Flow Rate: 3500 scfm, Flange Size, ANSI ISO#: 6", Filtration Grade: 0.01 Micron

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

20: LEY32A Lead 16: LEY32DA 100 0 60 30 120 90 0 60 30 120 90 Torque limit/Command value [%] Torque limit/Command value [%] Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 75 or less 100 90 60 1.5 Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 75 or less 100 90 60 1.5 LEY63l (Motor mounting position: Top/Parallel, In-line) 3500

Environment

Lead 20: LEY32A Lead 16: LEY32DA 100 0 20 10 40 30 0 20 10 40 30 Torque limit/Command value [%] Torque limit/Command value [%] Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 25 or less 100 30 60 1.5 Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 25 or less 100 30 60 1.5 LEY63 (Motor mounting position: Top/Parallel, In-line) 3500

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) IR3000-03 IR3000-03 IR3000-03 Supply pressure: 0.5 MPa Back pressure: 0.5 MPa 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.202 0.4 Set point 0.15 0.200 0.3 0.1 0.198 0.2 0.196 0.05 0.1 0.194 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500 3000 3500

15

LEY63l (Motor mounting position: Top/Parallel, In-line) 3500 Lead 2.86: LEY63L (Top/Parallel type only) 3000 2500 Lead 5: LEY63C Force [N] 2000 1500 Lead 10: LEY63B 1000 500 Lead 20: LEY63A 0 30 60 90 120 150 180 Ratio to rated torque [%] Graph of Allowable Lateral Load on the Rod End (Guide) 100 [Stroke] = [Product stroke] + [Distance from the rod end to the center of gravity of the workpiece

Environment

Lead 20: LEY32A Lead 16: LEY32DA 100 0 20 10 40 30 0 20 10 40 30 Torque limit/Command value [%] Torque limit/Command value [%] Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 25 or less 100 30 60 1.5 Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 25 or less 100 30 60 1.5 LEY63 (Motor mounting position: Top/Parallel, In-line) 3500

Micro-Mist Separator with Prefilter Series AMH

system> Series AM Series AMD Series AMH ( Prefilter) + ' Filtration rating . 0.3 I' m 0.01 I'm 0.3+0.01 I'm Oil misl removal rate : O.8ppm (1.0mglm3(ANR)} O .08ppm (O.1 mg/m3(ANR)) 008ppm (O.1 mglm3(ANR)) Micro-Mist Separator with Prefilter Micro-Mist Separator SeriesAMH Available Models Model AMH150 AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 Air flow rate NOle) Q/min (ANR) 200 500 1000 2000 3500

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Standard Specifications AMR3000 AMR4000 AMR5000 AMR6000 Model 1 1 4, 3 8 1 4, 3 8, 1 2 1 2, 3 4 3 4, Port size Fluid Air Proof pressure 1.5 MPa 1.0 MPa Max. operating pressure 0.05 to 0.85 MPa Setting pressure range 5 to 60C (No freezing) Ambient and fluid temperature Relieving type Construction 0.3 m Filtration Max. 1.0 mgf/Nm3 ( 0.8 ppm) (1)(2) Oil mist density in the outlet side 750 1500 3500

AMR3000 to 6000

Filtration Max. 1.0 mgf/Nm3 ( 0.8 ppm) (1)(2) Oil mist density in the outlet side IR 750 1500 3500 6000 Rated flow (/min (ANR)) (3) 1.8 2.8 3.5 6.7 VEX Weight (kg) Note 1) Compressed air density: 30 mgf/Nm3. Note 2) An element for the mist separator is included on the inlet side. Mineral grease is applied on the sliding parts inside the regulator.

AMR3000 to 6000

3 8 1 4, 3 8, 1 2 1 2, 3 4 3 4, Port size Air Fluid 1.5MPa Proof pressure 1.0MPa Max. operating pressure Min. operating pressure (1) 0.05MPa 0.05 to 0.85MPa Setting pressure range 5 to 60C (No freezing) Ambient and fluid temperature Relieving style Construction Filtration 0.3m (2) (3) 750 Max. 1.0mgf/Nm3 ( 0.8ppm) Oil mist density on the secondary side Rated flow (l/min (ANR)) (4) 1500 3500

AFF

Option)/For AFF75A to AFF220A AFF75A AFF125A AD402-03-2 G46-15-02 AFF150A AFF220A Applicable model Auto drain (2 pcs. each) Pressure gauge (2 pcs. each) Companion flange (2 pcs. each) Anchor bolt (3 pcs. each) AI-2S 2BJIS 10KFF 3BJIS 10KFF 4BJIS 10KFF Model AFF2B AFF4B AFF8B AFF11B AFF22B AFF37B AFF75B AFF75A AFF125A AFF150A AFF220A Model Note) Rated flow (l/min (ANR)) 300 750 1500 2200 3500

AMD

AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMD850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l /min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

AME

AME150 AME250 AME350 AME450 AME550 AME650 AME850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

AMF

AMF250 AMF350 AMF450 AMF550 AMF650 AMF850 AMF150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Model AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 Model Note) Rated flow (l /min (ANR)) 300 750 1500 2200 3500 6000 12000 Port size (Nominal size B) , , , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

AMH

AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at pressure of 0.7 MPa. It varies depending on operating pressure.

For UHP gas delivery ; High inlet pressure type: max. 3500 psig (24.1MPa) ; Flow capacity: standard to 30 slpm ; Body material: 316L SS secondary remelt ; Hastelloy® internals available for corrosion resistance ; Tied-diaphragm design

For UHP gas delivery ; High inlet pressure type: max. 3500 psig (24.1MPa) ; Flow capacity: standard to 100 slpm ; Body material: 316L SS secondary remelt ; Hastelloy® internals available for corrosion resistance  

For UHP gas delivery ; High inlet pressure type: max. 3500 psig (24.1MPa) ; Flow capacity: standard (Cv0.13); HF (high flow Cv 0.16) ; Body material: 316L SS secondary remelt ; Hastelloy® internals available for corrosion resistance ; Tied-diaphragm design

For UHP gas delivery ; High inlet pressure type: max. 3500 psig (24.1MPa) ; Body material: 316L SS secondary remelt ; Hastelloy® internals available for corrosion resistance ; Minimizes supply pressure effect by two stage regulation  ; Tied-diaphragm design