Refrigerated Air Dryers Series IDF/IDU

Supplied by customer. 325 [Foundations bolt set] [Piping adapter] IDF AP 601 500 IDF AB Applicable dryer Applicable dryer Applicable dryer Symbol Thread type and port size Male thread side A R 1/2 R 3/4 NPT 1 R 1 NPT 1 1/2 NPT 2 R 3/8 Symbol Female thread side B Applicable dryer IDF4E to 75E IDU3E to 15E IDU22E to 75E 500 601 603 604 605 606 607 609 NPT 1/2 NPT 3/4 Rc 1 NPT 1 Rc 1 1/2 Rc

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

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VEX1

and exhaust from the port 3 (R) on both sides.

Thermo-chiller/Rack Mount Type

Maximum load current 500 mA AC/DC (Resistance load) Contact output signal 1, 2, 3 Minimum load current 5 VDC 10 mA 24 VDC Output voltage 24 VDC 10% 500 mA MAX1 (No inductive load) 1 When using the power supply of this product, make sure that the total load current is 500 mA or less. Contact Input/Output Pin Nos. Pin no.

Step Motor Driver （ Pulse input type ）

500 250 1000 500 250 1200 500 250 500 500 250 Speed Strok 501-600 900 500 250 1200 500 250 500 500 250 601-700 630 420 230 930 500 250 500 500 250 701-800 550 330 180 750 500 250 500 500 250 801-900 610 410 200 500 500 250 901-1000 500 340 170 500 500 250 Step data default 1001-1100 500 440 220 1101-1200 500 380 190 Position 0.00 0.00 0.00 0.00 Acceleration 3000 3000 3000 3000 Deceleration

AC Servo Motor Driver (Pulse input type/Positioning type)

speed limit 6 [Applied] 500 r/min PC34 SC7 Internal speed limit 7 [Applied] 800 r/min 17 - 4.5 Positioning mode (1) [Basic settings parameters (No.PA)] No.

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

E d R f j Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts J 2 x M depth 5 A G H B1 B b 2 x P Port size i DS: DIN terminal DZ: DIN terminal with light 70 CS: Conduit 58.3 51.9 500 R R DN: DIN terminal without connector WN: WN: M12 connector without cable 44.1 34.3 R R [mm] Size Port size P A B B1 C E G H J M 30 1/4, 3/8 21 <22> 57 28.5 89.8 10.5

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

Electric Actuator

LE-CSM-R;; is MR-PWS1CBL;M-A;-H manufactured by Mitsubishi Electric. LE-CSB-R;; is MR-BKS1CBL;M-A;-H manufactured by Mitsubishi Electric.

CY1

10 100, 200, 300 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

ITV

Because of this, VAC. and the pilot chamber e are connected, the pressure in the pilot chamber e becomes negative and acts on the top of the diaphragm r. As a result, the vacuum pressure valve t which is linked to the diaphragm r opens, VAC. and OUT. are connected, and the set pressure becomes negative.

Membrane Air Dryer

Standard dew point temperature/Outlet air flow rate P With fitting for purge air discharge Symbol Flow rate by size Outlet air flow rate (L/min [ANR]) Standard dew Combination with Type V is not available.Note) point (oC) 30 50 60 75 100 R Flow direction (Right m Left) Nil 20 300 500 Select from Series IDG H L S In the case of two or more options, indicate them 15 300 500 alphabetically

3 Port Air Operated Valve

/N.O. 2(A) 3/8 1/2 15.3 Air operated valve (P)1 3(R) VPA300 N.C. 2(A) 1/8 1/4 3.8 (P)1 3(R) N.O. 2(A) VPA500 (P)1 3(R) 1/4 3/8 P. 1564 8.8 For vacuum N.C. 2(A) VPA700 (P)1 3(R) 3/8 1/2 N.O. 15.0 2(A) (P)1 3(R) 1556 VPA300/500/700 Series Model Selection by Operating Conditions w Air Operated Valve: Manifold Series Manifold base model Applicable stations Note) EXH port type SYA VV3PA3-41 SYJA

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) 6-Rc 3/8 (P, R port) (With individual EXH spacer) 300 (PE port) VFR (PE port) Applicable cable O.D. 2.3 to 2.8 (PE port) (Lead wire length) (PE port) Applicable cable O.D.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

kPa 500 kPa 1.5 MPa 500 kPa 500 kPa 1.5 MPa 2 outputs (NPN/PNP) Output specification 1 output (NPN/PNP) Analog (Voltage/Current) Enclosure IP40 IP40 Piping M5 female thread, R1/8, NPT1/8 Note Copy function, Auto-shift function CONTENTS 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series How to Order p. 9 Specifications p. 10 Set Pressure Range and Rated Pressure

High-Precision Digital Pressure Switch

kPa 1 MPa 100 kPa 0 100 kPa 500 kPa 1 MPa 101 kPa 101 kPa For vacuum pressure Withstand pressure 500 kPa Withstand pressure 500 kPa 0 0 Rated pressure range 100 kPa 100 kPa For compound pressure Withstand pressure 500 kPa Withstand pressure 500 kPa 100 kPa 100 kPa 100 kPa 100 kPa For positive pressure 1 MPa 1 MPa 1 MPa Withstand pressure 1.5 MPa Withstand pressure 1.5 MPa 2 MPa 2 outputs

Table of Contents

r r u u u Drain Drain Drain Component Parts Material No.

CV/MVGQ

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CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !