5 Port Solenoid Valve Series VQZ1000/2000/3000

/exhaust center 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) VQ2000-FPG01 01 F Option IN side port size OUT side port size 01 02 C6 C8 None Nil 01 02 C6 C8 Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting DIN rail mounting (For manifold) D F With bracket Name plate N Drop prevention Intermediate

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) M5 VF1;20-;;1-M5 5(EA), 3(EB) M5 4(A), 2(B) 1/8 VF1;20-;;1-01 5(EA), 3(EB) M5 VF1;3;-;;1-M5 VF1000 4(A), 2(B) M5 VF1;3;-;;1-01 4(A), 2(B) 1/8 1(P), 5/3(R) 1/8 Type 30 manifold base 1(P) 1/8 Type 31 manifold base 5(EA), 3(EB) M5 Applicable tubing O.D.

Modular/F.R.L. Units Series AC

AF F F E E B C AR Cross spacer E: 4 x Rc F: Without thread E D A AL A 23 B 16 C 14 D 25 Applicable model AC10 Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 AW AC20 40 40 22 40 AG AC25, AC30 49 43 28 48 AV AC40 60 48 36 54 AF800 AF900 Caution on Mounting AC40-06 72 62 40 62 1.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

1 42 1 0 1 0 1 0 42 1 0 1 0 1 0 43 1 0 1 0 1 1 43 1 0 1 0 1 1 44 1 0 1 1 0 0 44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46 1 0 1 1 1 0 46 1 0 1 1 1 0 47 1 0 1 1 1 1 47 1 0 1 1 1 1 48 1 1 0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

VQ Example: SS3YJ7-20-03 .1 pc.(Manifold base) SYJ712-5LZ-01 .2 pcs. (Valve) SYJ700-10-2A .1 pc. (Blank plate ass'y) VQZ SS3YJ7-42R-03-01 .1 pc. (Manifold base) SYJ714R-5G .2 pcs. (Valve) SYJ700-10-2A . .1 pc.

One-touch Fittings

Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.

Modular Design with Uniform Body Style

R S U V1 V2 AC20C-V-D 1/8, 1/4 1/8 1/8 169.6 87.6 48.5 41.6 40 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30C-V-D 1/4, 3/8 1/8 1/4 224.6 115.4 55 30 55.1 50 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40C-V-D 1/4, 3/8, 1/2 1/8 3/8 295.6 147.1 69.7 38.4 72.6 75 35.5 50 75.2 40 55 9 18 7 50 65 AC40C-06-V-D 3/4 1/8 1/2 315.6 149.1 71.7 38.4 77.6 75 35.5 50 80.2 40 55 9 18 7 50 65 Model Optional

JXCx-OMY0004

Movement Speed Position Acceleration Deceleration Force Value speed Speed Area 1 Area 2 In pos force force mode mm/s (mm) mm/s2 mm/s2 (mm) (mm) (mm) mm/s 0 1 Absolute 100 50.00 1000 1000 0 0 0 100 0 0 0, 1 2 Relative 50 10.00 1000 1000 0 0 0 100 0 0 0, 1 (E.g.) Flow chart Controller (1) Select/input Step No.1.

Base Mounted Metal Seal/Rubber Seal Series VQ

] (2) VQ4 EX120-SDN1 [EX124-SDN1] (2) EX120-SCS1(-XP)(1) [EX124-SCS1] (2) VQ5 EX120-SCS2(-XP)(1) [EX124-SCS2] (2) EX120-SMJ1(-XP)(1) [EX124-SMJ1] (2) U S AXT100-1-P (4) P kit J kit G kit F kit VQZ w AXT100-1-J (4) U S AXT100-1-GU20 AXT100-1-F (4) e r VQD U S U S Note 1) Suffix -XP for dust-protected type SI unit.

JXCx-OMT0005CN

TB PLC 0 No. 3 ABS 1 INC 2 *1 (mm/s) (-) (+) mm 42 - 1 mm/s 2 1 mm/s 2 100% * *1 0 1100 1100 INP ON INP ON *1 1100 ( mm/s) *1 * *1 (mm/s) * (-) (+) AREA ON mm 1122 AREA ON 1 1 *1(1)2(2) 1=2=0 AREA OFF 2 2 (-) (+) 43 - mm mm INP ON INP ON *1 * INP ON () INP ON *1 44 - 11.2 ID ID 132 ID () IO IO * [64 ] * [] S S * (+) (+) *1 + mm (-) (-) *1

VM

one way roller lever, and 3 position selector. 3.5-11 VM100 How To Order S 01 01 3 1 VM1 Indicator Suffix of actuator Z W/ miniature indicator (Bottom piping only.)

Flow Control Equipment

ASV How to Order AK 01 06 S AS 1 1F G 2 2 ASS Body size 1 2 3 4 Options M5 S None Sealant 1 8, 1 4 8 3 Applicable tube O.D.

Table of Contents

80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 MVGQ CCVL1-G-S 66

•

1 part, $0 It 1$ wasranled fOI a year after It is delivered Also evvn 1\'llIlIn the warranty paned, !he Weat 01 s prvduCI duB lO !he use 01 !

JXCx-OMY0008

Movement Speed Position Acceleration Deceleration Force Value speed Speed Area 1 Area 2 In pos force force mode mm/s (mm) mm/s2 mm/s2 (mm) (mm) (mm) mm/s 0 1 Absolute 100 50.00 1000 1000 0 0 0 100 0 0 0, 1 2 Relative 50 10.00 1000 1000 0 0 0 100 0 0 0, 1 (E.g.) Flow chart Controller (1) Select/input Step No.1.

JXCx-OMY0006

Movement Speed Position Acceleration Deceleration Force Value Area 1 Area 2 In pos force speed force mode mm/s mm mm/s2 mm/s2 mm mm mm mm/s 0 1 Absolute 100 50.00 1000 1000 0 0 0 100 0 0 0.1 2 Relative 50 10.00 1000 1000 0 0 0 100 0 0 0.1 (E.g.) Flow chart Controller (1) Select/input Step No.1.

SFOD-OMT0005CN

0 () 1 2 () 3 () 4 5 6 1 7 8 9 ON 10 11 12 13 1 14 2 15 Word2/ Word Bit 0 OFF ON*1 1-7 () 2 8-9 1:ABS() 2:INC() *2 10-15 () Word3 Word Bit 3 0-15 1 1 mm/s Word4,5 Word Bit 4 0-15 () (-)(+)*3 0.01 mm 5 0-15 () Word6 Word Bit 6 0-15 1 *1 1 mm/s 2 *1 ON ONOFF PLC *2 1(ABS)2(INC) *3 20(P.83) -39- Word7 Word Bit 7 0-15 1 *1 1 mm/s 2 Word8 Word Bit 8 0-15 *1 1% Word9

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Valve Single Unit

S 5 VDC R 3 VDC 1-6-55 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x 0.8

IIIIIII

F O.F. 5 07 tbs. {2.3 t\ol T T . 90" 5 7 4 (145 9) 452 1 1 4 9 ) t t 8 t30l 1 2 2 {3t } 0 0 6 (1 s) l 1 ?