Air Catch Sensor Series ISA

EXH port P1 LED level meter SUP port Sensor S1 S3 Red ON: Output OFF Green ON: Output ON S2 S4 + P2 Redq Detection port Below set position Large clearance S1, S2: Fix orifice S3: Variable orifice (adjusted by setting dial) S4: Detection nozzle Redw BEST POSITION Set position Greenq In a bridge circuit as in the figure above, a detection gap is applied to the detection nozzle (S4) while the

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Exhaust NVFR4400 NVFR4410 % 2.8 180 70 or less 1.S1 (0.73) center 1h 2.8 Pressure NVFR4500 NVFR451 0 % 3.S 180 70 or less 1.S1 (0.73) center 1h 3.S The Agures lIated are without subplate.

CATALOG

15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy of Steven Engineering, Inc. !

CC

stroke W S QL QB P NL 200 300 400 500 600 700 800 50 100 -X CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 9.5 11 0 30 86 3 28 62.5 378.5 503.5 603.5 728.5 228.5 278.5 7 13 2 32 120 5 33 82.5 286 386 511 611 736 836 207 13 2 32 120 5 33 92 524 624 399 749 849 949 1049 Hexagon socket head cap screw is used for mounting hole. 7 20 2.5 46 185 0 29 120 Data 10

CC

stroke W S QL QB P NL 800 700 600 500 400 300 200 100 50 -X CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 9.5 11 0 30 86 3 28 62.5 728.5 603.5 503.5 378.5 278.5 228.5 7 13 2 32 120 5 33 82.5 611 511 386 286 836 736 207 13 2 32 120 5 33 92 624 524 399 949 849 749 1049 Hexagon socket head cap screw is used for mounting hole. 7 20 2.5 46 185 0 29 120 Data 10-17

3 Port Solenoid Valve/

Pilot Nil Internal pilot R External pilot Voltage Safety limit switch/Wiring 5 24 VDC Nil G1/2 (Made by OMRON) M M12 connector (Made by OMRON) Electrical entry S1 M12 connector (Made by Rockwell Automation) D DIN terminal Y DIN (EN175301-803) terminal Refer to page 18 for details about type Y. With check valve (Only external pilot) Check valve Applicable tube O.D.

Table of Contents

200 250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

Slider Type Ball Screw Drive/11-LEFS Series

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 * Please consult with SMC for

XM, XY

XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1

V

Ambient & Fluid Temperature -10 ~ 50C A Clean Room version is available to specified Lubrication Not Required order Manual Override Non-Locking Push Type Shock Resistance/Vibration Resistance 150 / 30m/s2 Mounting Orientation Free The VQD1000 is used either on a Single SubEnclosure Dust Proof base or Manifold Mounted.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1

LEC-OM07605CN

(3)DO-2() (a) 35mA LA (LB LZ) L A (LB LZ) 100 Am26LS32 150 LAR (LBR LZR) LAR (LBR LZR) LG SD SD (b) CCW LA (T)[Pr. PA15][Pr.

Title not found

Metric size (Release bushing: White color) s3.2, o4, 06, o8, o10, o12 . lnch size (Belease bushing: Orange color) s1 18 . o5n.2', o31 16', s1 14", o51 16', qglS' . 01 2' I Speed may be accurately controlled even at low speeds. I Able to control and set a constant speed easily. I Retainer prevents accidental loss of needle. I Maximum operating pressure 1 MPa max.

Information

Note 2) For interface use, supply 24 VDC 10% 150 mA using an external source. Note 3) The failure (ALM) is ON during normal conditions.

Battery-less

2.96 3.30 3.56 2.96 3.20 3.75 4.81 4.98 5.47 5.91 Series LEYG16LmE LEYG25LmE LEYG32LmE Stroke [mm] 30 50 100 150 200 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight [kg] 0.98 1.11 1.28 1.57 1.72 1.70 1.91 2.15 2.58 2.84 3.16 3.40 2.54 3.21 3.60 4.15 4.69 5.20 5.59 Series LEYG40MmE LEYG40LmE Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Product weight

Dedicated Controller

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

Lubrication Equipment

A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

Table of Contents

Impact/Vibration resistance (m/s2) 150/50 Note) Manifold Possible Use dry air (Dew point: 20C or less). If using a lubricant, be sure to use a lubricant for low temperatures.

Title not found

I E s1/r ooo E s1/rooo Y T I l" DIN rai mount {with DIN DIN rai mount (withoul DlN N.le) nseaD0 ony DIN rallilrings are altached DIN rail length Doube lviinq specitcalion: S nqle, dolbe and 3 pos t on soenoclvaves can be lsed of a rnaftfo d slators. Supply/Exhaust block assembly specif ication Speclied ayoul Indicate vJir ng speciical ons on a nran to cl spec iicai on shet.

LEC-OM02704CN

6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (8) (2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 6 6 6 (6) (6) (6) 1.