0.

0.7 (High pressure type: 1.0) 0.7 (High pressure type: 1.0) Min. operating pressure (MPa) 0.15 0.1 0.15 Ambient and fluid temperature (C) 10 to 50 (No freezing) Max. operating frequency (Hz) 20 20 5 Pilot exhaust method Common exhaust Individual exhaust Lubrication Not required Manual override Push type, Locking type (Tool required) Mounting orientation Free Impact/Vibration resistance (m/s2

7.5

connector Ambient and fluid temperature (C) Maximum operating frequency (Hz) 10 3 Non-locking push type Push-turn locking slotted type Main and pilot valve common exhaust Pilot valve individual exhaust Not required Unrestricted 150/30 Dustproof Manual override (Manual operation) Internal pilot External pilot Pilot exhaust method Lubrication Mounting orientation Shock/Vibration resistance (m/s2

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

If equipped with a light, be careful not to damage the light with the cords lead wires. 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm For DC 10-SY3120-5LO-M5 SY100-30-4A-20 For AC 10-SY3120-1LO-M5 SY100-30-1A-20 Precautions Plug in and pull out the connector vertically without tilting to one side.

39

Arm length L A Arm length L A Table 1 Table 1 A Model A Model CKZ3N50 CKZ3N63 CKZ3T50 CKZ3T63 5 10 Series CKZ3N Series CKZ3T 10 10 50 63 Arm length L: 150 mm Arm length L: 200 mm 3000 3000 Peak clamping force position 2500 2500 Peak clamping force position 0.7 MPa 2000 2000 Clamping force (N) Clamping force (N) 0.5 MPa 0.7 MPa 1500 1500 1000 1000 0.5 MPa 0.3 MPa 0.3 MPa 500 500 0 0 0 0.5

Plug-in/Plug Lead: Single Unit

Note 5) Dusttight/splash proof enclosure (IP65) is not available with interface regulator. 0.1 00 2500 2000 1500 1000 500 3000 Flow rate (l/min (ANR)) ARBQ5000-00-P (P A) 0.7 0.6 Outlet pressure (MPa) 0.5 0.4 How to Order 0.3 0.2 0.1 Regulating port Solenoid valve Interface regulator 00 2500 2000 1500 1000 500 3000 A ARBQ5000-00-A-1 Flow rate (l/min (ANR)) VQ50 (Plug-in type) B ARBQ5000-

VQ5000

2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l/min = 0.035SCFM

Environment

]) 20 40 60 30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note 4) Note 5) 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 Speed [mm/s] Note 5) 18 to 400 9 to 200 5 to 100

Electric Slide Tables

Acceleration/Deceleration: 5,000 [mm/s2] It is possible to obtain an approximate cycle time by using method 1, but if a more detailed cycle time is required, use method 2. W 200 Cycle time: 0.5 seconds Method 1: Check the cycle time graph.

Base Mounted Metal Seal/Rubber Seal Series VQ

S3 U0 U1 U2 U3 S0 S1 S2 S3 U0 U1 U2 U3 F F U0 U1 U2 U3 U0 U1 U2 U3 S0 S1 S2 S3 S0 S1 S2 S3 S0 S1 S2 S3 Without cable Without cable Without cable (2) (2) (2) (2) Kit Kit Kit Kit Kit Kit With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable

3 Port Solenoid Valve Rubber Seal Series SY100 1

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

V100

Lead wire length 2000 mm -+ Socket Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lead wire Connector Hook For DC V114-5LO SY100-30-4A-20 For AC V114A-1LO SY100-30-1A-20 2.

3 Port Solenoid Valve Rubber Seal Series SY100

Lead wire length 2000 mm Cover Concave Pin Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lever DC indicator Socket Part no.

33

HEB Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v HED Reference item HEA Electrical Wiring Warning IDH * In the case of [Mcm], it will be 0.003 to 0.01.

Series VQ Base Mounted Metal Seal/Rubber Seal

Connector location Connector location P.1.10-124 P.1.10-128 P.1.10-132 Top (vertical) Side (honzontal) Top (vertical) Side (honzontal) Without cable With cable (1.5m) With cable (3m) With cable (5m) Without cable Without cable F F S0 S1 S2 S3 P P S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 0 1 2 3 (2) (2) (2) G 2 to 16 stations With cable (1.5m) With cable (3m) With cable

Electric Rotary Table

Compatible Compatible Compatible ORIG direction Set in units of 1/s Speed during return to origin position Set in units of 1 mm/s ORIG speed No setting required Set in units of 1/s2 Acceleration during return to origin position Set in units of 1 mm/s ORIG ACC Continuous operation at the set speed can be tested while the switch is being pressed.

AC Servo Motor Driver (Network card type ）

itch (STO sw itch) S2: Start sw itch (STO release sw itch) S3: On sw itch S4: Off sw itch KM1: Magnetic contactor K3: Safety relay EMG: Emergency stop sw itch CN3 EM1 or EM2 M Servo motor Note.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

(STO switch) S2: Start switch (STO release switch) S3: On switch S4: Off switch KM1: Magnetic contactor K3: Safety relay EMG: Emergency stop switch CN3 EM1 or EM2 M Servo motor Note.

0.4

Note 1) 25P Note 1) 26P Top entry 20P Top entry Top entry Connector entry direction Connector entry direction Connector entry direction P. 17 P. 21 P. 25 P. 29 Top entry Side entry Top entry Top entry Side entry Side entry Without cable Without cable Without cable Without cable S0 S1 S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 U0 U1 U2 U3 U0 U1 U2 U3 U0 U1 U2 U3 Note 2) Note 2) Note 2) Note

0.55

Possible to use in vacuum applications Up to 100 kPa Non-locking push type Push-turn locking slotted type Push-turn locking lever type Manual override Pilot exhaust type Lubrication Mounting orientation Impact/Vibration resistance (m/s2) Note) Individual exhaust Not required Unrestricted 300/50 Dust-tight (IP65 for D, Y, T) Series VP300 Enclosure Note) Impact resistance: No malfunction occurred