A_HEC-OM-K001

HF10% or less 10 to 40oC Note 2) HF5% or less Hydrofluoric acid and Nitric acid mixture HNO35% or less Nitric acid HNO35% or less Hydrochloric acid HCl5% or less Copper sulfate solution H2SO496% or less 10 to 50oC note) HED007:10 to 30oC Note 2) Sulfuric acid H2SO496% or less 10 to 50oC note) HED007:10 to 30oC Note 2) Ozone 10 to 60oC Ammonium hydroxide NH35% or less 10 to 60oC Note

0.55

plug connector (L) M-type plug connector (M) DIN terminal (D) (Y) 52.1 Max. 10 30 Applicable cable O.D.

Vacuum Ejector Series ZM

VJ10-36-1A-10 . 2 pcs.

Series VQ Base Mounted Metal Seal/Rubber Seal

AXT661-14AN-10 3 pcs.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Serial wiring: EX180 Response Time Type of actuation Response time ms (at 0.5 MPa) SJ2000 SJ3000 2 position single 2 position double 3 position 4 position dual 3 port valve 16 or less 10 or less 34 or less 30 or less 16 or less 10 or less 22 or less 30 or less Gateway system Serial transmission system

SZ3000

Purchasing order is available in units of 10 pieces.

SZ3000

Purchasing order is available in units of 10 pieces.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FR4-10-1-, VV5FR4-10-2 VV5FRA4-10-061-031 pc. VFRA41115 pcs. VVFS4000-10A1 pc.

VDW

Series VXP 1 2 3 10 N.C.

Vacuum

@q]0-c Suction tlltel Polyethylene NZM-SF @ Tension bolt Stainless steel o Silencer ass'y NZM-SA-0 o Check valve NBR ZM-CV o Release tlow rate conttol screw Stainless steel P318 t2-05A o Valve*' NVJ114-@86@ o Poppet valve ass'y ZM-PV-O o Vacuum switch zsEl-osl@@ zsEl-00.55@ zsMl-015, ZSM1-021 PluE connectol ass'v'.' zs-20-5A, zs-20-5A-30 (10) 'Reas spGcity an apprcpdat body code: " N.O. typ6

Vacuum

@q]0-c Suction tlltel Polyethylene NZM-SF @ Tension bolt Stainless steel o Silencer ass'y NZM-SA-0 o Check valve NBR ZM-CV o Release tlow rate conttol screw Stainless steel P318 t2-05A o Valve*' NVJ114-@86@ o Poppet valve ass'y ZM-PV-O o Vacuum switch zsEl-osl@@ zsEl-00.55@ zsMl-015, ZSM1-021 PluE connectol ass'v'.' zs-20-5A, zs-20-5A-30 (10) 'Reas spGcity an apprcpdat body code: " N.O. typ6

HEC_W-E

UPPER AND LOWER LIMIT ARISES -9-2 FIG. 10-1 MOISTURE AIR DIAGRAM -10-3 vi Contents Table List Page No.

EX510

to to to 5 5 11 10 9 8 8 9 10 11 1 + 2 + 3 + 4 + 5 + + 5 + 4 + 3 + 2 + 1 6 6 12 13 14 15 15 14 13 12 10 10 6 + 7 + 8 + 9 + 10 + + 10 + 9 + 8 + 7 + 6 PWR PWR 11 11 COM COM 15 15 11 + 12 + 13 + 14 + 15 + + 15 + 14 + 13 + 12 + 11 5A 5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts Description i w t Output Unit No.

IDX-OM-W010

Specification for Option L 10 1 Safety instructions . 10 1 10 2 Specification . 10 1 10 3 Installation of heavy duty auto drain . 10 2 10 4 Maintenance . 10 2 Chapter 11 Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Installation of motor type auto drain . 11 3 11 4 Electric circuit . 11 3 Chapter 12 Specification for Option R 12 1 Safety instructions

VDW Series

Stainless steel Types 10, 20 VVDW 2 0 5A Series 1 2 10 20 Type 30 VVCW20-5A 12 Compact Direct Operated 3 Port Solenoid Valve for Water and Air Series VDW100/200 How to Order Valves (Single Type) VD W 2 50 1 G 2 01 For water, air and vacuum Series Option 2 3 200 300 None Foot type bracket Nil F Note) Foot brackets are packed with valves. Materials and insulation type C.O.

Model Selection 1

) 0.6 0.7 Critical pressure 0.65 [658] (158) 0.5 0.6 0.55 Sonic [656] (151) 0.5 0.4 0.45 [654] (143) 0.4 0.3 0.35 0.3 [650] (133) 0.2 0.25 0.2 [646] (120) 0.15 0.1 0.1 0.05 2 2 2 2 3 2 3 2 3 2 03 04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated

IDX-OM-W011

L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15 15-1 . 15-1 3 IDX-OM-W011 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W011

IDX-OM-W013

Specification for Option M 10 1 Safety instructions . 10 1 10 2 Specifications . 10 2 10 3 Installation of motor type auto drain . 10 3 10 4 Electric circuit . 10 3 Chapter 11 Specification for Option R 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Power supply connection procedure . 11 2 11 4 Cautions for handling the GFCI . 11 3 11 5 Electric circuit . 11 3 Chapter 12

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Stainless steel Types 10, 20 VVDW 2 0 5A Series 1 2 10 20 Type 30 VVCW20-5A 12 Compact Direct Operated 3 Port Solenoid Valve for Water and Air Series VDW100/200 How to Order Valves (Single Type) VD W 2 50 1 G 2 01 For water, air and vacuum Series Option 2 3 200 300 None Foot type bracket Nil F Note) Foot brackets are packed with valves. Materials and insulation type C.O.

VDW

LVN Types 10, 20 Stainless steel VVDW 2 0 5A TI/ TIL Series PA 1 2 10 20 PAX PB Type 30 VVCW20-5A 17-2-73 14 For details about certified products conforming to international standards, visit us at www.smcworld.com.