SMC Corporation of America
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1 min. between external terminal and case Insulation resistance 50M or more (500 VDC Mega) between external terminal and case 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller. 4.9 m/s2 Vibration resistance 490 m/s2 in X, Y, Z directions 3 times each Impact resistance Noise resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Weight Note 3) 410 g 470 g

Move mm/s mm mm/s2 mm/s2 mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped. 35 - Details of step data Setting name Range Description No. 0 to 63 Number of the step data.

For 4 Axes Step Axis Movement mode Speed Position Acceleration Deceleration Positioning/ Pushing Area 1 Area 2 In position Comments mm/s mm mm/s2 mm/s2 mm mm mm Axis 1 ABS 100 200.00 1000 1000 0 6.0 12.0 0.5 Axis 2 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 0 Axis 3 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 4 ABS 50 100.00 1000 1000 0 6.0 12.0 0.5 Axis 1 INC 500 250.00 1000 1000 1 0 0 20.0

(Error number 5) 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2. S1 OFF ON OFF ON S2 OFF OFF ON ON Preset pressure P01 P02 P03 P04 For safety reasons, it is recommended that one of the preset pressures be set to 0 MPa.

Non-magnetizing lock (Option) Manual override screw Max. stroke:1000 mm Transfer speed:1000 mm/s Holding a workpiece For manual table operation.

Temperature abnormality On 16 Series E-MY2 Auto Switch Specifications Auto Switch Common Specifications Reed switch Solid state switch Type Leakage current 3-wire: 100 A or less 2-wire: 0.8 mA or less None Operating time 1.2 ms 1 ms or less 300 m/s2 1000 m/s2 Impact resistance 50 M or more at 500 VDC Mega (between lead wire and case) Insulation resistance Withstand voltage 1000 VAC for 1

Lubrication Not required Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) Note 1) In case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.

Symbol Name and function range [unit] PL01 **LIT1 Linear servo motor/DD motor function selection 1 (Do not change this value.) 0301h 0301h PL02 **LIM Linear encoder resolution Numerator (Do not change this value.) 1000 1000 [ m] [ m] PL03 **LID Linear encoder resolution Denominator (Do not change this value.) 1000 1000 [ m] [ m] PL04 *LIT2 Linear servo motor/DD motor function selection 2

Series VQ0-1000-2000 Plug Lead Unit: Flip Type Body Ported. Specifications. VQ0-1000-2000 F Kit (D-sub connector) . VQ0-1000-2000 P Kit (Flat ribbon cable connector) . VQ0-1000-2000 T Kit (Terminal block) . VQ0-1000-2000 C Kit (Connector) . VQ0-1000-2000 S Kit (Serial transmission unit) . Series VQ1000 Body Ported Plug Lead Unit: Cassette Type. How to Order Manifold.

MHF Type Solid state switch Reed switch 3-wire: 100 A or less, 2-wire: 0.8 mA or less (4) Leakage current None MHL Note 2) Operating time 1 ms or less (3) 1.2 ms Impact resistance 1000 m/s2 300 m/s2 MHR 50 M or more at 500 M VDC (Between lead wire and case) Insulation resistance Note 3) MHK 1000 VAC for 1 minute (Between lead wire and case) 1500 VAC for 1 minute (1) (Between lead wire and

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 40 50 63 80 100 125 140 160 180 200 1000 Perpendicular, upward actuation Horizontal actuation 900 800 700 600 500 400 300 200 100 0 A 1000 900 800 700 600 500 400 300 200 100 0 B System Components It is when the cylinder

Series CQ2 Stroke S2 Stroke S1 B L 1 B2 A Bore Size: 12, 16 (mm) Symbol L Stroke range B A 1 B2 S1 S2 Bore size 52.9 (63.9) + Stroke (S1 + S2) 58 (70) + Stroke (S1 + S2) 17 (28) + Stroke S1 18.5 (30.5) + Stroke S1 32.4 + Stroke S2 36 + Stroke S2 12 3.5 5 to 30 35 to 50 16 3.5 5 to 30 35 to 50 Bore Size: 20, 25 (mm) A B1 B2 Symbol Stroke range Stroke S2 55 to 75 80 to 100 Stroke S2 L Stroke

REC Type Solid state switch Reed switch 3-wire: 100 A or less, 2-wire: 0.8 mA or less (4) Leakage current None CX Note 2) Operating time 1 ms or less (3) 1.2 ms Impact resistance 1000 m/s2 300 m/s2 CY 50 M or more at 500 M VDC (Between lead wire and case) Insulation resistance Note 3) MQQ M 1000 VAC for 1 minute (Between lead wire and case) 1500 VAC for 1 minute (1) (Between lead wire and

CL1 Type Solid state switch Reed switch 3-wire: 100 A or less, 2-wire: 0.8 mA or less (4) Leakage current None MLGC Note 2) Operating time 1 ms or less (3) 1.2 ms Impact resistance 1000 m/s2 300 m/s2 CNG 50 M or more at 500 M VDC (Between lead wire and case) Insulation resistance Note 3) MNB 1000 VAC for 1 minute (Between lead wire and case) 1500 VAC for 1 minute (1) (Between lead wire and

Insulation resistance 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller. Vibration resistance 490 m/s2 in X, Y, Z directions 3 times each Impact resistance 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Noise resistance 200 g 240 g Weight Note 3) Port size (Rc, NPT, G) 1/8, 1/4 3/8 1/2 Note 1) The system accuracy when combined with PF2A2/3.

Acceleration/deceleration time (ms) = {3000 (r/min) 60 (S) } 8 (mm) 1000 3000 (mm/s2) 133 (ms) Speed at a rated motor rotation of 3000rpm Accel/decel time (ms) = {Rated Rotation Speed (r/min) 60 (S) } Screw Lead (mm) 1000 Acceleration/deceleration speed (mm/s2) *Acceleration speed is measured in ms, so this must be calculated as (s) 1000 -54- 5.6.4 Move distance Configuration and Operation

Acceleration/deceleration time (ms) = {3000 (r/min) 60 (S) } 8 (mm) 1000 3000 (mm/s2) 133 (ms) Speed at a rated motor rotation of 3000rpm Accel/decel time (ms) = {Rated Rotation Speed (r/min) 60 (S) } Screw Lead (mm) 1000 * Note) Acceleration/deceleration speed (mm/s2) *Acceleration speed is measured in ms, so this must be calculated as (s) 1000 54 - 5.6.4 Move distance Configuration

R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.