High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

P), 3/5(R) port Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 VZ One-touch fitting for 4 C4 Port size 4(A), 2(B) port One-touch fitting for 6 C6 M5 x 0.8 VF One-touch fitting for 5/32" B3 One-touch fitting for 1/4" B7 Flow Characteristics VFR Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2(B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VP4 Courtesy of

Free Mount Cylinder Series CU

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

Air Cylinder Series MB

VA T N ZZ + 2 strokes FX FZ (mm) Effective thread length (mm) Width across flats Ee11 30 35 40 45 45 55 A 22 30 35 35 40 40 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 Fd 25 31 38.5 39.5 45.5 54 FD 7 9 9 9 12 14 FE 3 3 2 2 4 4 FT 10 10 12 12 16 16 FX 72 83 100 115 126 150 FY

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

ISO Cylinder

KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25 13 Floating Joint: JA In the case of dimension without C M M U U D F B G B E E H C P A [mm] Bore size Part no.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

7 240.5 5 36 13 8 245.5 7 7 40 34 270.5 39 275.5 16 25 30 40 11 7 240.5 5.5 36 16 8 245.5 9.5 7 47 34 270.5 39 275.5 30 P P1 Nil Rc 1/8 TN NPT 1/8 TF G 1/8 40 18 8 245.5 11 9 47 39 275.5 TN NPT 1/4 TF G 1/4 Nil Rc 1/4 1286 K series Pin Clamp Cylinder Series CKQ K/CLKQ K G P G P How to Order Built-in standard magnet With magnetic field resistant auto switch K C 50 177 R A L P4DWSC C KQG

Refrigerated Air Dryers Series IDF/IDU

AMF (519) Compressed air outlet Port size Compressed air inlet Port size SF (D) (B) (A) SFD (128) (455) LLB Compressed air inlet Port size Compressed air outlet Port size (110) (250) AD (C) GD (A) (mm) Dimensions Mass (kg) Applicable dryer IDF22E IDF37E IDU22E IDU37E IDU55E IDU75E Port size Rc 1 1 1/2 1 1 1/2 B C D A Part no.

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

Table of Contents

Octagon Port size C B T-interface Center of F .R.L. body D A (mm) C 12 D 14 E 8 B 19 A 11 Port size M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 Model Y110-M5 Y210-01 Y210-02 Y310-01 Y310-02 Y410-02 Y410-03 Y510-02 Y510-03 Y610-03 Y610-04 Applicable model AC10, AC10B AC20, AC20B AC20C AC25, AC25B AC25C, AC30 AC30B, AC30C AC40, AC40B AC40C 32 28 19 42 15 39 30 19 53 15 44 36 24 62 19 AC40

5 Port Solenoid Valve

4 (A) 1 (P) 2 (B) 3 (R2) t u Dual 3-Port: S07B0 A Plug-in Manifold Stacking Base C i r e w q y r S07A0 4 (A) 2 (B) 5 (R1) 1 (P) 3 (R2) N.C. + N.C.

Modular Design with Uniform Body Style

. body C A A Model P1 P2*1 A B C Applicable AC size Y24-D 1/8, 1/4 1/8 28 35 42 AC20-D Y34-D 1/8, 1/4, 3/8 1/8 31 43 53 AC30-D Y44-D 1/4, 3/8, 1/2 1/8 39 51 71 AC40-D Y54-D 1/4, 3/8, 1/2, 3/4 1/8 47 54 71 AC40-06-D Y64-D 3/8, 1/2, 3/4 1/8 62 64 90 AC50-D, AC60-D Model P1, P2*1 A B C Applicable AC size Y24-1-D 1/8, 1/4 40 35 42 AC20-D Y34-1-D 1/8, 1/4, 3/8 49 43 53 AC30-D Y44-1-D 1/4, 3/8,

AC

AWD ITV VBA VE VY G AL Model Port size B J A F G H I C D E 100 100 60 60 73 73 230 230 431(481) 437(487) 59 63 166 162 117 117 3-M5 X 0.8 X 6 3-M5 X 0.8 X 6 AL800-12 to 14-1 AL900-20-1 11/4 / 11/2 2 ( ) With float switch 1.17-10

Magnetically Coupled Rodless Cylinder

33.6 41.6 52.4 65.4 GW 25.5 31.5 37.5 42.5 53.5 63.5 81.5 93.5 HC 25 31 38 43 54 66 84 96 CR 0.5 0.5 1 1 1.5 2 2 3 GP 27 33 39 44 55 65 83 95 J x E M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 CB 2 2 3 3 3 5 5 5 G 4 5 6 6 7 7 8.5 8.5 K 9 14 11 15 13 15 25 24 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 B 6.5 8 9.5 9.5 11 11 14 14 F 6.5

Air Cylinder

x 1.25 15 29 1/8 11 81 11 M6 x 0.75 10+0.08 0 5 1 6.5 15 123 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12+0.08 0 5.5 1 7.5 24 123 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14+0.08 0 6 1.25 8.5 24 144 50 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16+0.08 0 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18+0.08 0 11.5 3 14.5 24 167 80 10 22 M22 x 1.5 23 80

Mechanically Jointed Rodless Cylinder Series MY1

NH NW 110 9 5.5 16 24.5 54 9.5 M6 x 1 5.4 114 53 90 9 M5 x 0.8 30 20 MY1H25 40.5 Rc 1/8 39 53 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 110 13 M6 x 1 37 25 MY1H32 50 Rc 1/8 49 64 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 121 13 M6 x 1 45 30.5 MY1H40 63 Rc 1/4 61.5 75 P indicates cylinder supply ports.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Connector C JXC92 JXC73/83/93 Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) A1 B1 (13.5) (17.7) LE CP 1 1 2 A6 B6 (30.7) Connector A 15 16 Connector D (14.7) L (11) Cable length (L) [m] (10) 1 1.5 3 3 5 5 8 8*1 A 10*1 B 15*1 C 20*1 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (*1 Produced upon receipt of order) Controller side (14.2) Connector C (Terminal no.) 1 2 5 6 (5.5) (6.3

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Flow Rate Characteristics Model 1, 5, 3 (P, EA, EB) 4, 2 (A, B) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Flow rate characteristics C (dm3/ (sbar)) b Cv C (dm3/ (sbar)) b Cv 10-SS5Y3-41(-Q) 10-SS5Y3-42(-Q) 10-SS5Y5-41(-Q) C8 1 4 10-SS5Y5-42(-Q) C10 1 8 1 8 C6 C6 C8 1 4 0.75 0.75 1.8 1.9 3.0 0.19 0.20 0.23 0.20 0.25 0.18 0.18 0.44 0.46 0.75 0.81 0.82 1.9 1.9 3.0 0.23 0.20 0.16 0.12 0.12

Free Mount Cylinder

d Through d Through d Through Width across flats L 2-P through SA + Stroke 4-T counterbore S + Stroke Z + 2 x Stroke Port size A Stroke range (mm) 5 to 30 A' B C d D E F FK FL FY GC GA Model Air port Vacuum port M5 x 0.8 M5 x 0.8 M5 x 0.8 16.5Note) ZC(D)UKC16 ZC(D)UKC20 ZC(D)UKC25 M5 x 0.8 Rc 11 12.5 20 32 2 6 7 8 13 17 28 31 1 8 Rc 1 8 19.5 5 to 50 22 40 62 5 12 11 12 24 29 51.5 23 34.5