Compatible Fluid: Air, Operating Environment: Standard, Type: Air Operating Type, Switching Type: Normally Closed, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/8, Driving Type: Pilot Type, Option: -, Pilot number: Single, Number Of Ports: 3, Pilot port piping method: Sub-plate side (internal), Body Type: Base Mounted Type

Oscillation Angle A: [180°] External Stopper, Torque (Range)(N⋅m): 10 to Less than 20, Type: Rotary Actuator One Side Shaft Output, Main Body Shape: Block Shape, Rigidity Accuracy: High Rigidity, High Accuracy, Environment, Applications: High-Speed, Valves: Not Provided, Torque(N⋅m): 10, Size: 50, Motor cable entry direction: Basic type (entry on the right side), Actuator cable type: Without

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

single L plug connector (L) 52-SY9120-L02 03 109.3 6.5 (56.3) Insulation: Black () B 2 A 4 18.4 Manual override Insulation: Red (+) 33.6 3 x 3.2 (Mounting holes for manifold) 64.2 2 x 1/4", 3/8" {4 (A), 2 (B) port} 46 (For E type) 0.3 mm2 51.5 42 36.6 16.7 1.55 10 2 x 4.4 (Mounting holes) (12) 24.9 43.85 L 153.4 (Lead wire length) 3 x 1/4" {1 (P), 3 (EB), 5 (EA) port} 56.3 23 0.5 0.5 3EB 1P

VP300/500/700

NO 2A NO 2A X X NC 1P NC 1P When changing the actuation from normally closed style to normally open style, remove the body from the sub-plate and reset the mark on the body corresponding to the NO mark on the sub-plate as shown in the figure above. It is not necessary to change the piping at that time.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

LEF-OM006xx

LEFS 25 B 6N 1 20 0 1 DIN 1 6 16 25 25 I/O 32 32 40 40 1.5 m 1 1 3m 3 3m 3 5m 5 5 5m 40 16 25 32 40 16 25 32 ( ( DC24V NPN NPN A A LECP6/LECA6 6N 6N PNP PNP DC24V 6P 6P NPN NPN LECP1 1N * 1N * LECP1 PNP PNP 40 32 25 16 1P * 1P * 40 32 25 16 NPN NPN A A 10 mm 12 mm 16 mm 20mm AN * LECA6 AN * LECA6 PNP PNP B B 5 mm 6 mm 8 mm 10mm AP * AP * 100 mm 100 8m 8m 100 8 8 10m

PA300/500/700

(Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Tightening Torque for Mounting Screw VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

DXT156-24-1P DXT156-24-2P Material Note No. q w e r t y u No. Description Note Description Body Adapter plate End cover Pilot body Pilot cover Piston Spool valve Sub-plate Part No.

Electric Grippers

1 Controller/Driver type Step Motor (Servo/24 VDC) Nil 6N 6P 1N 1P AN AP Nil S R Nil 1 3 5 8 A B C Without controller/driver Without cable 1.5 3 5 8 Without cable Standard cable Robotic cable (Flexible cable) LECP6 (Step data input type) NPN PNP NPN PNP NPN PNP LECP1 (Programless type) LECPA (Pulse input type) The standard cable should be used on fixed parts.

Lubrication Equipment

Model ALF400 ALF400-06 ALF500 ALF600 ALF800 ALF900 Description B44P B44-1P 1 : B45-1P 1 : B45-2P B46P 1 4 1 2 Bracket Note) A float switch can not be mounted on ALT-5 or ALT-9 afterwards.

VZ100/300/500

Material Aluminum die-casted Note Platinum silver Black Black Description Sub-plate Material Aluminum die-casted Epoxy/Stainless steel NBR Description No. q w e r t y DXT200-13-1P Piston plate Body DXT170-C13 x 11 x 1 Solenoid assembly O-ring Resin Aluminum die-casted Common with VZ100 End cover Piston Spool valve assembly Spool spring Thread type Resin Sub-plate part no.: DXT200-13-1P Nil

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol

VPA4

(Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol

125

Manual override 3R 1P A B PA 2A VEX3221: M5 VEX3222: None (PA/Pilot air port) 58.6 Air operated: VEX3220 61.8 M5 (Port P2/Pilot air) Max. 10 101.7 Pg7 Applicable cable O.D. 3.5 to 7 87.9 M5 (Port P1/Pilot air) 80.4 69.1 3R 1P M5 (PE/Pilot exhaust port) P1 2A 1 59.1 58.1 102.6 64.1 1732 3 Port 3 Position Valve VEX3 Series Dimensions: Base Mounted/VEX342 External pilot solenoid: VEX3421 Internal

Fieldbus System

.: 8, 5/16" 42.3 7.4 (Station n) (Station 1)-(Slide locking manual override) BUS OUT 1 P 1 P X PE 76.7 68.8 63.1 10.6 13.6 BUS IN B A B A 56.6 14 A 14 A E 3/5 E 3/5 2 B B 2 B 2 B 2 B 2 40.2 PWR 4 A 4 A 4 A 4 A 4 A 21.6 18 (42.8) (37.5) 78.6 1P 12 B 12 (For DIN rail mounting) 7.5 (Pitch) P = 10.5 46.5 15.5 (17.8) 11.8 One-touch fitting [PE: Pilot EXH port] [X: External pilot port] Applicable

5 Port Solenoid Valve Series SV1000/2000/3000/4000

.: 8, 5/16" 42.3 7.4 (Station n) (Station 1)-(Slide locking manual override) BUS OUT 1 P 1 P X PE 76.7 68.8 63.1 10.6 13.6 BUS IN B A B A 56.6 14 A 14 A E 3/5 E 3/5 2 B B 2 B 2 B 2 B 2 40.2 PWR 4 A 4 A 4 A 4 A 4 A 21.6 18 (42.8) (37.5) 78.6 1P 12 B 12 (For DIN rail mounting) 7.5 (Pitch) P = 10.5 46.5 15.5 (17.8) 11.8 One-touch fitting [PE: Pilot EXH port] [X: External pilot port] Applicable

5 Port Solenoid Valve

.: 8, 5/16" 42.3 7.4 (Station n) (Station 1)-(Slide locking manual override) BUS OUT 1 P 1 P X PE 76.7 68.8 63.1 10.6 13.6 BUS IN B A B A 56.6 14 A 14 A E 3/5 E 3/5 2 B B 2 B 2 B 2 B 2 40.2 PWR 4 A 4 A 4 A 4 A 4 A 21.6 18 (42.8) (37.5) 78.6 1P 12 B 12 (For DIN rail mounting) 7.5 (Pitch) P = 10.5 46.5 15.5 (17.8) 11.8 One-touch fitting [PE: Pilot EXH port] [X: External pilot port] Applicable

Electric Actuator

Nil 6N 6P 1N 1P Without cable LECP6/LECA6 (Step data input type) NPN PNP NPN PNP LECP12 (Programless type) 1 For details of controllers and compatible motors, refer to the compatible controllers below. 2 Only available for the motor type Step motor.

Electric Actuator

. + I/O cable length [m] 1 Controller/Driver mounting ( Controller/Driver type 1 Nil 1 3 5 Nil 6N 6P 1N 1P AN AP Nil D Screw mounting DIN rail mounting Without cable 1.5 3 2 Without controller/driver LECP6/LECA6 (Step data input type) NPN PNP NPN PNP NPN PNP DIN rail is not included.

0.4

.: 8, 5/16" 42.3 7.4 (Station n) (Station 1)-(Slide locking manual override) BUS OUT 1 P 1 P X PE 76.7 68.8 63.1 10.6 13.6 BUS IN B A B A 56.6 14 A 14 A E 3/5 E 3/5 2 B B 2 B 2 B 2 B 2 40.2 PWR 4 A 4 A 4 A 4 A 4 A 21.6 18 (42.8) (37.5) 78.6 1P 12 B 12 (For DIN rail mounting) 7.5 (Pitch) P = 10.5 46.5 15.5 (17.8) 11.8 One-touch fitting [PE: Pilot EXH port] [X: External pilot port] Applicable