Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.
Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of
D LED R R NL Markings For AC, 12 VDC or less For 24 VDC or more + 1 2 1 2 1 2 NL: Neon light R: Resister LED: Emitting diode R: Resister D: Protective diode LED: Emitting diode R: Resister 1429
OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).
N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.
Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 NPTF VP4 VZS Type 40: Base mounted (A, B port bottom ported) Applicable solenoid valve VK3140 VK334 How to Order VV5K3 40 05 M5 Type VK334 Type VK3140 VFS Thread type R port: Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 Applicable blanking plate assembly VK3000-7-1A Valve stations VS4 Nil F N T Rc 01 1 station G NPT VQ7 20 20 stations NPTF A port: M5 x 0.8 EVS
part Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C None w, e, r, t w, r, t e Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.
9.5 34.5 47.8 R 4.5 MPa PRESSURE R 4.5 21 OUT SET MADE IN JAPAN 8.75 Panel thickness 0.5 to 6 7 2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 Dimensions Panel fitting dimension 1-pc. mounting Multiple (2 pcs. or more) horizontal mounting MPa PRESSURE MPa PRESSURE MPa PRESSURE OUT OUT OUT SET SET SET 31 x n pcs. + 3.5 x (n pcs. 1) 0 0.4 31 0 0.4 31 24
6 r t !3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !
6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !
FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V
A( ) A 24V 12V 100V SY100-82-3-05 SY100-82-3-06 SY100-82-2-01 24V DC 12V DC 100V AC SOL SOL C(+) C ZNR Light DIN connector circuit with light AC circuit DC circuit 1 2 1 2 NL R R LED NL: Neon light R: Resistor LED: Emitting diode R: Resistor 4.3-2 Series VQ20/30 Manifold Caution Caution Valve Mounting How to Mount/Remove from DIN Rail After confirming the gasket is correctly placed under
2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output
Rod end nut 15 2-M5 x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16
Piping Specifications Part N7L C6L C4L N7H C6H C4H T1 01 NPT 1/8 M5 x 0.8 R 1/8 M5 x 0.8 Port size One-touch fitting Straight type 4 mm 5/32 inch 1/4 inch 6 mm One-touch fitting Elbow type 4 mm 5/32 inch 1/4 inch 6 mm Sensor pressure receiving area: Silicon, Piping port: C3602 (Electroless nickel plated), O-ring: HNBR Wetted part material O-ring: NBR, fitting: PBT O-ring: NBR With lead
Model 6 6 6 ZH05DA ZH07DA 1/4" 1/4" 1/4" ZH05DA ZH07DA One-touch One-touch SUP. EXH. 6 6 8 ZH10DA 1/4" 1/4" 5/16" ZH10DA 8 10 10 ZH13DA ZH15DA 5/16" 3/8" 3/8" ZH13DA ZH15DA 10 12 12 ZH18DA ZH20DA 3/8" 1/2" 1/2" ZH18DA ZH20DA One-touch Oval release button is only available with 6. VAC. One-touch and screw-in connection SUP. VAC. EXH. Model SUP. VAC. EXH.
Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 2 (Input: Analog 4 to 20mA, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 4 to 20mA), Wire Connector: With lead wire with connector (3 m/5 core), Unit Specification: Unit Specification, Bracket: R (Bracket (mounting position: Side), Operation Manual/Calibration Certificate: K (with Operation
Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: M (SI units only)
Rated Control Flow Range: 50 (0.5 to 50 L/min), Port Size: N1 (1/8 NPT), Input/Output Specification: 1 (Input: Analog 1 to 5 V, Output 1:IO-Link/NPN/PNP, Output 2: Analog Output 1 to 5V or 0 to 10V), Wire Connector: Q (M12-M12 lead wire with connector (3 m/5 core)), Unit Specification: M (SI units only), Bracket: S (Bracket (mounting position: Stream side))