Step Motor Driver （ Pulse input type ）

(4) TL input is turned ON. (2)(7) Output INP (3)(8) BUSY (5) Starts pushing Input pulse amount 2400[pulse], pulse frequency 2400[pulse/sec], acceleration 0.01[s], deceleration 0.01[s] to "PP-" Operation Example Electric actuator TL input turns on Starts pushing (6) TLOUT is turned ON when pushing starts Pushing force Load Position of pushing start Motor Push the workpiece with the specified

IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

CLS

Weight reduction has also been realized through parts simplification (Max. 40% compared to previous series). 125 140 160 180 200 250 Maximum 1600 Cylinder with lock Series CLS Single rod Series CLS Double acting Maximum 2000 Maximum 2400 9-9-1 2 Series CLS Specific Product Precautions 1 Be sure to read before handling.

MY1

The spacing (l ) of the support must be no more than the values shown in the graph on the right. 200 190 (kg) m 180 170 160 l 150 140 (2400) (2400) (2400) (2400) (2400) (2400) 130 120 Weight (m) m l 110 Caution 100 (2000) (2000) (2000) (2000) (2000) (2000) 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

Cylinder with Lock Series CLS

CLJ2 CLM2 CLG1 CL1 MLGC CNG MNB CNA CNS CLS CLQ RLQ MLU MLGP ML1C Series Variations Standard variations Maximum stroke (mm) Lock holding force (kN) Bore size (mm) Type Action Series With rod boot D125 140 160 180 200 250 8.4 Maximum 1600 -X 10.5 Cylinder with lock Series CLS Single rod Series CLS 13.8 Double acting Individual -X Maximum 2000 17.4 21.5 Maximum 2400 33.6 781 Cylinder with

Electric Actuator

Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] 30 50 100 150 200 250 300 350 400 450 500 A B C 600 300 150 (3000 rpm) 1200 600 300 (3600 rpm) 1000 500 250 (3750 rpm) 900 450 225 (4500 rpm) 12 6 3 LEY25m Motor mounting position: Parallel/In-line 100 W /m40 (Motor rotation speed) A B C 20 10 5 800 400 200 (2400 rpm) 640 320 160 (2400 rpm) LEY32m Motor mounting

Digital Gap Checker ( compatible)

value Data storage 3 Set value Remarks index dec hex Output mode U8 0 Y 0: HYS 1: Wind Setting of OUT1 output mode 1 R/W 1230 0X04CE 0: Normal output 1: Reverse output Setting of OUT1 output normal and reserved output 2 R/W Output type U8 0 Y SUP port pressure (OUT1) 1 R/W HYS mode set value S16 1000 Y -200 ~ 2200 Setting of OUT1 output set value 2 R/W HYS mode hysteresis S16 200 Y 0 ~ 2400

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

Refrigerated Air dryer Series IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

0.5

400 800 1200 1600 2000 2400 2800 Installation distance [mm] Installation distance [mm] With adjustable louver: Angle setting 5, Air flow level: 10 With adjustable louver: Angle setting 5, Air flow level: 10 IZF21-W IZF31-W 300 mm 300 mm 2 s 4 s 6 s 8 s 0 2 s 4 s 6 s 8 s 0 300 mm 300 mm 0 400 800 1200 1600 2000 0 400 800 1200 1600 2000 2400 2800 Installation distance [mm] Installation distance

Thermo-chiller/Rack Mount Type

50/60 Hz) Concentration meter HRR012 1000/1200 400/500 (100 V type) 450/500 (200 V type) Air-cooled refrigeration With electric conductivity control function, Applicable to DI water piping HRR018 1600/1800 Watercooled refrigeration Particle filter element for replacement (UL Standards) Applicable to DI water piping Air-cooled: Option U (Water-cooled: Standard) HRR024 2000/2400

MY1

The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80

CEx-OMB0060

Communication specifications Standard RS-232C Line type Half duplex Transmission type Asynchronous Transmission speed Select from 1200, 2400, 4800, 9600, or 19200bps Letter code ASCII Parity Even parity Start bit 1 bit Data length 7 bit Stop bit 1 bit Block check Sum check 8-2.

IZx-OMR0035

2000 0 400 800 1200 1600 2000 2400 2800 Installation distance mm Installation distance mm IZ21-W IZF31-W 300 mm 300 mm 4sec 6sec 8sec 2sec 4sec 6sec 8sec 0 0 2sec -300 mm -300 mm 0 400 800 1200 1600 2000 2400 2800 0 400 800 1200 1600 2000 Installation distance mm Installation distance mm 2) Static neutralization area (Angle setting: 5, Air flow setting: 10, Discharge time from 1000 V to

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

MY1

The spacing (l) of the support must be no more than the values shown in the graph on the right. 180 170 l 160 150 140 (2400) (2400) (2400) (2400) 130 120 Weight m m l 110 Caution 100 m (2000) (2000) (2000) (2000) 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Multi-channel Digital Sensor Monitor ( compatible)

(page 77 to 78) Y S16 0x0960 0x04C4 (1220) 0x04C5 (1221) 0x04C6 (1222) 0x04C7 (1223) 4 R/W (2400) WH1 (Setting of OUT1 window comparator hysteresis) Setting of OUT1 window comparator hysteresis.