Pressure valve/Series ASR Flow valve/Series ASQ

Port size 6 8 10 12 Flow valve Pressure valve ASR4 3 0F02 ASR53 0F02 ASR53 0F03 ASR6 3 0F03 ASR6 3 0F04 ASQ4 3 0F02 ASQ53 0F02 ASQ53 0F03 ASQ6 3 0F03 ASQ6 3 0F04 R1/4 R1/4 R3 /8 R3 /8 R1/2

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1

MA2

AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC Tool adapter <10/15> MA 210 A M3

■How to Order ASP-X369 Series ASP330F－01－06S－X369 Applicable tubing O.D. Body size Metric size Inch size Port size φ6 3 φ1/4” 06 07 1/8 standard Symbol Cylinder side φ8 4 φ5/16” 08 09 1/4 standard 01 R1/8 φ3/8” φ10 5

Metric size Inch size Body size Port size 06 6 3 1/8 standard 07 1/4 Symbol Cylinder side 08 8 4 1/4 standard 09 5/16 01 R1/8 10 10 11 3/8 5 3/8 standard 02 R1/4 12 12 13 1/2 6 1/2 standard 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series XTO257102 Applicable tubing O.D.

S Couplers Series KKH

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KKH3S-01MS -02MS KKH4S-01MS -02MS -03MS -04MS 1/8 1/8 1/4 1/4 Female thread type Female thread type Body size Port size Part no.

Exhaust Cleaner for Vacuum Pump AMV Series

Carbon steel Carbon steel Case Oil-drain port Plug AMV3, AMV6: R3/8 AMV15, AMV37: R1/2 AMV75, AMV160: R3/4 Replacement Parts AMV3 AMV6 AMV15 AMV75 1 AMV37 AMV160 2 No Description Material Part no.

Exhaust Cleaner for Vacuum Pump AMV Series

Carbon steel Carbon steel Case Oil-drain port Plug AMV3, AMV6: R3/8 AMV15, AMV37: R1/2 AMV75, AMV160: R3/4 Replacement Parts AMV3 AMV6 AMV15 AMV75 1 AMV37 AMV160 2 No Description Material Part no.

S Couplers Series KKA

Body size Port size KKA3 S-01 M KKA3 P-01 M R1 / 8 R1 / 8 1 / 8 KKA3 S-02M 1 / 8 KKA3 P-02M R1 / 4 R1 / 4 KKA3 S-03 M KKA3 P-03 M R3 / 8 R3 / 8 KKA4 S-02M KKA4 P-02M R1 / 4 R1 / 4 KKA4 S-03 M 1 / 4 KKA4 P-03 M 1 / 4 R3 / 8 R3 / 8 KKA4 S-04 M KKA4 P-04 M R1 / 2 R1 / 2 KKA6S-03 M KKA6P-03 M R3 / 8 R3 / 8 KKA6S-04 M KKA6P-04 M 1 / 2 1 / 2 R1 / 2 R1 / 2 KKA6S-06M KKA6P-06M R3 / 4 R3 / 4 Built-in

Title not found

(mm) Model R3/8 KQGT04-00 KQGT06-00 KQGT08-00 KQGT10-00 KQGT12-00 4 6 8 10 12 R1/4 10 R3/8 R3/8 12 R1/2 Straight Union Straight Union Union "Y" Union "Y" Applicable tubing O.D. (mm) Model Applicable tubing O.D.

Table Accuracy: Basic Type, Max. Rotating Torque: J (Basic, 6.6 N.m)

Table Accuracy: Basic Type, Max. Rotating Torque: Basic, 6.6 N.m, Rotation Angle: -, Motor Cable Entry: -, Actuator Cable Type, Length: -, Controller: -, Mounting: -, I/O Cable: -

Air Cylinder

EE EA Bore (in) Y XD G J C CB CD L KK M R B D WF A MM P LF ZD 3/8 2.02 2 1/4-28 3/8 0.3 150 (1.5") 1.71 5 3/4 1.26 1.1 3/4 3/8 1/2 3/4 7/16-20 0.63 1.43 1 1/8 9/16 1 3/4 5/8 2.36 3 5/8 6 3/8 3/8 2.6 2 1/2 5/16-24 3/8 0.3 200 (2") 1.71 5 3/4 1.26 1.06 3/4 3/8 1/2 3/4 7/16-20 0.63 1.84 1 1/8 9/16 1 3/4 5/8 2.4 3 5/8 6 3/8 3/8 3.1 3 5/16-24 3/8 0 250 (2.5") 1.75 5 7/8 1.3 1.06 3/4 3/8 1/2 3/

V100

VQZ 3(R) 3(R) VZ (G) (E) (T) (D, Y) VS N.C.

Table of Contents

3 !5 @3 !0 !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

RD SD LRUN PW VP4 9 B B B B B S0700 23 SMC SMC SMC SMC 42 VQ 63.5 VQ4 1 2 3 4 5 6 7 n Stations D side U side 1(P), 5(R3), 3(R1) 6 x Rc 1/2 VQ5 Manual override VQC SMC VQZ 150.5 141.00 SQ 115.5 A A A A A A A 91.5 74.00 VFS 58 18 14 B B B B B B B VFR 3 3 3 4(A), 2(B) port 2n x Rc 3/8, 1/2 30 43 62.5 VQ7 EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use a dripproof plug assembly (AXT100B04A) for the unused

AS

54.7 17 20.9 AS3001F-07-3 167 88 18.5 10 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 16 AS4001F-10-3 77.7 64.4 8.2 82.1 11.3 35 69.3 61 21 18.5 AS3001F-09-3 27 21 24.5 3.5 171 95 12 AS4001F-12-3 36 70.3 62 22 3/8" 17.2 33.3 62.1 56.7 21 70.8 9.5 20.9 AS3001F-11-3 Note 1) Reference dimensions 175 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 76.9 10.3 AS4001F-11-3 24.5 188 AS4001F-13-3 21.7 1/2" 83.1 36.3

HRX-OM-M090

2.4 Operation display panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.1.1 Transportation using casters . 3-2 3.2 Installation . 3-3 3.2.1 Environment . 3-4 3.2.2 Location (Required ventilation rate and facility water source) . 3-6 3.2.3 Installation and Maintenance Space . 3-7 3.3 Installation . 3-8 3.3.1 Mounting . 3-8 3.3.2 Electrical wiring . 3-9 3.3.3 Preparation

Shock Absorbers and Rate Controls

19.0/ -3' 3t.zo.3' 38.0 t6.o'3' 73 38 38 35 26 N/A 23.0 2 1tl PfN2 | 00cxt(sl 408 r9.04'19.o7fr 3t.lo i., 38.0 r6.0'fi 73 38 38 35 26 N/A 23.0 P 2l50(flt(S) 537 r 9.07-3 ' r9.07'3' 3r.zo 3',38.0 t6.l)f 5 7 1 38 38 35 I O r,l/A 23.0 5.08 PRO| |o(n(Sl 2l I 5.oo tl 5.00 -3' 8.00 i, o.oo j., fi/A 28 N/A 22 l l l 3 5.0 t.0 0.54 PR0r 25(lt(sl 180 6.38 -35 6.38 -3' 12.70 il I?.

30

13.7 M5 x 0.8 1/8 1/4 4 12.6 9.1 14.4 4 3 A L2 14.7 M5 x 0.8 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2 35.4 H 6 13.6 11.4 15.9 10.9 37.6 38.6 40.7 42.3 43.3 50.2 49.1 52 52.3 53.2 56.1 64.1 66.6 Connection thread 18.6 (R) 8 16.1 20.5 13.7 19.1 Applicable tube L1 M 10 17 33.5 16.6 21 D 22.6 12 18.6 47.7 18.7 23.6 A L2 71 100 26.3 27.3 H 16 20.8 24.6 Connection thread (with sealant

Speed Controller with Indicator

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female