A

30 25 5, 10, 15, 20, 25, 30, 40 60 32 5, 10, 15, 20, 25, 30, 40 60 40 5, 10, 15, 20, 25, 30, 40 60 Courtesy of Steven Engineering, Inc. !

VQC

Proper tightening torque (Nm) Tightening torques for piping Connection thread Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

smcmaintenancepartslist

-30 MI-A2503-50 MI-A3203-30 MI-A3203-50 MI-A0802-10 MI-A0802-20 MI-A1202-10 MI-A1202-20 MI-A1202-30 MI-A2002-10 MI-A2002-20 MI-A2002-30 MI-A2502-30 MI-A2502-50 MI-A3202-30 MI-A3202-50 MI-A0801-10 MI-A0801-20 MI-A1201-10 MI-A1201-20 MI-A1201-30 MI-A2001-10 MI-A2001-20 MI-A2001-30 MI-A2501-30 MI-A2501-50 MI-A3201-30 MI-A3201-50 MIS-A0804 MIS8-PS MIS-A1204 MIS12-PS MH-G01 (contents quantity

SY

Connector assembly part numbers 30 4A SY100 For DC: DIN terminal 30 1A SY100 For 100VAC: With surge voltage suppressor (DS) 30 2A SY100 For 200VAC: No.1 () (+) 30 3A SY100 For other AC: ZNR Coil 30 A SY100 Without lead wires: No.2 (+) () (Connector, socket x 2pcs. only) With indicator light/ surge voltage suppressor (DZ) Lead wire length 300mm Nil No.1 () (+) 6 600mm 1000mm 10 15 20 25 30

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

Series SV

General purpose Each T unit has 32 control points. 16 outputs 24VDC 10% External power supply A, B, D, E, F1, G, J1, J2, K, R1, R2, H, U, V Current consumption (Inside unit) 0.1A 0.3A C, Q SI manifold solenoid valve T unit OB unit SI unit SI unit Master unit Remote I/O unit Remote I/O unit S1 S2 SG S1 S2 R1 R2 SG FG 24V 0V S1 S2 R1 R2 SG FG 24V 0V S1 S2 R1 R2 SG FG SDA SDB RDA RDB SG FG

Cylinder with Lock

: A12 Symbol: A13 Symbol: A14 Symbol: A15 R sphere C0.5 DA DA AL MM DA C C DA 30 30 30 H A A H H A H W1 T C Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM AL DA MM 30 30 30 30 MM MM H A H A H A C H A 46 CP96N/C96N Series Symbol Change of Rod End Shape 1 -XA0 to XA30 Symbol: A20 Symbol: A21 Symbol: A22 Symbol: A23 RD 30 30 MM 30 DA MM 30 DA MM L DB DB C H A T H A T H A B W H A L K Symbol

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

IDX-OM-M051

/2 R1/2 36 129 20 7122 350 700 752 1.3 Name and function of parts Facility water outlet Terminal block for signal Facility water inlet (Symbol: W5) (Symbol: W5) R1/2 R1/2 Refer to 6.3 Outer dimensions 6 4 IDF100F~150F-W IDX-OM-M051 Air Dryer 6.

IDX-OM-Z004

6 2 GWP IDX-OM-Z004 6 6.3 IDF100F-30-W () (10, 2m) ) 4 (10 4x ( 20 4x 25 2m) (10, 0.7m) (10,0.7m) 107 267 460 R2 735 64 75 7001 1120 R2 (17) 17) 40 127 479 51 1276 1418) (14~18) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y 1/2 () () R1/2 R1/2 (50) 20 (143) 335 7122 752 670 1,3 (-W5) -W5 -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 3 IDX-OM-Z004 6 IDF125F-30-W () K16K (10, 2m) (10 ) (

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 3) Value for quick response type Symbol 2 position single 3 position closed center 3 position exhaust center 3 position pressure center 2 position double (Double solenoid) 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) Manifold Specifications Piping specifications Note 4) 1 station weight (g)

SV

SI unit Master unit Remote I/O unit Remote I/O unit SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG SDA SDB RDA RDB SG FG S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

15

UU W Y1 Model Nil TN TF NN adjustable range adjustable range (Both sides: R1 x 2) (Both sides: Y1 x 2) CY1S6-Z M6 x 0.75 RJ0604N M4 x 0.7 M30.5 25 25 49 52 7.5 15 42 10 46 11.5 23 62 16 1 CY1S10-Z M8 x 1 RJ0806HN M4 x 0.7 M50.8 25 38 61 60 5.5 11 47 12.5 58 14 28 72 1 24 CY1S15-Z M8 x 1 RJ0806LN M4 x 0.7 M50.8 30 50 76 75 5.5 11 62 12.5 73 14 28 87 30 1 CY1S20-Z M10 x 1 RJ1007LN 40

Clean Exhaust Filter

/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. flow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch fitting type Symbol Applicable tubing O.D.

ASR

12 219 237 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R3/8 65.5 67.6 60.1 27.7 61.2 53.7 20.6 221 239 22 34.4 64.6 20.9 12 239 257 21 32.6 62.8 18.5 10 86.3 30 29.7 25 R1/2 65.5 71.1 63.6 27.7 62.9 55.4 24.1 239 259 22 34.4 64.6 20.9 12 Note 1) d indicates the applicable tubing O.D.

ZP

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

5 Port Solenoid Valve, Series VQC

Single mounting screw, clamp construction Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 Replaceable One-touch fittings R1 A P B R2 Model A side B side JIS symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve Wiring 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2