 L/min PF2M705: 0.25 L/min, PF2M710: 0.5 L/min PF2M725: 1.3 L/min, PF2M750: 2.5 L/min PF2M711

weight: m [kg] Load weight: m [kg] 32 50 40 50 40 30 50 40 30 C92 32 20 20 CA1 [Example] 10 10 CS1 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m [kg] 32 Load weight: m [kg] 50 40 50 40 30 50 40

I = I + I kgm m, m: Mass of loads I and I kg r, r: Diameters of loads I and I m L: Distance from the rotational axis to load I center of gravity m Calculation example When m 2.5kg, m = 0.5kg, r = 0.1m, r = 0.02m, L = 0.08m I = 2.5 x = 1.25 x 102 0.1 kgm 2 0.02 I = 0.5 x + 0.5 x 0.08 = 0.33 x 10kgm I = (1.25 + 0.33) x 10= 1.58 x 10kgm 16 Technical Data/Moment of Inertia Specific Application

Mounting Auto Switch Suffix Stroke Bore THREAD FORM CODE S P E C I A L R O D T H R E A D X A O P T I O N Thread Form Code M .

min 0.525 L/min 150 L/min 2100 L/min () CO2 0.25 L/min 0.512.5 L/min 125 L/min 250 L/min N2Ar 0.210.5 L/min 1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/

A u s t i n , , Boston 'Charlotte : , Chicago :i,Cincinnati ::, cleveland : D a l l a s r Detroit , Indianapolis l\41 Los Angeles [V] Milwaukee Minneapolis lvlontreal ' N a s h v i l l e ' New Jersey ri Phoenix : Portland , Flichmond Fochester San Francisco St. Louis r' Tampa l, Toronto [M] 'r: Vancouver :,, Windsor (lndianapolls) SMC Corpordon olAme Da U.S.A.

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (

B P_1 or n_1 H_1 P_1=A(AB)/4 n_1=B+(AB)/4 H_1=(AB)/2 Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere B Display value fine adjustment function (F6) Fine adjustment of the indicated value of the pressure sensor can be made within the range of 5% of the read value. (This eliminates wide variations of the indicated value.) 5% R.D.

kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H M3X5 L(2) 0.50.7 Nm M35L ZS-28-B M35L M38 L(2 ) M38L ZS-27-01 ZS-27-C 90 2 -10No.PS-OMG0001CN-H 1 a a1DIN b (b -

NCA1-CB325 NCA1-CB800 NCA1-CB1000 MR 1 1/16 1 1/8 1 3/4 M 3/4 1 1 3/8 LR 1 1/16 1 1/4 1 7/8 FL 1 7/8 2 1/4 3 F 5/8 3/4 7/8 E 3 1/2 4 1/2 5 DD 1/2-20 5/8-18 5/8-18 CW 5/8 3/4 1 CD 3/4 1 1 3/8 CB 1.265 1.515 2.032 BA 2 9/16 3 1/4 3 13/16 AA 3.6 4.6 5.4 Weight (lbs) 2.79 5.45 9.89 Note: Pivot pin is not included. Rod Clevis CW CW CB ER CH F CD A L CE KK Tap through Dimensions Part No.

Refer to page 336 for the lead wire length of L and M plug connectors. Refer to page 337 for the connector assembly with cover for L and M plug connectors. Note) Enter the cable length symbols in .

[m] 2 2 5 5 A 10 B LE-CSM: Motor cable (13.7) SSCNET#optical cable (LECSS -S , LECSS2-T ) LE CSS (30) L 1 LE-CSB: Lock cable Motor type (11.8) (13) Cable length S AC servo motor L 0.15 m K 0.3 m J 0.5 m 1 1 m 3 3 m L (29.6) Cable description S SSCNET III optical cable LE-CSE: Encoder cable LE-CSSis MR-J3BUS M manufactured by Mitsubishi Electric Corporation. 18.8 (30) L 37.4 Regeneration