Rotary Actuator/Vane Type

Made to Order Symbol Combination Symbol Description Applicable shaft type Applicable size W, J, K, S, T, Y XC1* Add connecting ports 10, 15, 20, 30, 40 XC2* Change threaded holes to through-holes 15, 20, 30, 40 XC3* Change the screw position Symbol Combination XC1 XC1 XC2 XC2 XC3 XC3 XC4 XC4 XC5 XC5 XC6 XC6 XC7 XC7 XC30 X5 XC4 Change the rotation range XC5* Change rotation range between

CLS

Mounted directly to unlocking port Maximum value from range of 100 measured stopping positions 1600 or less 1000 or less 1000 or less 125, 140 1600 or less 1200 or less 1200 or less 160 2000 or less 1200 or less 180 Class 2 Pressure Vessel 2000 or less 1200 or less 200 A class 2 pressure vessel will be required for strokes exceeding those shown below. 2400 or less 1200 or less 250 Cylinder

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

2

400 1600 0.00 0 1000 600 800 400 200 1200 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) Standard dew point40C [Symbol: L], 60C [Symbol: S] IDG30LA IDG50LA P1 = 0.3 MPa 0.08 P1 = 0.3 MPa 0.03 Pressure drop (MPa) Pressure drop (MPa) 0.06 P1 = 0.5 MPa P1 = 0.5 MPa 0.02 0.04 P1 = 0.7 MPa 0.01 P1 = 0.7 MPa 0.02 0 200 400 600 800 0 100 200 300 400 500 Inlet air flow rate

NCQ2/CQ2

Mass (g) Precautions Caution D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model 0.5 8 8 7 1 14 13 Lead wire length (m) Do not fix the auto switch with screws other than the existing screw installed on the auto switch body.

Magnet: D (Built-in), Mounting: B (MX0, Basic), Bore Size: 325 (3 1/4"), Stroke: 1200 (12"), Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC6 (Stainless Steel Rod)

Magnet: Built-in, Mounting: MX0, Basic, Bore Size: 3 1/4", Stroke: 12", Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: Stainless Steel Rod

e

LC7 LC7 E-MY2 X168 Refer to the standard model no. on page 1126, 1132 M Stroke range: 51 to 599 mm LC8 LC8 Example) E-MY2H25-300TAN-M9B-X168 E-MY2H XB10 Refer to the standard model no. on page 1132 LXF LXF Example) E-MY2H25-599TAN-M9B-XB10 LXP LXP 2 Long Stroke XB11 LXS LXS Available with long strokes exceeding the standard stroke range.

Compact Cylinder Series CQS

MU D-X Individual -X Technical data 597 1011Series CQSX Low speed cylinder 12, 16, 20, 25 How to Order Clean series 10 11 Relief type Vacuum suction type C D QSX 10 30 B 20 M9B D Number of auto switches 2 pcs. 1 pc. n pcs.

Air Cylinder

1/4 3/8 3/8 1/2 1/2 30 30 40 45 50 64 76 92 84 90 98 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 601 to 1200 601 to 1200 751 to 1400 751 to 1500 112 136 116 126 100 14 Note 1) Operating temperature range of model with built-in magnet: 10 oC to 60 oC Note 2) For model with built-in magnet, consider the minimum stroke suitable to install the auto switches.

Mechanically Jointed Rodless Cylinders

Guide for Using MY3M Side Support 200 (1200) 180 160 m 140 Weight W (kg) 120 MY3M63 l 100 (800) 80 MY3M40 60 (700) m l 40 MY3M25 (600) m 20 MY3M16 0 1000 2000 3000 4000 0 l l Support spacing l1 (mm) Note) A side support must be used to keep the spacing from exceeding the value inside the parentheses.

Cylinder with Lock

88 9 20 120 58 144 67 6 30 76 241 58 19 66 1/4 stroke 240 52 1001 to 1200 1001 to 1200 105 11.5 23 140 64 170 71 10 40 92 263 58 19 66 258 1/4 stroke 52 1001 to 1200 1001 to 1400 124 13.5 28 164 84 198 87 12 45 112 317 80 21 80 1/4 stroke 310 65 1001 to 1400 1001 to 1500 140 13.5 29 180 100 220 89 12 50 136 347 80 21 81 339 1/4 stroke 65 1001 to 1500 When machining a hole to put a bellows

CQS

acting Double acting Double acting 35, 40, 45, 50, 75 100 75, 100, 125, 150 175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

Basic type / Direct mount type Series CY3B/CY3R

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Support brackets are not for mounting; use them solely for providing support. (1400) (1400) (1400) (1400) (1400) (1400) MY1CW40 MY1CW40 MY1CW40 50 50 MY1MW32 MY1MW32 MY1MW32 MY1CW32 MY1CW32 (1100) (1100) (1100) (1100) 40 40 (1200) (1200) (1200) (1200) (1200) (1200) MY1MW25 MY1MW25 MY1MW25 MY1CW25 MY1CW25 MY1CW25 30 (1000) (1000) (1000) (1000) 30 MY1MW20 MY1MW20 MY1MW20 (1000) (900) (1000)

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Magnet: D (Built-in), Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 400 (4"), Stroke: 1200 (12"), Air Cushion: Both Ends (Air Cushion), Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC6 (Stainless Steel Rod)

(Or None in the Case of No Switch), X Option: XC6 (Piston Rod and Rod End Nut SUS304)

(Or None in the Case of No Switch), X Option: XC6 (Piston Rod and Rod End Nut SUS304)