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It takes 10 [ms] to switch the channel. CH.B Channel 10 [ms] 10 [ms] CH.A Time GND CH.SELECT terminal 10 [ms] 10 [ms] Disconnected Time 16-13-11 19 Technical Information 2-wire pressure switch connections 14 Voltage and current output pressure sensors 15 A 3-wire type switch is a switch that has an output line other than the positive and negative lines that supply the electricity.

SI unit for EtherNet/IP TM

Refer to fault SI unit SI unit MS LED is No.1 OFF malfunction Refer to fault SI unit PWR(V) LED No.2 is OFF Yes No Refer to fault SI unit L/A LED is No.3 OFF Refer to fault SI unit MS LED is No.4 red ON Refer to fault SI unit MS LED is No.5 red flashing Refer to fault SI unit MS LED is No.6 green flashing Refer to fault SI unit MS LED is SI unit NS LED is No.7 green ON OFF Refer to fault

Table of Contents

3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

Electromagnetic Digital Flow Switch

Note Weight Lead wire and M12 connector LFE-1-A3 Lead wire length 3 m Approx. 175 g Option Part no. Note Weight Bracket LFE-1-D Tapping screw for LFE1 (3 x 10), 4 pcs. Approx. 45 g LFE-2-D Tapping screw for LFE2 (3 x 10), 4 pcs. Approx. 70 g LFE-3-D Tapping screw for LFE3 (3 x 10), 4 pcs.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

4) Connector (Option) 1 CH 2 3 4 r Pin no.

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;200 million cycles VQC21fi): 20 ms 2 ms;2fi) million cycles For r,lf, srunh vQc4loo: 17 ms 3 ms; 100 million cycles P!

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(Except for when the version does not match or when in SIO mode) The display color can be set to red or green. 4 Flow Switch Flow Rate Variations Rated flow range [L/min] Series Detection method Applicable fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 Thermal type (MEMS) 0 3 Dry air N2 0.5 0.5 1 1 3 3 Rated flow range [L/min] Series Smallest settable increment Detection method Applicable fluid

D-F6N/D-F6P/D-F6B

The operating time for D-J51 is 2 ms or less and for D-P3DW/P4DW are 40 ms or less. 4) 980 m/s2 for the trimmer type sensor section, 98 m/s2 for the amplifier section.

SY

SS5Y33, #3 (#3 + #7 + #8 + #9) SS5Y3-45-AD .

VFS

Series VFS3000 Model VK Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics (1) (2) (3) Max. operating cycle (cpm) Response time (ms) Port size Rc Type of actuation VZ Weight (kg) Plug-in Non plug-in C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VF 1 4 3 8 1 4 3 8 1 4 3 8 1 4 3 8 1 4 3 8 0.20 0.14 0.20 0.14 0.20 0.20 0.24 0.15 0.23 0.15 1.1 1.4 1.1 1.4 1.1 1.4 1.1 1.4 1.1 1.6 6.8

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

U For 100 VAC For single solenoid SY3000-37-46A 10 For AC 1 LO Z 1 3 2 3 SYJ3 SY3000-37-47A Double solenoid 3 position type Type of actuation A, B port size 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 1 2 3 4 5 110 VAC (115 VAC) Symbol Nil M3 Port size Base mounted M3 x 0.5 For single solenoid SY3000-37-54A SY3000-37-55A

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

JSX021-12A-3 20 Stainless steel JSX022-12A-3 Size Port size Bracket assembly part no. (With screws) 30, 40 1/4, 3/8, 1/2 VXZ30S-14A-1 50, 60 3/4, 1 VXZ50S-14A-1 Brass, Stainless steel 1/8, 1/4, 3/8 JSX20-12A-4 30 1/4, 3/8 20 Aluminum 1/8, 1/4, 3/8 VX021N-12A 30 1/4, 3/8 VX022N-12A Stainless steel Piping 2.

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19 19 1/2" (12.7) 3/8" (9.53) KQG2 KFG2F1395-N03 42 19 3/8 31.6 15.6 8.5 8.5 51 19 KG KFG2 KFG2 Union Nut: KFG2N MS Weight (g) H (Width across flat) Applicable tubing O.D.

CE

Cylinder stop output is used as the readout release signal. 3 OFF ON 4 ON ON 31 30 4 When the count value coincides with preset no. 3. 3 2 1 Preset no. 1 2 3 4 5 On On Off Off Off Output terminal Pattern indicating no. 3 The coincident preset number is expressed as a 5 digit binary number. 10-12-40 40 Series CE Glossary (Functions of CEU5) Display Offset Function Count Value Protection Normally

CE

Cylinder stop output is used as the readout release signal. 3 OFF ON 4 ON ON 31 30 4 When the count value coincides with preset no. 3. 3 2 1 Preset no. 1 2 3 4 5 On On Off Off Off Output terminal Pattern indicating no. 3 The coincident preset number is expressed as a 5 digit binary number. 10-12-40 40 Series CE Glossary (Functions of CEU5) Display Offset Function Count Value Protection Normally

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Response time Liie VOZ]000I0 rns -l VOZ2000 l2 ms 1 200 rfillion VoZsooo ls ms -l cYcres DIN rail mounting 3 Port Solenoid Valve Metal Seal/Rubber Seal 5 Port Solenoid Valve Metal Slsal/Rubber Seal Base Mounted Up to 063 0 . 1 7 0 3 3 0.39 0 4 5 o.3l 0 r 0 0 4 5 0.56 N C Vdlve Base Mounted N C .

PF-OMM0004_C

L/min 20350 L/min 1 L/min 2 L/min (50 ms) 1 L/pulse 070 () L/minL 3F.S. 3F.S. 2F.S. 2 5%F.S.(25 ) 3 3 9 L 4 1L NPN PNP 80 mA DC28 V NPN1 V (80 mA ) PNP1.5 V (80 mA ) 25 0.5 s/1 s/2 s 6 0.5 s/1 s/2 s 15 V 1 k 420 mA DC12 V 300 DC24 V 600 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA -68No.PF-OMM0004-D PF3W711 PF3W721 0.4 V ()30 ms 2 4 7 /6 11 ) 5 /

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Press the button for between 1 and 3 seconds.

ZSE30A(F)/ISE30A

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

PSxx-OMM0006CN

,M8(3).