Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: [8] 8(5/16inch), Liquid contact parts material: Resin + Metal, Mounting Hole: Presence

25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication also on the sensor., Fast response: either 50 ms, 0.5s, 1,

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting 2-One-touch fitting 2n1-M5 x 0.8 (A, B ports) (A, B ports) Applicable tube O.D.: 4 6 (X, PE ports) Applicable tube O.D.: 6 (L4) L3 Applicable connector: D-SUB equivalent { } JIS-X-5101 MIL-C-24308 Connector case attachment lever (both sides) (3.2) 101.2 9 3.1 Lateral connector entry 8 36.3 5.5 35 6.5 18 28.8 34

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

A A n-One-touch fitting (A port) (Pitch) P=19 21 C6: Applicable tube T0604 C8: Applicable tube T0806 Rc (PT) 1/8 L plug connector (L) M plug connector (M) (Non-locking) Manual override (P/R port) 4-Rc (PT)1/4 69.5 [76] 69.5 [76] 57.1 50.5 35 8.5 63.5 63.5 63.5 4-Rc (PT)1/4 (P/R port) 14 1 21.5 21.5 A A 14 1 9.5 C6: MAX. 6 C8: MAX. 6.5 9.5 (Pitch) n-Rc (PT)1/8 (A port) P=19 21 22.5 22.5 43

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

B A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 SMC VQD 13 2-M4 clamp screw EXH outlet M5: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A),

VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 8 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: L (Bottom), Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: Back, Connecting Tube Diameter: -, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence,

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

VZS

Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Component Parts SY w Description Material N.C. Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(For details, refer to page 610.) 605 3 Port Pilot Solenoid Valve 10-SYJ300 Construction 2(A) 2(A) Directional Control Valves Air Grippers Modular F. R. Fittings & Tubing Air Cylinders Rotary Actuators N.C. N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For connector cable of M8 connector, refer to page 90. 49 Series SYJ7000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) y e q t r q t r w w (B) 2 (A) 4 (A) 4 (B) 2 i i 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 (R2) 1 (P) u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 t q r w 5 (R1) 3 (R2)

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible The flow rate value and the device status can be figured out easily via the process data.