How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ZS-20-5A-50 . 1 pc.

Stainless Steel Heat

Inlet air temperature 35C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.5MPa Air flow 1200 l/min (ANR) Inlet air temperature 55C Outlet air pressure dew point 10C Ambient temperature 35C Inlet air pressure 0.7MPa Air flow 350 l/min (ANR) Condition Condition A = 0.75 based on conditions q, w and e 1 B = 0.95 based on conditions q, w and e 1 C = 1.00 based on

IDX-OM-W022

Install a Ground Fault Circuit Interrupter(GFCI) to the power supply (IDU8E/11E-20/23 : sensitivity of leak current 30mA and rated current 5A) , (IDU15E1-20/23 : sensitivity of leak current 30mA and rated current 10A). (Prepare by yourself) Specification of power cable Prepare following power cable.

IDX-OM-W023

600mm 050 600mm 600mm 600mm 600mm IDU Series 2 1 IDX-OM-W023 2 2 2 2 6 6-3 IDU8E~15E1 IDF-AB500 14 1 IDU8EIDU15E1 2 2 3 50 50 (IN) (OUT) (IN) (OUT) (IN) (OUT) IN OUT 1 IDU8E IDF-BP320 1 IDU11E IDF-BP322 1 IDU15E1 IDU Series 2 2 IDX-OM-W023 2 2 2 4 10mm 2 2 5 6-1 IEC ()2 IDU8E-1015E1-10100V 100V 30mA 10A IDU8E-2015E1-20200V IDU8E-2315E1-23200V AC200V 30mA 5A

IDUS/IDFS

Use a circuit breaker having a sensitivity current of 30mA or less and a rated current of 5A.

IDX-OM-W010

Install a Ground Fault Circuit Interrupter(GFCI) to the power supply (IDF3E ~ 11E : sensitivity of leak current 30mA and rated current 5A), (IDF15E1 : sensitivity of leak current 30mA and rated current 10A). (Prepare by yourself) Specification of power cable Prepare following power cable.

IDX-OM-W020

: inch (mm) 10mm N 3/8 B Q E D A G C F 1 J 31.5 [820] P L K M N H (L=2800) IDFB4E/6E/8E/11E-11 1. : inch (mm) 10mm N 3/8 A B E D Q G C F 1 J 31.5[800] H N M 4-0.5 (L=2800) [4-13] 6-3 6 3 IDFB Series IDX-OM-W020 6 IDFB15E-11 1. : inch (mm) 10mm N 3/8 E D B A Q G C F (820) K L P N M H J 4-13 (L=2800) (inch [mm]) A B C D E F G H J K L M N P Q IDFB3E 3/8 8.9 16.1 18.6

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

No-fuse breaker Fuse Driver Magnetic contactor Not using power factor Using power factor (Note) Current Voltage improving reactor improving reactor Class [A] AC [V] LECSS-S5 30A frame 5A 30A frame 5A 10 S-N10 LECSS2-S7 30A frame 5A 30A frame 5A 10 T 250 Mitsubishi Electric LECSS1-S7 30A frame 10A 30A frame 10A 15 Corporation LECSS2-S8 30A frame 10A 30A frame 5A 15 Note.

5 Port Solenoid Valve, Series VQC

B 8B () (+) Station 8 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL. A 9A () (+) SOL. B 9B () (+) Station 9 SOL. A 10A () (+) Note) There is no polarity. This device can also be used as a negative common. SOL.

AC Servo Motor Driver (Network card type ）

Molded-case circuit breaker (Note 1, 3) Fuse Frame, rated current Magnetic contactor Driver [V] Class Current [A] Voltage Power factor Power factor Voltage AC (Note 2) AC [V] Improving reactor is Improving reactor is not used used LECSN2-T5 30 A frame 5 A S-N10 10 Mitsubishi LECSN2-T7 240 T 300 Electric LECSN2-T8 30A frame 10A 30A frame 5A 15 Corporation LECSN2-T9 30A frame 15A 30A frame

HEC_W-E

A l a r m S e q u e n c e M O D E < O f f sequence(Ex. : Off) Function : Determines whether or not temp. upper/lower limit alarm is output when power is turned on.

A_HEC-OM-K001

Single phase 2-wire type + GND (PE) line HED005 AC180-242V, 50/60Hz, 5A max. Single phase 2-wire type + GND (PE) line HED007 AC180-242V, 50/60Hz, 14A max. Single phase 2-wire type + GND (PE) line This product is intended to be connected only to private low-voltage distribution systems.

IDX-OM-W011

3.1 0.7MPa 35 32 10 550 0.151.0MPa 240 (85%) AC100V 50/60Hz AC100/100110V10%(4) AC200V 50/60Hz AC200/200220V 10%(4) AC100V 50/60Hz 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 2.4/2.5 3.0/3.1 5.7/5.7 4.3/4.6 (2) A AC200V 50/60Hz 1.2/1.3 1.2/1.3 1.2/1.3 1.5/1.5 3.4/3.0 3.4/3.1 (2) W AC100V,AC200V 50/60Hz 180/202 180/202 180/202 180/202 180/202 208/236 385/440 420/480 (3) AC100V 10A AC200V 5A

IDX-OM-W053

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

A

T I O N A C C E S S O R I E S S E R I E S N C Q 2 / C Q 2 C O I L S C R A P E R X C 3 5 O P T I O N Air XC35 D (N)CQ2 Bore Size 32, 40, 50, 63, 80, 100 Fluid S T R O K E M O U N T I N G B O R E S I Z E Thread Pitch M3 0.5 A C C E S S O R I E S M O U N T I N G K I T S S E R I E S N C Q 2 / C Q 2 A C C E S S O R I E S M O U N T I N G B O L T F O R S E R I E S N C Q 2 / C Q 2 M5 0.8 M6 1 M8

Made to Order

CA2 series GB Stroke A Stroke B (mm) Q S ZZ GB Bore size 40 50 63 80 100 29 53 167 269 ZZ + Stroke (A + B) S + Stroke (A + B) Q 33 59 179 295 33 61 195 311 41 73 231 373 41 79 251 395 L CBA2 series B port D port C port A port (mm) L Q S ZZ GC Bore size (mm) 40 50 63 80 100 42 12 66 180 282 Q GC Stroke B Stroke A 48 14 74 194 310 48 14 76 210 326 S + Stroke (A + B) 58 16 90 248 390 ZZ + Stroke

Electric Actuator

79 Page 75 option Q Control circuit power supply connector Accessory Part no.: LEC-MR-RB-m Q Motor cable Page 79 PC Standard cable Robotic cable LE-CSM-Smm LE-CSM-Rmm Q Lock cable Page 79 Q USB cable Part no.: LEC-MR-J3USB Page 80 Standard cable Robotic cable LE-CSB-Smm LE-CSB-Rmm Electric actuator Rod type Page 79 Page 58 Q I/O connector Part no.: LE-CSNA Series LEY Supplied by customer

1

Dimensions 32 to 50 63 to 100 Front mounting flange Front mounting flange X Q Y + Stroke X Q Y + Stroke 2-Rc 1/8 (Both sides) 2-Rc 1/8 (Both sides) CL CL Q X Y CL Bore size (mm) 32 40 50 63 80 100 ( ): Denotes the dimensions for long stroke. Specifications other than above are the same as standard type.

Proposals for Energy Saving

Equipment w e q Digital flow switch for air Air leakage tester Compact manometer Equipment Equipment Equipment Equipment q w Air leakage tester Main Points w Measure air leakage rate and air blow rate Air leakage tester. (Made to order) Page 133 q Measure main line and branch line flow rates. Digital flow switch for air Series PFA Page 84 e Measure air blow rate.