Plug-in/Plug Lead: Single Unit

2 4 T 5 1 3 SQ 16 16 13 A 40 53 66 53 66 B A VQ5000 VQ0 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 VQ4 3-Rc 1/2 (P), 4 (A), 2 (B) port VQ5 Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

available for the 53-SY9000.

SYJ300/500/700

Base mounted (with sub-plate) 53(32) 58(37) M5 x 0.8 54(33) Note) Value for DC.

Air Cylinder

/64 325 (3.25") 2.34 1.57 4 1/4 1 1/2 1 1 1/2 1 3/8 4 1/2 1/2 1 1/8 3/8-24 3.32 1.18 2.72 1/2 4.7 0 7/8 3/4-16 5 53/64 400 (4") 2.34 1.57 4 1/4 1 1/2 1 1 1/2 30 Medium Duty Air Cylinder Series NCA1 Rod Boot Boot Material Suffix Code Material Max.

Air Cylinder

53 77 44.5 143.5 154 154 * Dimensions other than mentioned above are the same as on page 256.

Stability of suction position,

Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow rate characteristics graph, the suction flow rate is 5 L/min (ANR).

AC Servo Motor Driver (Pulse input type/Positioning type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55

MY1

90 9 M5 x 0.8 30 20 MY1H25 NE P NW 53 NH 39 40.5 Rc 1/8 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 110 13 M6 x 1 37 25 MY1H32 49 64 50 Rc 1/8 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 121 13 M6 x 1 45 30.5 MY1H40 63 Rc 1/4 61.5 75 P indicates cylinder supply ports.

Compact Manifold Regulator Series ARM5

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

Air Cylinder

[mm] CS2 Bore size B C GA GB LB NA NB WA WB S Z 10 15 17 7.5 6.5 16.5 21 20 14.4 13.4 65 93 16 18.3 20 7.5 6.5 23 21 20 14.4 13.4 66 94 D-X Technical Data 53 CJ2 Series Dimensions Double foot (M) Stroke CJ2M6 Z H Mounting nut Mounting nut Piping port 2 x M5 x 0.8 GB F NN Rod end nut Cover surface MM GA F NN D LY LB LH LZ LX LT LT X Y NB Z + Stroke LS + Stroke S + Stroke NA Y X A T 4 x

Air Cylinder Series CS1

0 +0.3 +0.1 Y-18 8 70 54 50 125 40 100 M40 x 1.5 42.5 23 60 69.3 57 M40 x 1.5 0.1 0.3 +0.1 0 +0.3 +0.1 Y-20 8 70 54 50 125 40 100 M45 x 1.5 42.5 27 70 80.8 67 M45 x 1.5 0.1 0.3 +0.1 0 +0.3 +0.1 Y-25 53 9 86 81 M56 x 2 63 160 50 126 34 85 98.1 82 M56 x 2 0.1 0.3 Use a single knuckle joint or a double knuckle joint individually.

5-Port Solenoid Valve

p. 124-5 p. 156-7 p. 111 p. 131 p. 139 p. 147 p. 155 p. 64 p. 53 p. 53 p. 73 p. 83 p. 93 p. 123 p. 109 SY7 3 SY3 0 Type 50 SY5 0 From p. 223 p. 223 p. 223 p. 251 SY7 0 SY3 0 Type 51 SY5 0 From p. 223 p. 223 p. 223 p. 251 SY7 0 SY3 3 Type 52 SY5 3 From p. 243 p. 243 p. 243 p. 261 SY7 3 SY3 0 3 SY5 0 3 From p. 282 SY7 0 3 M12 connector Standard Option Made to order (Refer

NCA1

(Refer to specifications.) 53 Series NCA1 Auto Switch Precautions 1 Be sure to read before handling. Design & Selection Warning Warning 1. Confirm the specifications. Read the specifications carefully and use this product appropriately. The product may be damaged or malfunction if it is used outside the range of specifications for current load, voltage, temperature or impact. 2.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

LT LY MM N P AL E KA LX RT B EA LD F LH FA LS G (mm) 20125 140 160 180 200 250 300 145 16 M14 x 1.5 188 100 157.5 1/2 50 36 15 8 35 47 90 31 36 59 19 43 85 14 115 M30 x 1.5 Up to 1400 1401 to 1600 Lube Non-lube Air-hydro 161 16 M14 x 1.5 188 112 180.5 50 36 15 9 35 47 90 59 31 19 36 43 14 100 128 M30 x 1.5 Up to 1400 1401 to 1600 1/2 Data 182 18.5 M16 x 1.5 206 118 197 3/4 56 40 17 9 39 53

Free Mount Cylinder

ZC(D)UKR25 ZP 14.5 23.5 38.5 47.5 53 DQ HQ HP 43 43 53 43 ZC(D)UKD32 ZC(D)UKR32 ZP 29 34 38 18.5 19.5 60.5 65.5 69.5 50 51 Note) ZPU-X11: Flat type only.

CL

Then, operate the lockup. 3.1-53 Series CL1 Construction CL140 to 100 CL1125 to 160 Component Parts/CL140 to 100 Component Parts/CL1125 to 160 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Air Fittings & Tubing

KQ2ZD08-03S 28.5 55.5 58 59 62 47.5 52 53 54 21 KQ2ZD08-04S 26.5 KQ2ZD10-02S 111 10 21 27.5 KQ2ZD10-03S 21 18.5 20.6 29 19.2 18.5 30.5 KQ2ZD10-04S 128 178 167 179 64.5 58.5 59 60 28.5 KQ2ZD12-02S 12 65.5 29.5 KQ2ZD12-03S 26 22 20.9 25.2 32 21.6 20.9 68.5 32.5 KQ2ZD12-04S Reference dimensions after R(PT) thread installation.

SYJ300/500/700

Base mounted (with sub-plate) 53 (32) 58 (37) M5 x 0.8 54 (33) Note) Value for DC. Add 1 g for AC. ( ): Without sub-plate.

SYJ3000/5000/7000

) 63 (37) 81 (55) 84 (58) 0.36 0.12 0.46 0.35 0.12 0.46 2 position 5 port Base mounted 0.33 0.39 0.12 0.10 0.47 0.59 [0.40] 0.46 0.31 0.12 0.47 0.36 0.58 [0.32] M5 x 0.8 M5 x 0.8 (with sub-plate) 0.43 [0.33] 0.32 0.16 [0.11] 0.11 82 (56) 92 (66) 3 position 0.42 [0.33] 0.16 [0.080] SV 36 53 41 63 37 55 2 position SZ 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 SY 36 53 41