VQ4000

for 12 Rc 1/4 Rc 3/8 Bottom ported Rc 1/4 Mixed U D U D Input unit COM PNP (+) or with no SI unit (for SDOW) Nil Kit Serial transmission kit N NPN () Input unit Mounting SI unit Nil 0 1 2 3 4 With no SI unit, or input unit (In the case of SDOW) Without input unit With 1 input unit With 2 input units With 2 input units With 4 input units D U D side mounting U side mounting SI unit OW QW NW

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Type Description Note Model symbol O A B BB C D F1 G H J1 J2 K Q R1 R2 U V QW NW SI unit part no.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: B [1 pc (Valve Open)], Seal Material: XT1 (FKM for Plasma 3310-75), Seal Replacement: A (2, 3)

AC Servo Motor Driver (SSCNET /H Type)

Power supply is AC200V single phase (Note 4) Malfunction RA1 OFF ON MC MC SK EMG stop switch Driver Servo amplifier Servo motor MC (Note 7) MCCB CNP1 1-phase 200 V AC to 240 V AC (Note 11) L1 CNP3 (Note 6) U U L2 Motor V V L3 M [1] W NW P3 (Note 1) (Note 10) P4 CNP2 P+ [2] (Note 2) C [3] D (Note 11) (Note 3) Encoder CN2 Encoder L11 cable L21 (Note 8) Main circuit power supply CN3 EM2 24 V

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: B [1 pc (Valve Open)], Seal Material: FKM for Plasma 3310-75, Seal Replacement: 2, 3

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std.

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: Rc, Stroke: 75mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: W (Double Knuckle Joint), Auto Switch: P3DWA--Solid State, 2-color Indication, Magnetic Field Resist., 2 Wire, Lead Wire or Prewired Connector: SC (0.3m Cord Length, M12-4 Pin Connector, 3 & 4 Out)

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 40mm, Thread: Rc, Stroke: 75mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: Double Knuckle Joint, Auto Switch: P3DWA--Solid State, 2-color Indication, Magnetic Field Resist., 2 Wire, Lead Wire or Prewired Connector: 0.3m Cord Length, M12-4 Pin Connector, 3 & 4 Out, Number: -, Made to Order:

MWB LOCKING CYLINDER, MB, TIE ROD CYLINDER, 0.00000 lb

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: Rc, Stroke: 200mm

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: Rc, Stroke: 350mm, Rod Boot: None, Cushion: N (Rubber Bumper)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: Rc, Stroke: 150mm

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 40mm, Thread: Rc, Stroke: 200mm, Rod Boot: -, Cushion: -, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 40mm, Thread: Rc, Stroke: 350mm, Rod Boot: None, Cushion: Rubber Bumper, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 40mm, Thread: Rc, Stroke: 150mm, Rod Boot: -, Cushion: -, Pivot Bracket: -, Rod End Bracket: -, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: Rc, Stroke: 100mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 40mm, Thread: Rc, Stroke: 350mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: No Bracket, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)