High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

Free Mount Cylinder Series CU

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

1 4/2 (P A/B) Flow characteristics (4) Weight (kg) 4/2 5/3 (A/B EA/EB) b Cv C [dm3/(sbar)] b Cv C [dm3/(sbar)] VF3122--01-F 2 position single 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 2 position single 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

Air Cylinder Series MB

VA T N ZZ + 2 strokes FX FZ (mm) Effective thread length (mm) Width across flats Ee11 30 35 40 45 45 55 A 22 30 35 35 40 40 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 Fd 25 31 38.5 39.5 45.5 54 FD 7 9 9 9 12 14 FE 3 3 2 2 4 4 FT 10 10 12 12 16 16 FX 72 83 100 115 126 150 FY

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

H thread effective depth C (Also back cover) 2-N through (Port size) Piston rod cross section Width across flats K2 B + Stroke L + Stroke A + 2 (Stroke) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32 2-N through (Port size) 2-H thread effective depth C (Also back

ISO Cylinder

45 + 15 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 Band mounting Band mounting (n 2) 2 15 + 40 D-C7l D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6) D-C7l D-C80 10 15 50 50 + 20 (n 2) (n = 2, 4, 6) (n = 2, 4, 6) (n = 2, 4, 6) D-H7l D-H7lW D-H7BA D-H7NF D-H7l D-H7lW D-H7BA D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5 (n 2) (n = 2, 4, 6) (n=2, 4, 6) (n 2) 2 15

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Body width 29 mm 2 Compact Cylinder Type Pin Clamp Cylinder Series C(L)KQG32 How to Order Clamping height B L 32 075 R A L C LOW type KQG C X2081 X2082 KQG C Clamping height B L 32 075 R A H C HIGH type Number of auto switches With lock Nil 2 pcs. Bore size S 1 pc.

Refrigerated Air Dryers Series IDF/IDU

254 R 1 IDFA37E R 11/2 347 273 382 P. 65 to 67 R407C (HFC) IDFA55E 432 390 510 R 2 IDFA75E 720 660 822 2.

Free Mount Cylinder

d Through d Through d Through Width across flats L 2-P through SA + Stroke 4-T counterbore S + Stroke Z + 2 x Stroke Port size A Stroke range (mm) 5 to 30 A' B C d D E F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5Note) ZC(D)UKC16 ZC(D)UKC20 ZC(D)UKC25 M5 x 0.8 Rc 11 12.5 20 32 2 6 7 8 13 17 28 31 1 8 Rc 1 8 19.5 5 to 50 22 40 62 5 12 11 12 24 29 51.5 23 34.5

7ND9071en

ND_E1 SIRA 11 ATEX 1006X II 2 G Ex d IIC T6...T4 Gb II 2 D Ex tb IIIC T80 C...T105 C Db IP66 Input: Ui 30 V Output: Ui 30 V, Pmax = device limits itself.

Table of Contents

P P C C U U O O S S L L H H 8 3 11.5 5 L2 dimension Stations 1 2 3 4 5 6 7 8 9 M DIN rail part no.

Air Cylinder

18 15.5 13 14 9.2 12 2 12 10 (12) 35 5 26 M4 x 0.7 depth 7 8 M8 x 1.25 24 1/8 69 (77) 11 11 M5 x 0.8 106 (114) 25 Up to 300 301 to 1500 22 19.5 17 16.5 11 14 2 12 10 (12) 40 6 31 M5 x 0.8 depth 7.5 10 M10 x 1.25 29 1/8 69 (77) 11 11 M6 x 0.75 111 (119) 32 Up to 300 301 to 1500 22 19.5 17 20 12 18 2 12 10 (12) 40 6 38 M5 x 0.8 depth 8 10 M10 x 1.25 35.5 1/8 71 (79) 11 10 (11) M8 x 1.0 113

5 Port Solenoid Valve

4 (A) 1 (P) 2 (B) 3 (R2) t u Dual 3-Port: S07B0 A Plug-in Manifold Stacking Base C i r e w q y r S07A0 4 (A) 2 (B) 5 (R1) 1 (P) 3 (R2) N.C. + N.C.

Mechanically Jointed Rodless Cylinder Series MY1

128 RB2725 9 115 30 11 99 25 40 20 66 18.5 MY1M63 8 13 (Max. 38) 152 RB2725 9.5 35 11 99 25 52 26 77 19 138.5 992 Series MY1M Mechanically Jointed Rodless Cylinder Slide Bearing Guide Type Side Support Side support A MY-SA 2 x G MY1B 2 x H F E A B C D MY1M MY1C Side support B MY-SB MY1H MY1HT 2 x J MY1W MY2C E C D A B MY2H MY3A MY3B B 71.6 79.6 95 118 142 164 202 C 15 25 35 45 D 26 38 50

Magnetically Coupled Rodless Cylinder

E G H B Mounting nut width across flats C G E NN (R) NA Q N F I NA F N CC0.1 CY3B50, 63 CY3B6 to 15 (mm) G 5 5 5.5 7.5 7.5 8 11 14 14 B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 H 13.5 12.5 13 20 20.5 22 29 33 33 CC 32 38 I 28 34 40 50 58 72 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 J 4.5 4.5 6 6 8 8 10 12 12 Q E 4 1.5 2 2 2 2 3 8 8 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

[69.2] 68.5 75.9 20.5 2 11 11 20.5 2 11 2 11 11 11 20.5 7.5 16.5 24.5 7.5 16.5 7.5 16.5 24.5 24.5 50 Note) Refer to page 176 for dimensions of connector types. 61 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY3000 [ ]: AC 2 position double Grommet (G), (H): 10-SY3240(R)-01 G H Directional Control Valves Air Grippers Modular F.

AC

AWD ITV VBA VE VY G AL Model Port size B J A F G H I C D E 100 100 60 60 73 73 230 230 431(481) 437(487) 59 63 166 162 117 117 3-M5 X 0.8 X 6 3-M5 X 0.8 X 6 AL800-12 to 14-1 AL900-20-1 11/4 / 11/2 2 ( ) With float switch 1.17-10

Modular Design with Uniform Body Style

. body C A A Model P1 P2*1 A B C Applicable AC size Y24-D 1/8, 1/4 1/8 28 35 42 AC20-D Y34-D 1/8, 1/4, 3/8 1/8 31 43 53 AC30-D Y44-D 1/4, 3/8, 1/2 1/8 39 51 71 AC40-D Y54-D 1/4, 3/8, 1/2, 3/4 1/8 47 54 71 AC40-06-D Y64-D 3/8, 1/2, 3/4 1/8 62 64 90 AC50-D, AC60-D Model P1, P2*1 A B C Applicable AC size Y24-1-D 1/8, 1/4 40 35 42 AC20-D Y34-1-D 1/8, 1/4, 3/8 49 43 53 AC30-D Y44-1-D 1/4, 3/8,

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Connector C Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) Cable length (L) [m] A1 B1 (13.5) (17.7) (17.7) 1 1.5 3 3 5 5 8 8 A 10 B 15 C 20 1 2 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Driver side (14.2) Connector C (Terminal no.) 1 2 5 6 (5.5) (6.3) Produced upon receipt of order