5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Nil D Standard type (1.0 W DC) 2 position double (Double solenoid specifications) Coil voltage (1) High pressure type (1.0 MPa, 1.0 W DC) [Applicable to metal seal only] K 5 6 24 VDC N Y R Negative COM 12 VDC (1) Low wattage type (0.5 W DC) Note) Light/Surge voltage suppressor is built-in. (2) External pilot specifications Note 1) Except double (latching) type.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

4 Port Solenoid Valve Series VQD1000

''()% ,)# % # ## ., & /, '# & , . '0 23/ 414 e u q t r y !0 V100 S070 i VQD o 23/ 4#40 56"4!4 ! VKF w /, 1 !() '!2 VK VT VS & "# # & # ''()% * 8 7 23/ 9 : : 7 23/ : 7 9;9 8 : (; ! (7( :9 : (<8 9( = ' Series VQD1000 # $ % "" "" " ! ! " & ! " * $ & "( ' " ' ( ) " " Series VQD1000 !""#"$$ # !""#"$ $ # VV061 !

5-Port Solenoid Valve

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted y Pilot valve option !

Compact 5-Port Solenoid Valve

C10: 10 (SMC) C12: 12 (SMC) L1 = 16 x n1 + 147 + 47 x n2 L2 = 16 x n1 + 53.5 L4 = L3 10.5 L5 = (L3 L1) / 2 L6 = 47 x n2 + 81.5 * These figures show the JJ5SY5-10S6Q22-05D-C12. * Refer to page 99 for dimensions of external pilot (Made to Order) and silencer. n1: Valve stations n2: I/O unit stations L3: DIN Rail Overall Length Valve stations (n1) I/O unit stations (n2) 2 3 4 5 6 7 8 9 10

C85

1 y q r e i !2 o !

C85

1 y q r e i !2 o !

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Air Cylinder Series CM2

Z X Y N S + Stroke LZ LX LT LS + Stroke ZZ + Stroke With rod boot l 8 8 B3 Width across flats e JH JW f h ZZ + Stroke Cushion needle (Width across flats 1.5) 45 With air cushion WA WA N1 N1 Built-in One-touch fittings G G One-touch fitting port size P Q (mm) ZZ A AL B B1 B2 D F FL G H H1 H2 I K KA LC LD LH LS LT LX LZ MM N NA NN P S X Y Z Bore size 8 1 20 18 40 8 13 8 41 28 5 6 4 25 40 55

Electric Actuator with Integrated Guide

Tact time Moving distance: _mm t = Tact time: _s s = Cycle time: _s Time t s z x Example) Projection distance x: _mm y: _mm z: _mm Work piece moment y Environment General, Clean room, Mist environment, Dusty environment 94 98 Series LTF Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Aluminum High Vacuum Angle Valve

Note 2) A coating of vacuum grease [Y-VAC3] is applied to the valve seat of the vacuum part.

Table of Contents

0 IS1000 No. q w e r t y u i o !

7.5

0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !

CATALOG

CG-F080 CG-F100 Pins CG-T020 CG-T025 CG-T032 CG-T040 CG-T050 CG-T063 N/A N/A Clevis CG-D020 CG-D025 CG-D032 CG-D040 CG-D050 CG-D063 CG-D080 CG-D100 Single rod clevis I-G02 I-G03 I-G03 I-G04 I-G05 I-G05 I-G08 I-G10 Double rod clevis Y-G02 Y-G03 Y-G03 Y-G04 Y-G05 Y-G05 Y-G08 Y-G10 Rod clevis pin IY-G02 IY-G03 IY-G03 IY-G04 IY-G05 IY-G05 IY-G08 IY-G10 Rear clevis pin CD-G02 CD-G25 CD-G03 CD-G04

5 Port Solenoid Valve Series SY3000/5000/7000/9000

DO Without connector Y With connector DIN terminal (Type Y) Without connector YO Note) Do not replace V111 (G, H, L, M) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

) (Station 1) (Station 1) (Station n2) Light/surge voltage suppressor Individual SUP spacer Individual EXH spacer 63.5 60 52.5 12 (For DIN rail mounting) (7.5) n1 = Valve stations n2 = Input block stations L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 L1: DIN rail overall length Valve stations (n1) 2 3 4 5 6 7 8 9 10 11 12 13

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

: VQZ2 2(R)Y -N3T, N7T, M5T Indicator light 87 MAX.10 300 (Lead wire length) 83 Applicable cord O.D.

V

(N)VV4Z1 20 S TAT I O N S 1 T H R E A D T Y P E 02 2 Stations to 20 20 Stations PT 00T NPTF D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D M P L U G T Y P E F Bracket O P T I O N D I M E N S I O N S M A N I F O L D T Y P E 20 T O P P O R T E D G R O M M E T T Y P E Lead Wire Length ACCESSORIES M A N I F O L D T Y P E 20 T O P P O R T E D DXT170-25-1A Blanking Plate Assembly

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Pilot valve symbol 200 AC 12 DC 100 AC 110 AC 220 AC 24 DC K1 K1 K2 J1 J1 J2 Q1 Q2 N1 N2 Nil Y q w Nil e Nil Y r t Nil y Nil u Nil i Nil o Nil !0 Combinations q to !

ISO Cylinder

7.5 18 25 29 15 30 26 0 0.033 79 17 14 26 115 Front side mounting: Cl85RBF/Y B 20/25 Stroke Width across flats SW G1 EE KK (WH) EE G2 4 x FF ND h8 NA NA F FX Width across flats K C 3 AM F FX N2 NA NA H N1 ZZ + Stroke S + Stroke Head cover axial port Boss-cut/Basic [mm] Dimensions Bore size AM C EE F FF FX G1 G2 H K KK N1 N2 NA ND S SW (WH) ZZ 20 20 8 G 1/8 30.4 M5 x 0.8 depth 9 22 22 8 30