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VQ 0 5 1 1 0 1 VP4 CE-compliant Series VQ 1/2 VQ 1/2 VV5Q11-08C6SV VQ1100-51 VQ1200-51 VQ1300-51 VVQ1000-10A-1 1 setManifold base part no. 2 setsValve part no. (Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

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P Note 1) U S U S U S w U S U S AXT100-1-J 20 Note 1) AXT100-1-F Note 1) e Note 1) Top entry connector for FU, PU, JU while side entry connector for FS, JS, PS.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

P Note 1) U S U S U S U S w AXT100-1-J 20 Note 1) AXT100-1-FU15 AXT100-1-FS e Note 1) Top entry connector for PU, JU while side entry connector for PS, JS.

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

air-filter-e

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

Air Preparation Equipment

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

Bag Filter FGF Series

FN Number of elements Nominal filtration accuracy Note) Element size Number of elements 1 pc included (FGF1) 3 pcs included (FGF3) 5 pcs included (FGF5) Symbol 1 3 5 EB ES Element material (Polyester) Symbol Nominal filtration accuracy (m) Element size 190 x L440 190 x L770 Symbol A B 005 010 025 050 100 5 10 25 50 100 Port size Port size Rc2 100(4B)JIS10KFF 150(6B)JIS10KFF Applicable model

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM)

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: -, Option: -, Lead Wire Length: -, CE Compliant: -

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 3 (Bracket + Manual Override)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: 2 (Manual Override)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 6 (600mm)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: K (Plug Connector, 300mm)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: KO (Plug Connector, w/o Connector)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: KOZ (Plug Connector, w/o Connector)

Symbol: 10R1 (Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type), Function: Standard, Voltage: 6 (12 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: KZ (Plug Connector, 300mm)

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.C., Port 1 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 12 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: FKM, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket + Manual Override, Lead Wire Length: -, CE Compliant: -