0.4

(R2) (R1)5 1 (P) 3(R2) VQZ r r e q w e q w SQ VFS VFR VQ7 VQC2301 VQC2401 VQC2300 VQC2400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r VQC2501 VQC2500 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC2A01 VQC2B01 2(B) 4(A) 4(A) 2(B) r 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) VQC2C01 2(B) 4(A) 1(P) 5(R1) 3(R2)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

Plug-in/Plug Lead: Single Unit

) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5500 (A) 4 (B) 2 VQ5501 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

) 1 (P) 5 (R1) 3 (R2) VQ5201 (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5301 VQ5300 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5401 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5501 VQ5500 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Parts list Parts list Description Material Note No. 1 2 3

5 Port Solenoid Valve

N.C. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.O. N.O. 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) N.C.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(B) 2 (B) 2 (A) 4 (A) 4 Number of solenoids Plug Plug Single Double Locked position 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) LOCK PUSH (B) 2 (A) 4 (A) 4 (B) 2 Plug Plug 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) (JIS Symbols above: Series 10-SYJ5000) Caution When locking the manual override on the push-turn locking types (D, E), be sure to push it down before turning.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 (A) VQ4451 VQ4450 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 4 (B) 2 (A) 4 (B) 2 VQ4551 (A) VQ4550 1 (P) (R1) (R2) 3 5 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description Material Note Number Body Spool valve Piston Aluminum die-casted Stainless steel Resin q w e Aluminum

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(P) (R2) 3 1 5 (R1) 1 (P) 5 (R1) (R2) 3 e q w r e q w r 4 (B) 2 (A) (B) (A) 4 2 VQ4300 VQ4301 3 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) (B) (A) 4 2 4 (B) 2 (A) VQ4400 VQ4401 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) 3 (A) 4 2 (B) 4 (B) 2 (A) VQ4500 VQ4501 1 (P) 5 (R1) (R2) 3 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3U31-R1 LQ3U31-R2 LQ3U32-R1 LQ3U32-R2 LQ3U41-R1 LQ3U41-R2 LQ3U51-R1 LQ3U51-R2 LQ3U61-R1 LQ3U61-R2 LQ3U2A-R1 LQ3U3A-R1 LQ3U3A-R2 LQ3U4A-R1 LQ3U4A-R2 LQ3U5A-R1 LQ3U5A-R2 LQ3U5A-R3 LQ3U6A-R1 LQ3U6A-R2 LQ3U7A-R1 4 x 3 1/4" x 5/32" 3 x 2 4 x 3 3 x 2 8 x 6 6 x 4 6 x 4 4 x 3 10 x 8 8 x 6 12 x 10 10 x 8 19 x 16 12 x 10 1/8" x 0.086" 1/4" x 5/32" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/

Plug-in/Plug Lead: Single Unit

) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

0.4

) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

Fieldbus System

) 4 (B) 2 (A) 4 (B) 2 Metal 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Light/surge voltage suppressor 2 2-position double 3-position pressure center Nil With E Without light, with surge voltage suppressor (A) 4 (B) 2 Rubber (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Coil voltage 3-position double check 5 24 VDC (A) 4 (B) 2 Note) 6 Function 1 (P) 5 (R1) 3 (R2) Nil Standard (0.95

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

SYJA3000

R1 R2 P 11.5 12 18 22 22 27.2 (R1, R2 port) 2-Rc(PT)1/4 63 5-Rc(PT)1/8 (Piping port) 3.1-21

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Side-ported 1/2 FHG 3 4 24 VDC Side-ported 3/4 12 VDC 1 (P) 5 (R1) 3 (R2) Side-ported 1 Voltage other than above (50 VDC or less) 9 (A) 4 (B) 2 Bottom-ported 1/4 Bottom-ported 3/8 FJG Bottom-ported 1/2 1 (P) 5 (R1) 3 (R2) Option Bottom-ported 3/4 Nil Z (A) 4 (B) 2 None Light/Surge voltage suppressor FIG Sealing type 5 (R1) 1 (P) 3 (R2) Nil R Metal seal (B) (A) Rubber seal 2 4 FPG 3 5

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing LQ1P4A-R2 4 5-13 LQ1-5N13 LQ1-5B13 3-07 LQ1-3N07 LQ1-3B07 LQ1P5A-R2 5 5-19 LQ1-5N19 LQ1-5B19 3-11 LQ1-3N11 LQ1-3B11 Union Reducing LQ1U-R A side B side Metric size Model Size A side B side Insert pin/Name plate symbol Part no. Insert pin/Name plate symbol Part no.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

1 (P) (A) 4 (B) 2 3 position exhaust center (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 3 position pressure center (A) 4 (B) 2 i 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) (This figure shows a closed center type.)