Vacuum Module: Ejector System Series ZX

ZX1 1 10 F Filter unit Ejector unit Nil Q CE marked Ejector unit nozzle dia.

5 Port Air Operated Valve

2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1 (P) 3(EB) VPA VPA3 3 position closed center/exhaust center/pressure center t q Symbol 3 position closed center (A) 4 (B) 2 w 2(B) (A)4 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 3 (EB) 5 (EA) 1

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ZM-E15CN . 1 pc. ZS-20-5A-50 . 1 pc.

IDX-OM-W023

. 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i

IDX-OM-W022

. 8 1 8 2 Specifications . 8 1 Chapter 9 Specification for Option L 9 1 Safety instructions . 9 1 9 2 Specification . 9 1 9 3 Installation of heavy duty auto drain . 9 2 9 4 Maintenance . 9 2 Chapter 10 Specification for Option M 10 1 Safety instructions . 10 1 10 2 Specifications . 10 2 10 3 Installation of motor type auto drain . 10 3 10 4 Electric circuit . 10 3 Chapter 11 Specification

Stainless Steel Heat

x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew point conversion chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 8 Series IDUS/IDFS Safety Instructions These safety instructions are intended to prevent a hazardous situation and/

IDUS/IDFS

3m3/min (22kW equivalent compressor), the amount of condensed water per unit of time is 15.2 x 3 x 60 = 2736g/h. 6 7 8 3 1 2 3 4 5 Dew Point Conversion Chart 60 50 40 30 Pressure dew point C 20 10 1.5MPa 1.3MPa 1.1MPa 0.9MPa 0.7MPa 0.5MPa 0.3MPa 0.1MPa Atmospheric pressure 0 -40 -30 -20 -10 -60 -50 -60 -50 -40 -30 -20 -10 0 10 20 30 Atmospheric pressure dew point C 14-18-10 11 Series IDUS

IDX-OM-W010

Principles . 7 2 Chapter 8 Specification for Option C 8 1 Specifications . 8 1 8 2 Precautions for the installation and handling of the product . 8 1 Chapter 9 Specification for Option K 9 1 Safety instructions . 9 1 9 2 Specifications . 9 1 Chapter 10 Specification for Option L 10 1 Safety instructions . 10 1 10 2 Specification . 10 1 10 3 Installation of heavy duty auto drain . 10 2 10

IDX-OM-W020

GFCI 0.25inch (6.5mm) IDFB15E 0.37inch (9.5mm) L N PE GFCI 0.25inch (6.5mm) IDFB Series 9-2 9 2 IDX-OM-W020 10 S 10 S 10-1 10-2 IDFB3E PE 10-1 IDFB Series 10 1 IDX-OM-W020 10 S IDFB4E 11E PE IDFB15 PE 10-2 IDFB Series 10 2 IDX-OM-W020 11 T 11 T 11-1 IEC 11-2 AC115V,5A DC24V,5A (20V,5mA(AC/DC)) 11-3 ON ON/OFF 3 () 5 /1 () 11-1 IDFB Series 11 1 IDX-OM-W020

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Section 3.1 Section 3.3 Rating plate Section 1.5 1 10 1.

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

AC Servo Motor Driver (Network card type ）

: +8 V/800 V) _ _ 0 E Speed command 2 (8 V/max. speed) _ _ 1 0 Load-side droop pulses (10 V/100 pulses) (Note 2) _ _ 1 1 Load-side droop pulses (10 V/1000 pulses) (Note 2) _ _ 1 2 Load-side droop pulses (10 V/10 pulses) (Note 2) _ _ 1 3 Load-side droop pulses (10 V/10 pulses) (Note 2) _ _ 1 4 Load-side droop pulses (10 V/1 Mpulses) (Note 2) _ _ 1 5 Servo motor-side/load-side position deviation

A_HEC-OM-K001

Host STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Chemical Thermo-con ACK CR Host SOH UT STX 31H Setting data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Chemical Thermo-con ACK UT CR 7.4.2 Reading of target temp. As 0.1oC is the minimum unit, the number in the hundredths place (10-2) is always 0 (=30H).

HEC_W-E

-1 10.1 SIGNAL AND STYLE OF CONNECTORS -10-1 10.2 POWER SUPPLY CABLE -10-2 10.3 CALCULATION OF DEW POINT (FROM PSYCHOMETRIC CHART) -10-3 v Contents Figure List Page No.

IDX-OM-W011

. 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-1 14-4 . 14-2 14-5 . 14-3 15

IDX-OM-W053

5-1 . 5-1 6 6-1 . 6-1 6-2 . 6-2 6-3 . 6-3 6-4 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 1 8 C 8-1 . 8-1 8-2 . 8-1 8-3 . 8-1 9 G 7-1 . 9-1 10 H 10-1 . 10-1 10-2 . 10-1 11 K 11-1 . 11-1 11-2 . 11-1 12 L 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 13 R 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 14-5 .

A

35 52.5 60.5 (157) 30 80 8 23 MHT2-63D 60 45 11 24 10 17 35 53.2 66 (169.2) 36 90 10 23 0 P Q R S T U V W X Z AA BB CC Model MHT2-32D -3 4-M6 10 20 30 7.5 34 15(0,-0.1) 1/8 4-M6 4-M6 15 1/8 22 MHT2-40D -3 4-M8 10 20 35.5 8 40 18(0,-0.1) 1/8 4-M8 4-M8 12 1/8 29 MHT2-50D -2 4-M10 12 25 39.5 10.5 52 20(0,-0.1) 1/4 4-M10 4-M10 12 1/4 36 MHT2-63D -2 4-M12 17 25 40.5 10.5 60 24(0,-0.1) 1/4 4-M12

Table of Contents

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

Made to Order

66 44 20 64 10.5 7 75, 100 157.5 40.5 63 50 or less 155 36 165 46 14 8 20 30 16.5 19.5 12.5 66 44 20 77 10.5 7 75, 100 165 46 Bore size K L M O P Q R RR RR1 U1 W Z A1 A2 B1 C1 H1 L1 MM X 32 14 46 34 M6 x 1.0 1/8 10 10 10 12 14 49.5 14 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 40 14 46 40 M6 x 1.0 1/8 12.5 10 10 12 14 57 15 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 50 17 59 50 M8 x 1.25 1/4 10.5 14 14

Electric Actuator

1 6N S q w e r t y u i o !