AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

Base Mounted Metal Seal/Rubber Seal Series VQ

P (1) U S P kit J kit F kit w AXT100-1-J 20 (1) U S U S VQZ AXT100-1-F (1) e Note 1) Top (vertical) entry connector for FU, PU and JU while side (horizontal) entry connector for FS, JS and PS.

0.4

VQ 0 5 1 1 0 1 VP4 CE-compliant Series VQ 1/2 VQ 1/2 VV5Q11-08C6SV VQ1100-51 VQ1200-51 VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

0.4

P Note 1) U S U S U S w U S U S AXT100-1-J 20 Note 1) AXT100-1-F Note 1) e Note 1) Top entry connector for FU, PU, JU while side entry connector for FS, JS, PS.

Step Motor Controller

1 to !4.

7.5

1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ2C60 [N.C., N.O. valve x 1 (each)] SJ2C60K with back pressure check valve SJ2C60 [N.C. valve, N.O. valve x 1 (each)] !0 y t r q e u w !2 i !

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Port size M5 1/8 1/4 Series Assembly part no.

HRX-OM-X010

Item Descriptions 1 System model 2 System revision No. 5.3 Operation Screen HRZ Series 5-4 HRX-OM-X010 Chapter 5 System Operation 5.3.2 Status screen 1 1 POWER ON 5a 2 3 4 Figure 5-4 Status screen 1 Table 5-3 Status screen 1 No.

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Stability of suction position,

1 o !1 i Component Parts r r No.

IDX-OM-W022

3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of auto drain strainer . 4 2 4 2 4 Replacement of bowl assembly . 4 2 Chapter 5 Troubleshooting . 5 1 5 1 Cause and countermeasure of errors . 5 1 Table of Contents 1 Air Dryer Table of Contents Chapter 6

IDX-OM-W023

. 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-3 6-3 . 6-4 6-4 . 6-5 6-5 . 6-7 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1

IDX-OM-W016

. 3 2 3 6 Precautions for long-term non-operation . 3 2 Chapter 4 Checks and Maintenance 4 1 Daily Check Points . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of Auto Drain Strainer . 4 1 Chapter 5 Troubleshooting . 5 1 IDFA Series Table of Contents 1 IDX-OM-W016 Air dryer Table of Contents Chapter

IDX-OM-W053

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Stainless Steel Heat

6 6 Series IDUS/IDFS Option Specification Refer to pages 1 and 5 for "How to Order" of options.

IDUS/IDFS

2 ID 85 130 Rc 1/2 440 260 560 540 297 330 315 470 325 530 IDUS6E 315 130 605 540 Rc 3/4 325 355 515 485 325 575 285 110 AMG Note: The diagram above is drawn base on IDUS3E dimension with scale 1:6.

Vacuum Module: Ejector System Series ZX

VJ10-20-4A-6 2 pcs. 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

CATALOG

16 3/8 3/8 3/4 5/8 1.57 1 1/2 3 3/4 1 1/4 1 3/8-24 325 (3.25) 1 1/8 3.9 1/2 0 7 1/2 1 1 1/4 1.18 2.34 4 1/4 1 3/8 3/4 5/8 2.72 8 1/4 3/4-16 3/4 7/8 1/2 5/8 1.57 1 1/8 1 1/2 3/8-24 4 1/2 1 1/4 1 400 (4) 4.7 1/2 0 7 1/2 1 1 1/4 1.18 2.34 4 1/4 1 3/8 3/4 5/8 2.72 8 1/4 3/4-16 3/4 7/8 1/2 5/8 Courtesy of Steven Engineering, Inc. !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

To order connector cable only Connector dimensions 4 Brown: 1 Blue: 3 9 3 1 Black: 4 33.9 L 35 10 Cable length (L) Part no. 300 mm V100-49-1-1 500 mm 1000 mm 2000 mm 5000 mm V100-49-1-2 V100-49-1-3 V100-49-1-4 V100-49-1-7 3000 mm V100-49-1-5 4000 mm V100-49-1-6 Caution Failure to meet IP65 performance may result if using alternative connectors than those shown above, or when insufficiently

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Example: 10-SS5YJ5-20-03 1 pc. (Manifold base) 10-SYJ5123-5G-M5 2 pcs. (Valve) SYJ5000-21-5A 1 pc. (Blanking plate assembly) 10-SS5YJ5-43-03-C4 1 pc. (Manifold base) 10-SYJ5143-5LZ 1 pc. (Valve) 10-SYJ5243-5LZ 1 pc. (Valve) SYJ5000-21-6A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part no. of the solenoid valve, etc.