Table of Contents

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

Proposals for Energy Saving

Model VP3145 VPA3145 IN, OUT Port size Rc VP3165 VPA3165 VP3185 VPA3185 1 2 1 1/4 1 1/4 1 1/4 1 1/2 3/8 1/2 3/4 3/4 3/4 Easy conversion to N.C. or N.O.

Electric Actuator with Integrated Guide

9 4-M6 x 1 1.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note 4) Kit/Electrical entry/Cable length F P kit (D-sub connector) kit (Flat ribbon cable connector) Note 1) 26P 26P Note 1) Note 1) 25P Side entry Top entry Side entry Top entry Note 1) 25P Connector entry direction Top entry Side entry Connector entry direction Top entry Side entry U0 U1 U2 U3 P. 2-4-76 P. 2-4-78 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 Without cable With cable (1.5 m) With

Lubrication Equipment

(Turn proof structure at pressurized state) 1.17-2 AL1000 to 6000 Standard Specifications AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 Model 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 M5 X 0.8 Port Size Air 1.5MPa 1.0MPa Fluid Proof pressure Max. operating pressure 1/4: 30 3/8: 40 1/2: 50 130 1/4: 30 3/8: 40 50 Min.operating flow (l/min (ANR))(1) 50 190 220 4 15 130 130 130 7 25

Digital Gap Checker

Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 ISA3-mmm-mmmB-LNm ISA3-mmm-mmmB-RNm 44.6 L1 L1 44.6 52.5 30 52.5 30 64.5 H 90.1 115.9 64.5 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 Unit: mm Stations 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 *: Bracket mounting only *1: Conforming to ISO16030 *2: Conforming to

Air Catch Sensor Series ISA

Centralized wiring type IISA2S-1 IISA2S-2 IISA2S-3 IISA2S-4 IISA2S-5 IISA2S-6 Individual wiring type IISA2P-1 IISA2P-2 IISA2P-3 IISA2P-4 IISA2P-5 IISA2P-6 ISA-5-1 ISA-5-2 ISA-5-3 ISA-5-4 ISA-5-5 ISA-5-6 ISA-5-7 73.0 135.5 173.0 210.5 248.0 285.5 323.0 5.5 35 35 Pressure Gauge for Air Catch Sensor Round pressure gauge Square embedded pressure gauge Connection thread GC3 4 4 AS G36 01 Nil

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KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 D 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R1/4 14 20 14 2 A L1 Connection thread H1 Reference dimensions after R thread installation Copper extension nozzle set (mm) L Note1) Width across flats H1 Part no.

AHC System Series MA

diameter d Model MA210-YNM3 MA210-YNM3-S1 MA210-YNM3-R1 MA210-YNM3-R2 MA210-YNM3-R3 MA210-YNM3-R4 MA210-YNM3-R5 MA210-AM3 260 8 25 10 11 AHC unit 30 300 14 15 20 35 Tool adapter 100 742 AHC System Series MA2 Robot adapter MA210-C MA210-CS1 MA210-CR1, 2, 3, 4 MA210-CR5 50 50 50 AHC unit mounting hole 4 x 3.4 (PCD44.5) AHC unit mounting hole 4 x 3.4 (PCD44.5) AHC unit mounting hole 4 x

20

D H1 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 D 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R1/4 14 20 14 2 A L1 Connection thread H1 Reference dimensions after R thread installation Copper extension nozzle set [mm] L Note1) Width across flats Part no.

Dedicated Controller

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Valve seal (Maintenance part) 4.

Ejector Valve Unit Series ZYY/ZYX

ZX B B A B A B ZR P1 A A ZM 10 9 4 5 ZMA ZQ 3 ZH ZU ZL ZY ZF 11 ZP Section A-A' (Ejector) 12 SP 2 7 ZCUK AMJ 8 AMV AEP HEP Related Equipment 6 1 Section B-B' (Solenoid valve) Component Parts Replacement Parts Description Material Note Description Part no. No. No.

Series VQ1000 Body Ported Plug-in Unit: Flip Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

4-16 Side entry Top entry Side entry Without cable Without cable Without cable U0 U1 U2 U3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J

XM, XY

Maintenance Caution 4. SMC specified parts should be used for service. Refer to the Construction/Maintenance parts table. 5. When removing seal material (such as valve, exterior seals), take care not to damage the sealing surfaces. When installing the valve and exterior seals, be sure that the O-ring is not twisted. 1.

CATALOG

1/2 5/8 3/8 3/4 3/4 1/2 6 1/4 250 (2.5) 1 1/8 3.1 1.5 1/2 5/16-24 3 0 1.3 1.06 1 1 3/8 2.48 6 3/4 3 3/4 2.13 3/4-16 7/8 3/8 3/8 1/2 1/2 5/8 3/8 3/4 3/4 1/2 7 3/4 325 (3.25) 1 5/8 3.9 2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 1 3/8 1 5/8 2.72 8 1/2 1 1 1/4 4 1/4 1 1/4 2.59 1-14 1/2 5/8 3/4 3/4 5/8 3/4 7 3/4 400 (4) 1 3/8 1 5/8 4.7 2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 1 5/8 2.72 8 1/2 1 1 1/4 4

Table of Contents

Fixed 4% F .S.

LEC-OM07605CN

(L1L2L3) 3. () () A 4 4.

V

-01 1.5 0.08 1.4 0.5 0.3 (6A) VX312(0/2/4)-01 2.2 0.16 2.8 0.3 0.2 VX313(0/2/4)-01 3 0.24 4.3 Water 1 0.6 VX311(0/2/4)-02 1.5 0.08 1.4 0.5 0.3 VX312(0/2/4)-02 2.2 0.16 2.8 Oil 0.6 VX3224-02 2.2 0.19 3.4 1 VX3324-02 2.2 0.19 3.4 Air 0.3 0.2 VX313(0/2/4)-02 3 0.24 4.3 1/4 2 0.3 VX3234-02 3 0.33 6 (8A) 0.6 VX3334-02 3 0.33 6 0.15 VX3244-02 4 0.5 9 Steam 0.3 VX3344-02 4 0.5 9 0.6 VX3224-03

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(Recommended height 5 mm) LEC Y Motorless Motorless Dimensions [mm] Stroke L A B n D E 50 238 56 180 4 100 288 106 230 4 150 338 156 280 4 200 388 206 330 6 2 300 250 438 256 380 6 2 300 300 488 306 430 6 2 300 350 538 356 480 8 3 450 400 588 406 530 8 3 450 450 638 456 580 8 3 450 500 688 506 630 10 4 600 550 738 556 680 10 4 600 600 788 606 730 10 4 600 650 838 656 780 12 5 750 700