0.4

w e q w VQ1100 VQ1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A)

Symbol: 11 (Body Ported), Voltage: 6 (12 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: Q (CE Compliant)

Symbol: Body Ported, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: EPDM, Reverse Mounting Prevention Pin: None, Bracket: None, Lead Wire Length: Grommet, 300mm; Light/Surge: No, CE Compliant: CE Compliant

LVQ

Tightening torque for piping Body class Torque (Nm) 2 3 4 5 6 1.6 to 1.8 3.2 to 3.5 5.0 to 5.3 10.0 to 10.5 22.5 to 23.0 555 Series LVQS-Z Construction Double acting type N.O. type Basic type N.C. type PB PB q q q PA PA 1/46 1/46 1/46 1/46 A B A B B w t r e A A B A B e e With indicator With bypass With flow rate adjustment y u PA PA t 1/46 1/46 1/46 1/46 A B A B 1/4 A B A B Description No

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

0.4

VQ1000/2000 Series VQ1000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

70pvvna

B: Locking slotted type 4 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 10 5 6 24 VDC 12 VDC 240 VAC 50/60 Hz 7 15 2 9 Other Nil: Non-locking push type 20 3 Option Valve size 5 to 7 25 4 1 1 1 2 32 5 1 4 1 2 40 50 6 7 Note) Air operated only Electrical entry/ With light/surge voltage suppressor E GS G Grommet with surge voltage suppressor Grommet Grommet

Fieldbus system PROFINET compatible SI Unit

Pin allocation of the M12, 5 pins socket connector as shown in the following table: Table. 9-1 Pin allocation of the connector for EX245-LA1 (Class A) Pin Signal Description / Power source View of connector (module side) 1 L+ 24 V / US1 2 2 I/Q Digital Input / US1 3 5 1 3 L0 V / US1 4 4 C/Q IO-Link communication, DI or DO * / US1 5 N.C.

Series VQ Base Mounted Metal Seal/Rubber Seal

G H J1 J2 K Q R1 R2 V Note 1) Refer to p.1.10160 for details.

Base Mounted Metal Seal/Rubber Seal Series VQ

[EX123-SMB1] (2) [EX124-SMB1] (3) EX120-STA1(-XP)(1) [EX123-STA1] (2) EX120-SSH1(-XP)(1) [EX123-SSH1](2) EX120-SPA1 EX120-SUW1(-XP)(1) [EX123-SUW1] (2) VQC SQ EX120-SAB1 EX120-SUH1(-XP)(1) [EX123-SUH1] (2) q EX120-SSL1(-XP)(1) [EX123-SSL1] (2) VQ0 EX120-SSL2(-XP)(1) [EX123-SSL2] (2) EX120-SFU1(-XP)(1) [EX123-SFU1] (2) VQ4 EX120-SDN1 [EX124-SDN1] (2) EX120-SCS1(-XP)(1) [EX124-SCS1] (2) VQ5

VM

insertion of R thread Connection thread R Model H 2(A) 1(P) Effective area (mm2) L1 L2 L3 L4 L5 L6 Q B Weight (g) 1(P) R 2(A) 2(A) R 3(R) VHK R-01S-01S 18 41 65.2 32.6 32.6 16.5 3.5 11 57 30 8.6 1.2 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 VHK R-02S-02S 18 41 78 39 39 16.5 3.5 11 66 47 9.7 1.2 VHK R-03S-03S 22 46 88.6 44.3 44.3 21.5 4 14 76 72 16.1 3.2 VHK R-04S-04S 22 46 97.4 48.7 48.7 21.5 4 14

EXxx-OMW0014CN

SI IP65 IP65 M12(5 ) . 9-2 EX245-LA1(A) / (TOP View) 1 L+ 24 V / US1 2 2 I/Q / US1 3 5 1 3 L0 V / US1 4 C/Q IO-Link DI DO / US1 4 5 N.C. 19.6. . 9-3 EX245-LB1(B) / (TOP View) 1 L+ 24 V / US1 2 2 P24 24 V / US2 3 5 1 3 L0 V /US1 4 C/Q IO-Link DI DO / US1 4 5 N24 0 V / US2 19.6. 58 No.EX-OMW0014CN-A 9.4.

VXA21/22

Thread T F N Orifice size 2 3 4 5 6 Rc(PT) NPTF G(PF) NPT 3mm 4.5mm 6mm 8mm 10mm Refer to table q for configuration. Port size 01 02 03 04 1 8 1 4 Valve/Body 0 2 Normally closed (N.C.)/single unit Normally open (N.O)/single unit 3 8 1 2 Refer to table q for configuration.

CA2

9 @0 @1 @2 @3 q w e r t y u i o !0 !2 A A-A' Piston rod section A' !1 !3 !4 Component Parts Note Description Material No.

VQ4000

D side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) 3 m 2-5-11 Base Mounted 12 Series VQ4000 Kit (D-sub connector kit) F Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) 70 38 2-Rc 1/8 (Pilot EXH port) 18 18 17.5 PE 30 42 R2 R1 P 1 3 5 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port SMC 6-Rc 1/2 Rc 1/4: Rc 1/4 thread 1(P), 5(R1), 3(R2) port

VNC

voltage Valve size A: Non-locking extended type Nil Air operated Symbol Orifice size (mm) Symbol Port size Rc Valve size 1 1 2 4 1 2 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Symbol N.C. 0.5 MPa N.O. 1 MPa N.C. 1 MPa B: Locking slotted type 3 6A 8A 10A 10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 4 7 1 5 6 24 VDC 12 VDC 7 240 VAC 50/60 Hz 15 (11) 2 Nil: Non-locking

VM

Description Brass, NBR NBR Material Material Note Valve seat Body O-ring Valve q w e r Dimensions VR1210 VR1220 20 3-1/4 3-1/8 16 OUT 21 38 OUT 20 16 SMC IN IN 29 16 SMC IN IN 6.6 mounting hole 21.2 5.5 mounting hole 50 17.2 38 5-7-3 61 Series VR1210/1220 How to Order 01 VR2110 Option X3 Secondary tank connection board 1 4 Rc N.O.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA)/3(EB) 1(P) o Description No. Material Note Component Parts SJ3A60K with back pressure check valve Spool valve assembly 1 N.C. (Normally closed) Resin/H-NBR !0 y t r q e u q !2 i !1 Spool valve assembly 2 Resin/H-NBR N.O.