ISA2

150 200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

Digital Gap Checker

0.15 mm 0.3 mm 0.03 mm 0.30 0.03 0.15 0.20 0.02 0.10 0.01 mm 0.10 0.01 0.05 0.05 mm 0.02 mm 0 0 0 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Supply pressure [kPa] 75 100 125 150 175 200 225 Piping length: 5 m Piping length: 5 m Piping length: 5 m Reference pressure 0.06 Reference pressure 0.30 Reference pressure 0.60 The distance of

0.01

ISA2-G ISA2-H Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Standard pressure: 100 kPa Standard pressure: 100 kPa Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 2.0 0.4 0.6 Standard pressure Standard pressure 0.5 mm 0.25 mm Detection distance (mm) Detection distance (mm) 0.5 0.3 0.4 0.2 0.3 0.15 mm 0.15 mm 0.2 0.1 0.1 0.03 mm 0.01 mm 0 0 50 0 250 200 150 100 250

Air Catch Sensor

200 300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

AC Servo Motor Driver (MECHATROLINK-III type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur . 2.

Battery-less

T4 = 0.2 [s] T1 = V/a1 = 100/3000 = 0.033 [s], T3 = V/a2 = 100/3000 = 0.033 [s] T2 = = = 1.97 [s] L 0.5 V (T1 + T3) V 200 0.5 100 (0.033 + 0.033) 100 T4 = 0.2 [s] The cycle time can be found as follows.

4/5 Port Solenoid Valve

suppressor AC ( Hz) 50 60 1 100 VAC 2 200 VAC With light/surge voltage suppressor YOZ is not available.

ITV

0 25 50 75 100 Input signal [% F.S.]

LEC-OM07605CN

[r/min] 100% [0.1%] [0.1%] (1 pulse) 1 [pulse] (100 pulses) 100 [100 pulses] [r/min] [V] 15 [0.1%] ABS [rev] 1 1 [16 pulses] 1 [] 2 1 [] UF/B U VF/B V % [0.1%] [1.125 kpps] () [r/min] (100 pulses) [100 pulses] [r/min] (100 pulses) [100 pulses] [] [] %[AL. 50 1][AL. 51 2]0% [0.1%] 0 pulse [pulse] 1 1INCZ 0ABS [pulse] 2 [pulse] 1 [] 2 1 [] 8 69 8.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

LEF-OM007xx

encoder 25 100 AC servo motor (Inclemental encoder S2 S2 100 to 120VAC LECSA1 A1 100 to 120VAC LECSA1 A1 Right side R Right side R A1,A2 A1,A2 32 200 S3 32 200 S3 200 to 230VAC LECSA2 A2 200 to 230VAC LECSA2 A2 Both side D Both side D 40 400 S4 40 400 S4 100 to 120VAC 100 to 120VAC LECSB1 LECSB1 B1 B1 25 100 S6 25 100 S6 Motor option 32 200 S7 AC servo motor (Absolute encoder 32 200 S7 AC

LEJ-OM004xx

Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor (100/200 W) RoHS How to Order LEJS 40 500 A S2 Motor type 1 Size Lead [mm] 40 63 A B LEJS40 16 8 LEJS63 20 10 Symbol Symbol Type Actuator size Output [W] AC servo motor (Incremental encoder) AC servo motor (Incremental encoder) Compatible drivers 2 S2 LECSA;-S1 100 40 Stroke [mm] 3 S3 LECSA;-S3 200

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Without SI unit General type SI unit (Series EX300) Mitsubishi Electric Corporation: MELSECNET/MINI-S3 Data Link System Mitsubishi Electric Corp.: MELSECNET/MINI-S3 Data Link System (2 power supply systems) OMRON Corporation: SYSBUS Wire System SHARP Corporation: Satellite I/O Link System 16 output points Uni-wire System (NKE Corporation) Allen Bradley Remote I/O (RIO) System (2 power supply

Serial Network

Note 2) Can set pressure with 4096 resolution, corresponding to the maximum setting pressure 100%. Note 3) Can monitor pressure with 4096 resolution corresponding to the maximum output pressure 100%. Glossary of Terms SERIAL NETWORKS SMC Serial Network Systems SERIAL NETWORKS SOLENOID VALVE MANIFOLDS What exactly is the difference between an open network and a closed network?

Series LECSB/LECSC/LECSS Absolute Type Series LECSA (Pulse Input Type/Positioning Type) Incremental Type AC Servo Motor Driver (Pulse Input Type) (CC-Link Direct Input Type) (SSCNET III Type)

W 200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S4) AC servo motor (S6) AC servo motor (S7) AC servo motor (S8) Symbol C S1 S3 S41 SSCNET III type (For absolute encoder) Incremental S S5 S7 S81 Power supply voltage Absolute 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz 1 Not applicable for Series LEY Dimensions LECSAm 40 135 2 x 6 Mounting

ITV_P-E

(Note2) F_1 is adjustable in a range from 0% to 100% of the rated value. (Default value: 0%) (Note3) F_2 is adjustable in a range from 0% to 100% of the rated value. (Default value: 0%) (Note4) Return to (current) pressure display by pressing the SET and keys simultaneously even if while you are setting F_1, F_2 and P01 to P16. ([---] is displayed for approx. 1 second.)

Driver: A (Pulse Input Type for Incremental Encoder), Power Supply Voltage: 1 (100 to 120VAC, 50/60 Hz), Motor: S3 [AC Servo Motor (S3), 200W, Incremental Encoder]

Table of Contents

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !