SMC Corporation of America
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A R 04 Z A q w e r u t y N Common Supply Type 1.

Circuit diagram 5 6 Q N 5 6 Q N Note 1) The above dimensions are for ZQ1000U1 L-E G-00.

R73CL 5m: Z Ex.) R73CZ : N Ex.)

) SJ3000-50-5AR-ll-N External pilot specification X, PE port: Metric size 4 Inch size 5/32" SUP/EXH block assembly 1 Note 1) SJ3000-50-6A-ll-N For different pressures Note 2) 2 Note 1) 4 6 SJ3000-53-1A-N VZ1000-11-1-l SJ3000-53-2A End block assembly DIN rail End block assembly For U side Refer to page 61.

VQ 1M1 2 3 X2 17-2-89 Series VQ20/30 Dimensions Plug lead unit manifold (VV2Q22) Mounting hole 2-4.5 through A port C6: One-touch fitting for 6 C8: One-touch fitting for 8 DIN rail mounting 4-M3 x 0.5 Formulas L1 = (n 1) x 29 + 49 L2 = L1 10 L3 = L4 10.5 L5 = L1 11.2 Dotted line: DIN rail mounting (-D) 1 2 3 4 5 6 7 8 9 10 Dimensions n: Station (Max. 20) L n 11 12 13 14 15 16 17 18 19

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1

Speed regulation range (s/90) CRB1 0.082 J 0.12 J 0.398 J 0.6 J 0.112 J 0.16 J 0.54 J 0.811 J Allowable kinetic energy 245 N 390 N 490 N 588 N 245 N 390 N 490 N 588 N Allowable radial load Shaft load MSU 196 N 340 N 490 N 539 N 196 N 340 N 490 N 539 N Allowable thrust load Bearing Bearing CRJ Side ported or Axial ported Port location Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Side ported CRA1 Size Rc 1/

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

Otherwise, malfunction may result due to noise. 1 DC(+) 3 DC(-) 4 OUT Internal circuit and wiring example Z/ISE40AL Output specification -N NPN open collector output type Max. 28 V, 80 mA Residual voltage 1 V or less -P PNP open collector output type Max. 80 mA Residual voltage 1 V or less : The lead wire with connector is not included with the product.

color 76 41.5 29.5 12 3.2 12 14.2 L type: Black color 76 41.5 29.5 12 3.2 12 14.2 1 8 82 44.5 30.5 12 4.2 12 17.2 86 44.5 30.5 12 4.2 12 17.2 94.5 54 39 14 4.2 17 19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc

/exhaust center 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) VQ2000-FPG01 01 F Option IN side port size OUT side port size 01 02 C6 C8 None Nil 01 02 C6 C8 Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting DIN rail mounting (For manifold) D F With bracket Name plate N Drop prevention Intermediate

YES Hysteresis mode OFF Z I SE1 2 n-1 n-2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) ZSP Press SET button.

A: Orange B: Green M3 Terminal screw (Rail mounting hole pitch 12.5) Block separation lever (Push type) (Station n) (Station 1) (mm) (DIN rail dimension) 2 stations 3 4 5 6 7 8 9 10 stations Stations n L1 L2 L3 L4 160.5 173 185.5 198 223 235.5 248 273 285.5 150 162.5 175 187.5 212.5 225 237.5 262.5 275 C4 C6 126 142 158 174 190 206 222 238 254 17 15.5 13.5 12 16.5 14.5 13 17.5 15.5 C4 C6

Suction Verification High Vacuum Suction Work 1 Work 2 Work n Max. A P-1 H-1 n-1 Formula for Obtaining the Set-Value Min.

VFR 1 3 5 F Z Plug-in VZ5 4 Note) Thread type VP4 VZS 1 0 5 L Non plug-in VZ5 4 VFS Type of actuation Thread type VS4 2 position single solenoid Nil F N T Rc G NPT NPTF VQ7 1 Port size Body option EVS Nil: Without sub-plate 01: Rc With sub-plate Note) 1 8 0: Individual exhaust for the pilot valve 2 position double solenoid VFN 2 PE port 3(R) port 3: Common exhaust type for main and pilot

Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5

D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A

C6 (6 Onetouch fitting) C8 (8 Onetouch fitting) Rc(PT)1/8 C6 (6 One-touch fitting) C8 (8 One-touch fitting) Port size A, B port Rc(PT)1/8 Rc(PT)1/8: 11 (0.6) C6: 8.6 (0.48) C8: 9.9 (0.55) Body ported SYJ7l2l __ __ __ (1) Valve effective area mm2(Cv) Base mounted SYJ7l4l __ 11.9 (0.66) 9.5 (0.53) C6: 8.5 (0.47) C8: 9.7 (0.54) __ Note 1) Value for a single solenoid 2 position valve mounted

VFR Thread type 1 3 5 F Z Plug-in VZ3 4 VP4 Note) VZS 1 0 5 L Non plug-in VZ3 4 VFS Type of actuation Thread type VS4 2 position single Nil Rc F N T G NPT VQ7 1 Body option NPTF EVS 0: Individual exhaust for the pilot valve Port size 2 position double 1 8 Nil: Without sub-plate 01: Rc With sub-plate VFN 2 3(R) port PE port 3: Common exhaust type for main and pilot valve 3 position closed