High Vacuum Angle Valve

Use within the operating temperature range. 6. The actuating piston chamber and the bellows chamber are directly connected to atmosphere. Use in an environment where dust emissions will not cause problems. (Please consult with SMC if the release of dust must be avoided.) 7.

AC Servo Motor Driver (Network card type ）

4 6.

AC Servo Motor Driver (Pulse input type/Positioning type ）

PF_ _ ]) . 5-63 6. NORMAL GAIN ADJUSTMENT 61 to 6-33 6.

Table of Contents

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Proposals for Energy Saving

8 @4 #3#0 #4$0#9@5#2w @6 @3ue !6!5 !1 !2 !0 #7@1#5@2 @8@7#6@0#8 End lock !3 !4 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 No.

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

Air Catch Sensor Series ISA

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Use the manifold specification sheet to specify. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

Digital Gap Checker

The sub screen display can be selected from 6 display options.

Lubrication Equipment

Applicable tube O.D. 6 6 Oil Distributor Number of distribution ports (VA) (VB) VB6-6 Distribution 4 ports 6 ports 8 ports 4 ports 6 ports 10 ports 16 ports 4 6 8 4 6 10 16 Both sides exhaust One side exhaust A B VA4-6 Dimensions VAl-6 VBl-6 A B C Model # Ports Applicable tubing 4 6 10 16 36.5 60 88 130 VA4-6 VA6-6 VA10-6 VA16-6 Model # Ports Applicable tubing A B C 82.5 110.5 152.5 48 76

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

AHC System Series MA

3.5 6 x M2 x 0.4 thread depth 4 (A, B, C common view) 3 0 0.02 3 Open: 22, Closed 14 0 0.02 Open: 16, Closed: 10 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15: MHR2-15-A210 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) Hexagon socket head cap screw M3 x 12 (3 included) Mass: 130 g Mass: 210 g +0.022 0 depth 6 3 x 3 (A, B, C common view) 6 x M3 x 0.5 thread

Dedicated Controller

Female terminal 6 5556PBTL Wiring tools [Manufacturer: Molex Japan Co., Ltd.] Wiring tools should be provided by customer.

CC

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

20

(I.D. 5, equivalent length 5 m) Air gun VMG (Nozzle size 2.5) Conventional model (Nozzle size 3) 0.021 inch2 (13.45 mm2) 0.0079 inch2 (5.1 mm2) Coupler, Piping (S0) Effective area 0.0093 inch2 (6 mm)2 Air gun (S1) 0.047 inch2(30mm2) 0.0068 inch2 (4.4 mm2) 0.0098 inch2 (6.3 mm)2 Nozzle (S2) 0.69 : 1 3.04 : 1 Effective area ratio (S0 to S1: S2) Impact pressure 1.6 psi (0.011 MPa) (at a distance

20

(I.D. 5, equivalent length 5 m) Air gun VMG (Nozzle size 2.5) Conventional model (Nozzle size 3) Coupler, Piping (S0) 13.45 mm2 5.1 mm2 Effective area Air gun (S1) 30 mm2 6 mm2 Nozzle (S2) 4.4 mm2 6.3 mm2 0.69 : 1 3.04 : 1 Effective area ratio (S0 to S1: S2) Impact pressure 0.011 MPa (at a distance of 100 mm) 0.011 MPa (at a distance of 100 mm) Regulator pressure 0.4 MPa 0.5 MPa Pressure

XM, XY

Note) Bellows seal Particulate free XMC XYC Atmospheric pressure to 1 x 10-6 Note) Double acting XMD XYD Reduces particulates Eliminates pump overload Single acting (N.C.) Bellows, O-ring seal Standard PAT. PAT. Manual XMH XYH Atmospheric pressure to 1 x 10-6 Manual Particulate free Bellows seal Note) Standard Standard Note) The in-line valve is not available in flange size 16.

Ejector Valve Unit Series ZYY/ZYX

Port V (5.25) 19 88 18.8 16.8 Air pressure supply port HEP Button for block separation 6 One-touch fitting Port P1 27 Related Equipment ZYX3LOZ-S1(Specifications without vacuum switch) End plate (P44027A) EXH.

CC

C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.

Air-hydro Unit

W QL S QB NL P 50 100 200 300 400 600 700 800 500 CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 11 9.5 30 0 3 86 62.5 28 228.5 278.5 378.5 503.5 603.5 728.5 13 7 2 5 120 32 82.5 33 286 386 511 611 736 836 7 2 13 120 32 33 5 92 399 524 624 1049 949 749 849 Hexagon socket head cap screw is used for mounting hole. 7 0 185 46 2.5 20 120 29 D-X Technical Data