Bore Size: 12mm, Stroke: 150mm, Adjuster: Metal Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Bore Size: 12mm, Stroke: 150mm, Adjuster: Metal Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 1m, Number: 4 pcs.

Bore Size: 12mm, Stroke: 150mm, Adjuster: Metal Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -

Bore Size: 12mm, Stroke: 150mm, Adjuster: C (Metal Stopper), Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Bore Size: 12mm, Stroke: 150mm, Adjuster: C (Metal Stopper), Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: M (1m), Number: 4 pcs.

Bore Size: 12mm, Stroke: 150mm, Adjuster: C (Metal Stopper), Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: Z (5m)

01-mxy-e

Contents Bore size (mm) MXY6-PS MXY8-PS 6 8 12 MXY6-PS MXY8-PS MXY12-PS !0 !1 @2 @6 Wear ring A Resin A set of two of !0, !1, @2 and @6 each Wear ring B Resin MXY12-PS Cylinder scraper NBR As for MXY12, only one piston seal 26 is included. Piston seal NBR Replacement Parts: Grease Pack Grease pack part no. GR-S-010 (10 g) GR-S-020 (20 g) 124

High Vacuum Angle Valve, XL Series

Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C it is 2.8 x 10-8 sec, or 200 times shorter. As an example, it took 800 minutes to evacuate moist air from a 150mm x 500mm P/A test chamber to 10-9Torr. The same process took only 4 minutes with dry (20ppb) nitrogen.

XL

Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C it is 2.8 x 10-8 sec, or 200 times shorter. As an example, it took 800 minutes to evacuate moist air from a 150mm x 500mm SMC test chamber to 10-9Torr. The same process took only 4 minutes with dry (20ppb) nitrogen.

CA2

Bore size (mm) Effective thread length Width across flats A D H K MM W ZZ 40 50 63 80 100 32 37 37 37 47 18 22 22 26 31 35 40 40 40 50 20 25 25 30 36 58 71 71 72 85 7 11 11 11 15 M18 x 1.5 9 9 9 0 0 153 172 183 205 228 M22 x 1.5 M22 x 1.5 M26 x 1.5 A B M30 x 1.5 With heavy duty scraper -XC4 Heat resistant (150C) -XB6 4 2 The cylinder seals are changed to a heat resistance (to 150C) material

Bore Size: 12mm, Stroke: 200mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bore Size: 12mm, Stroke: 400mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Stroke: 50mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Stroke: 200mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: -, Number: -

Bore Size: 12mm, Stroke: 400mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

Bore Size: 12mm, Stroke: 50mm, Adjuster: Rubber Stopper, Centralized Piping/Switch Rail: Centralized Piping One Side, w/Switch Rail, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

MB

MB XB6 With heavy duty scraper Specifications Heat resistant cylinder (150C) Specifications Action Cushion Wiper ring Double acting, Single Double rod Air cushion/Rubber bumper SCB scraper Double acting, Single/Double rod 10C to 150C Unavailable for mounting Air cushion Fluorine rubber Heat resistant grease Action Ambient temp.

MB1

) XB6 2 5 The cylinder seals are changed to a heat resistant (to 150C) material, for use under severe conditions which exceed the standard specifications of 10C to +70C.

44

Sleeveless 65 to 260C (Swivel elbow: 5 to 150C) Superior tube mounting Applicable tubing material FEP PFA Modified PTFE 2-layer soft fluoropolymer Nylon Soft nylon Polyolefin Polyurethane Soft polyurethane Hard polyurethane Soft polyolefin Sleeve Union nut Light tightening torque Comparison with current model 60% down Approx.

Secondary Batteries

Thread type Port size Symbol Nil Type Symbol Size 150C Applicable body size 250C 350C 450C 550C Rc G*1 01 02 03 04 06 10 F N 1/8 1/4 3/8 1/2 3/4 1 NPT *1 Conforms to ISO1179-1. 90-AM650/850 90 AM 650 10 Series compatible with secondary batteries Option Description IN-OUT reversal direction R Symbol Nil 90 Material restriction Body size Accessory Applicable compressor output (guide) Symbol