XMD/XYD Series

) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46 200 360 660 1350 Air consumption cm3 for 0.5MPa Note 3) Initial pumping 2.5 12 15.5 30 42 Port size M5

XMH/XYH Series

),CF KF(NW) KF(NW),CF KF(NW) Flange type XYH KF(NW) KF(NW) KF(NW) Main material Body: SCS13 (SUS304), Bellows: SUS316L,, Main part: SUS304 and FKM (standard sealing material) Operation torque 0.1 or more 0.15 or more 0.35 or more 0.5 or more Number of handle rotations 5 7 10 13 XMH 0.31 (0.35) 0.57 1.35 (1.71) 2.02 Mass kg Note 4 XYH 0.62 1.37 2.42 Note1) XYH-16 is not available.

Air Cylinder

Cylinder model: CDJ2ZD16-60Z-NW-M9BW-B Double clevis Mounting Brackets/Part No. Mounting bracket Bore size [mm] Double knuckle joint 10 16 Foot CJ-L010C CJ-L016C Flange CJ-F010C CJ-F016C Pivot bracket (T-bracket)1 CJ-T010C CJ-T016C Pivot bracket 1: The pivot bracket (T-bracket) is used with double clevis (D).

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Cushion seal Tube gasket O-ring O-ring No. 14 15 18 39 40 41 42 43 Qty. 1 1 2 2 2 2 4 2 4 Series MY2H Single Axis Type 16, 25, 40 MY2H G Bore size Stroke PG Q + Stroke (LL) L LA 4-B depth of counter bore C LD through hole 4-MM, depth M Cylinder mounting center line PA Work piece mounting center line U Long hole depth Y Guide center line NX PB PC PF QW X 4 x 2square nut J NT NH PE PD LB NW

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 100mm, Thread: Rc, Stroke: 600mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 100mm, Thread: Rc, Stroke: 300mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: W (Double Knuckle Joint)

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 100mm, Thread: Rc, Stroke: 150mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: No Bracket, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: X3030B (w/Lock Status w/Cap Nut

Magnet: D (Built-in Magnet), Mounting: D (Double Clevis), Bore Size: 100mm, Thread: Rc, Stroke: 100mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: N (Pivot Bracket), Rod End Bracket: V (Single Knuckle Joint)

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 600, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 100mm, Thread: Rc, Stroke: 300mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: Double Knuckle Joint, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 100mm, Thread: Rc, Stroke: 150mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: No Bracket, Rod End Bracket: No Bracket, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Made to Order: w/Lock Status w/Cap Nut

Magnet: Built-in Magnet, Mounting: Double Clevis, Bore Size: 100mm, Thread: Rc, Stroke: 100mm, Rod Boot: None, Cushion: Air Cushion, Pivot Bracket: Pivot Bracket, Rod End Bracket: Single Knuckle Joint, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Made to Order: -

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 600, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With rod detent function, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Valves: No, Operating Pressure(MPa): 0.08～1, Cushion: Air cushion, Port thread type

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 2) for 0.5MPa 31 61 220 390 680 1420 Solenoid valve SYJ319 SYJ519 Port size M5: Port1(P), 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight

17

O-ring MY1B25-PS MY1B32-PS MY1B40-PS Note) For the replacement procedure of replacement parts/seals, refer to the Operation Manual. 1192 MY1B Series Mechanically Jointed Rodless Cylinder Basic Type Standard/Centralized Piping Type 25, 32, 40 MY1B25 /32 /40 Z Stroke (LL) L 2 x 2 x B counterbore depth C LD through-hole 4 x MM depth M P(MY1BG) (Hexagon socket head taper plug) PA YW PP QQ RR QW NW

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

SIGNALS AND WIRING (1) For 3-phase 200 V AC to 240 V AC power supply of LECSS2-T (Note 4) Malfunction RA1 OFF ON MC MC SK EMG stop switch Driver Servo amplifier Servo motor MC MCCB CNP1 (Note 7) (Note 6) (Note 10) (Note 11) L1 CNP3 3-phase 200 V AC to 240 V AC (Note 6) U U L2 Motor V V L3 M W NW P3 PE (Note 9) (Note 1) (Note 10) P4 CNP2 P+ (Note 2) C (Note 11) (Note 10) (Note 11) (Note 3)

LEC-OM07605CN

(1) LECSS2-TAC200V240V (4) (4) RA1 ON OFF RA1 MC MC SK MCCB CNP1 MC (7) MC (6) (11) (10) L1 CNP3 (6) AC 200 V 240 V U U L2 AC200240V V V L3 M W NW P3 (1) (10) (1) (9) PE P4 CNP2 P+ (2) C (2) (11) (3) (10) (3) D CN2 L11 L21 (7) (8) CN3 CN3 DC 24 V ( 12) DC24V (11) (5) 2 EM2 DOCOM (5)2 (5) (5) (4) RA1 ALM (4) DICOM DC 24 V ( 12) DC24V (11) (8) CN8 (9) () () 1. P3P4() 2.

4 Port Solenoid Valve Series VQD1000

M: Plug lead type M plug connector, With lead wire With light/ surge voltage suppressor Valve option Standard Vacuum For large flow(1) Nil V U W MO: Plug lead type M plug connector, Without connector With light/surge voltage suppressor For large flow, vacuum(1) Note 1) Latching type: U and W only Note 2) Latching type (-COM): NU and NW Note) When you expect to energize the unit for extended

High Vacuum L Type Valve

) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 3) for 0.5MPa 31 61 220 390 680 1420 Solenoid valve SYJ319 SYJ519 Port size M5: Port1(P), 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight kg 0.34