Table of Contents

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

Series AP500

-0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa r e r e Sample Order Number Port w q w q AP2702S e r FV4 FV4 FV4 FV4 FV4 FV4 FV4 FV4 2PW 3PWQ 4PW 5PWQ MP 4PW 5PWQ 40 40 V3 V3 MPA MPA qIN wOUT eGauge port (Inlet) rGauge port (Outlet) MP=Monitoring gauge port 1) Refer to gauge guide (P.94) for gauge specifications.

Membrane Air Dryer

Dew point indicator kit IDG-DP01-X001 (Option: PS) IDG-DP01-X001 (Option: P) 10 With O-ring (1 pc.) 10 Series IDGe air discharge (Option: P) r w i Purge air for dehumidification Purge air for dehumidification y IDG60<, 75<, 100< IDG60e With fitting for

REA/REB

Speed 600 mm/s E(h8) E(h8) X D I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 K W 23 25 23 25 4 -M8 x 1.25 Effective thread depth 12 High Precision Guide Type REBH Order Made Auto Switches C 0.1 14.5 B 2 S + Stroke ZZ + Stroke 2 (mm) Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25

Thermo-chiller

Applicable model HRS-BP008 HRS100HRS150q To circulating fluid outlet To circulating fluid return port r t w y r u r t r e Parts List No.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 r y e !5 o !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !

Compact

1 1 2N q w e r t y u i o !

IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

R. Fittings & Tubing Air Cylinders Rotary Actuators Stations Tie-rod base manifold: 10-SS5V2-W10S4 DU D B C4, N3 C6, N7 C8, N9 (R)(-D) (Pitch) P = 16 17.5 109.3 55.4 20.5 11.9 9.2 25.2 30.6 4 A 4 A 4 A 4 A 4 A 55.4 3/5 E 3/5 E 2 B 2 B 2 B 2 B 2 B 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

VEX1

900 800 700 600 C 500 400 300 200 100 0 1000 900 800 700 600 D 500 400 300 200 100 0 1000 900 800 700 600 E 500 400 300 200 100 0 1000 900 800 700 600 F 500 400 300 200 100 0 When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 /LEKFS25(L,R)T6 /LEKFS32(L,R)T7 /LEKFS40(L,R)T8 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

C85

1 y q r e i !2 o !

C85

1 y q r e i !2 o !

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !