ZR

B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 32.4 32.4 VJ3233-X17 PRESS. 2.5~7kgf/cm2 SOL.a SOL.b VJ3233-X17 PRESS. 2.5~7kgf/cm2 SOL.a SOL.b B B A A RESET SET RESET SET Pitch 33 B B A A B B A A VJ3233-X17 PRESS. 2.5~7kgf/cm2 SOL.a SOL.b VJ3233-X17 PRESS. 2.5~

CQS

a) b) D-A9V Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-M9 D-F9W D-M9V D-F9WV D-F9BAL 7-4-42 43 Compact Cylinder: Anti-lateral Load Type Double Acting, Single Rod D-M9, D-F9W Auto switch model D-A9 D-A9V D-M9V, D-F9WV Symbol A B W A B W A B A B HS HS Double

VQ7-6/7-8

SMC SMC SMC 23 20 B A VZ 9 PA A B VF B A VFR PA A B VP4 L1 L2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B A A PA VZS A B SMC VFS PA A VS4 B VQ7 PA A L side R side (2n-1/8) EVS 38 D side VFN 3 68.5 (A, B port) 4n-1/4, 3/8 16 120.5 (Single) 44 155 (3 position)

Slider Type Ball Screw Drive/11-LEFS Series

300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 30 50 Lead B Lead B 40 Work load: W [kg] Work load: W [kg] 20 30 Lead A Lead A 20 Lead H 10 Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 70 Lead B 30 60 Lead B Work load:

C95

A B A B A B A B A B A 125 160 200 250 6.5 18.5 17 45.5 19.5 17 10 22 20.5 49 23 20.5 18 30 28.5 41.5 57 31 28.5 31.5 13 25 23.5 36.5 52 26 23.5 26.5 10.5 22.5 21 34 49.5 23.5 21 24 6.5 18.5 17 30 45.5 19.5 17 20 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

MXQ

B side traveling parallelism to A side Refer to Graph (1).

Compact

B When LECP1, LECP6 or LECPMJ is used.

A

Outside Local Area: (800) 258-9200 !

SZ3000

2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 X P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 24 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 A A 4 A 4 A 4 A 4 A 4 P 1 2One-touch

CL

9 @0 @1 @2 @3 Hexagon socket head cap screw Spring washer Chromium molybdenum steel Steel wire Hexagon socket head cap screw Spring washer Bumper A Bumper B Wear ring Wear ring Hexagon socket head plug Element Piston seal Piston gasket Brake piston seal Rod seal A Rod seal B Middle cover gasket A Middle cover gasket B Cam gasket Mounting nut Rod end nut Chromium molybdenum steel Steel wire

C76

Position (mm) D-A7H/A80H/A72 D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C/F7BAL D-F79F D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-A73 D-A80 D-A79W Bore B A B A B A B A B A 32 8 (6) 7 (5) 8.5 (6.5) 14.5 (11.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (5) 12 (9) 40 10 (11) 12 (9) 7.5 (5.5) 12.5 (9.5) 15 (12) 13 (10) 13 (10) 11 (8) 5 (3) 11 (7) Aim at this number ( ) For air cushion type Auto Switch

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

CM2

0() 0() A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

: (F) Rear flange style: (G) B FY B FY FT ZZ + Stroke FT FZ FX 4-FD FZ FX 4-FD (mm) (mm) Stroke range Bore size (mm) Stroke range Bore size (mm) B FT FD FX FY FZ B FT FD FX FY FZ ZZ Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32 40 50 63 80 Up to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 20 25 32 40 50 63 80 8 8 12 12 16 16 16

Prevents Micro-Bubbles

) 258-9200-www.stevenengineering.com N B A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

VZS

B 8375 (One time per 30 days).

CE

phase J B C D A A COM COM COM B 12 VDC GND F.G.

Table of Contents

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

70astamb1

(800) 258-9200-www.stevenengineering.com DH DA DL DU DU 4-DR DS DE DC DO DO Without Air Cushion B Bore size (mm) Part no.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

2 1 2 3 1 2 1 2 A B C A B A B A B LVA B B B B LVH LVD LVQ Note) For each body class, the second and later numbers or symbols indicate reducing.