Battery-less

0 w e r t q y u i o LES R E J 30 25 R1 CD17T For details on controllers, refer to the next page. 25 w Motor mounting position e Motor type r Lead [mm] q Size J 16 K 8 E Battery-less absolute (Step motor 24 VDC) Basic type/R type Cable Motor R y Motor option t Stroke [mm] Nil Without option B With lock Stroke Applicable stroke 30 to 150 301, 50, 75, 100, 125, 150 Table Symmetrical type/ L

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

ZP

92.6 50 192.6 112.6 75 50 40 60.6 42.8 32 4 10 M14 19 4 12 12 M8 x 06 08 A14 10 141.6 73.6 x 1 1.25 61.6 43.8 33 50 20 138.6 83.6 30 148.6 93.6 50 193.6 113.6 75 50 Dimensions Per Vacuum Inlet Model Q R S Fitting part min. hole size Vacuum inlet direction q Pad dia.

Air Cylinder

, 100, 125, 150 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

CJ2

Component Parts No. q w e r t y No. u i o !0 !

SY

for AC < >: Values with surge voltage suppressor Series SY3000 Dimensions 2 position double Grommet (G), (H): SY3240(R)-01 Scale: 35% G H With interface regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01 M type plug connector (M): SY3240(R)-M-01 Grommet .

MG

0 r @4 e o t 16: 25 stroke MX 20, 25: 75 stroke or less !8 MTS !

Air Cylinder Series MB

75 75 75 75 75 60 54 36 23 12.5 12.5 12.5 12.5 12.5 12.5 10 136 144 152 152 164 164 170 56 41 23 64 51 25 64 51 25 68 56 29 76 61 29 82 75 27 Standard Type: With Mounting Bracket Dimensions not shown are the same as basic style.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Standard stroke (mm) Model 100 75 50 40 30 20 10 CXSM6-R CXSL6-R CXSM10-R CXSL10-R CXSM15-R CXSL15-R CXSM20-R CXSL20-R CXSM25-R CXSL25-R CXSM32-R CXSL32-R 0.105 0.105 0.18 0.18 0.3 0.32 0.465 0.485 0.72 0.73 1.33 1.35 0.12 0.12 0.2 0.2 0.33 0.35 0.5 0.52 0.76 0.77 1.43 1.45 0.135 0.135 0.225 0.225 0.355 0.375 0.54 0.56 0.8 0.81 1.53 1.55 0.15 0.15 0.25 0.25 0.38 0.4 0.58 0.60 0.84 0.85 1.62

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

24

50 97 69 20 16 12 64 14 11 148 M8 32 32 46 M10 x 1.5 22 M10 x 1.5 8.6 14 9 Rc1/4 NPT1/4 G1/4 63 102 74 20 16 12 78 16.5 13.5 162 M10 39 39 58 M10 x 1.5 22 M10 x 1.5 8.6 14 9 Rc1/4 NPT1/4 G1/4 MGF MGZ Bore size [mm] PA PB PW Q R S T U VA VB WA WB X XA XB XC XL YY YL Z 75 st or less Over 75 st to 175 st Over 175 st to 250 st Over 250 st 75 st or less Over 75 st to 175 st Over 175 st to 250

Cylinder with Lock

L1 l1 (Min.) l2 R SR (Max.)

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Table of Contents

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

Air Cylinder Series CM2

75, 100, 125, 150, 200 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250, 300 Note 1)Other intermediate strokes can be manufactured upon receipt of order.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

Proposals for Energy Saving

R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no. Body size Port size Part no.

5

9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment:

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25

Slide Unit Series CX2/CXWM/CXWL

S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25