V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

R 3 VDC For AC ( Hz) 50 60 1 100 VAC 2 200 VAC 3 110 VAC [115 VAC] Electrical entry 4 220 VAC [230 VAC] 24, 12 VDC/ 100, 110, 200, 220 VAC DIN terminal DC specifications of Type D, Y, DO and YO is only available with 12 and 24 VDC.

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100 Operating direction R: Rod side (Clamp) H: Head side (Release) CV MVGQ Weight/Mounting Option Part No.

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Data MY1B16 to 100 MY1M16 to 63 MY1C16 to 63 MY1H16 to 40 L L R L L L L R R R R R L R R L Note 2) Note 2) R R L L O-ring L R Slide table operating direction Piping tube Note 2) For bottom piping, refer to the figure above.

Electric Actuators

MR-C10A Without brake (Horizontal specification) Non-standard Mitsubishi Electric Corporation motor HC-PQ13 100 200/230 R MR-C10A1 100/115 With brake (Vertical specification) HC-PQ13B 100 MR-C10A 200/230 100/115 SGME-01BF12 SGDE-01BP SGDE-01AP Without brake (Horizontal specification) Non-standard Yaskawa Electric Corporation motor 100 200/230 SGME-01AF12 Y SGDE-01BP SGDE-01AP 100/115 200

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MR-C10A Without brake (Horizontal specification) Non-standard Mitsubishi Electric Corporation motor HC-PQ13 100 200/230 R MR-C10A1 100/115 With brake (Vertical specification) HC-PQ13B 100 MR-C10A 200/230 100/115 SGME-01BF12 SGDE-01BP SGDE-01AP Without brake (Horizontal specification) Non-standard Yaskawa Electric Corporation motor 100 200/230 SGME-01AF12 Y SGDE-01BP SGDE-01AP 100/115 200

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0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

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Male thread type Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Body size Port size R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 Part no.

LJ1H

MR-C10A Without brake (Horizontal specification) Non-standard Mitsubishi Electric Corporation motor HC-PQ13 100 200/230 R MR-C10A1 100/115 With brake (Vertical specification) HC-PQ13B 100 MR-C10A 200/230 100/115 SGME-01BF12 SGDE-01BP SGDE-01AP Without brake (Horizontal specification) Non-standard Yaskawa Electric Corporation motor 100 200/230 SGME-01AF12 Y SGDE-01BP SGDE-01AP 100/115 200

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0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80 120 160 200 Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) Gripping point R (mm) 12-4-4 5 Parallel Style Wide Opening Air Gripper Series MHL2 Model Selection Example Confirmation

smcmaintenancepartslist

For 80 and 100, remove the seal retainer and lock piston seal. q i u r y w y L o t e !

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LVA LVH A R P 3 port N.C. PA LVD N.C.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Made to Order

(25 to 40) 2001 to 5000 (50, 63) 25, 32, 40, 50, 63 100 to 1000 10 to 100 20, 25, 32 10 15 20 25 100 to 300 100 to 500 100 to 600 100 to 800 301 to 500 501 to 750 601 to 1000 801 to 1200 10, 20, 30, 40, 50 75, 100, 125, 150 10, 15 CY1H CXSW 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200 20, 25, 32 ML1 25 32 1001 to 1200 1001 to 1500 25, 32, 40 100 to 1000 1001 to 2000 2001 to 4000 (25, 32

High Vacuum Angle Valve

100 160 Switch Heater Indicator High-temperature type XLA-100/160-X152 Single acting (N.C.) 106 to atmospheric pressure 1010 1011 XLC-100/160-1-X152 Double acting 1 When the standard seal material (FKM) is used XLA/C-100/160(-1)-X152 18-E692 Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal XLA-100/160-X152 How to Order XLA 100 w e r q X152 A M9N u t y Improved durability of

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) (With individual EXH spacer) 300 (PE port) VFR (PE port) Applicable cable O.D. 2.3 to 2.8 (PE port) (Lead wire length) (PE port) Applicable cable O.D.

Rotary Actuator

-XC8 Reversed shaft (-XC7) Change of rotation range (-XC8 to -XC11) Specifications Specifications Applicable size 50, 63, 80, 100 Applicable shaft type S, W, X, T, J Applicable size 50, 63, 80, 100 Applicable shaft type S, W, Y Symbol: C7 Symbol: C8 Symbol: C9 Change of rotation range Change of rotation range +4 0 0 9 y a w y e k of e g n a r n o R ti ot ta at o io R n ra n g R ot e at io

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

R.