C95

CJ1 CJP CJ2 CM2 C85 C76 CG1 MB MB1 CP95 C95 C92 CA1 CS1 1.11-1 Series C95 Model Selection Options Piston Rod Model Execution Adjustable Stroke End Cushioning Standard Hard Chrome W R K C95 SB C95 SDB C95 ST C95 SDT C95 KB C95 KDB C95 KT C95 KDT C95 NB C95 NDB C95 NT C95NDT C95PB C95 PDB C95 QB C95 QDB C95 QT C95 QDT Standard Type With Mounting Centre Trunnion Non-Rotating Piston Rod Non Rotating

Modular F.R.L. Unit

parts Material Description NBR Y100T Y100P-060AS Note) Y200T Y200P-060S Y300T Y300P-060S Y400T Y400P-060S Y500T Y500P-060S Y600T Y600P-060S Seal Note) Y-100T comes with 2 O-rings. 18 Series AC Mounting Position for Spacer with Bracket Bracket T-interface: T 3-port valve for residual pressure: V Check valve: K Pressure switch: S SUP A A A IN IN OUT OUT A Bracket L3 L2 L1 L1 L4 K S T V KS KT

Modular F.R.L. Unit

A A A A IN OUT IN OUT Bracket L3 L2 L1 L4 L1 KS K S T V KT KV KST L3 43 57 57 75 80 96 Attachment Model L2 61 76 76 99 L1 41.5 55 55 72.5 L2 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 L3 43 57 57 75 L2 43 57 57 75 80 96 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 57 74 74 95 L2 61 76 76 99 L3 43 57 57 75 L1 41.5 55 55 72.5 L3 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 98 98 L2 43 57

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: KT (OUT1: Analogue 4 to 20 mA - OUT2: Analogue 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket

-fl Seies

C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy. (Se pg. 16 for individual subplate part nos.) * Special Order XS With surge voltage suppressor x Speciallor grommet type G only. lZ oplion N/A lor grommettype G. a Electrical entrv Volta9e 5]24voc 6 12VDC x9 Otherc Note 1) Indicate in parentheses at end of part no. Ex. (AC24V).

Angle Seat Valve

32UNF can be connected. 45 22.5 27 1/8 Pilot port 17 D E OUT IN E 2 x P Port size A C B A Dimensions [mm] Model Port size P A B C D E VXB215A D 3/8 23 55 99.8 88.3 11.5 VXB215B E 1/2 27 65 106.8 90.8 13.5 VXB215C F 3/4 32 75 111.5 93.2 16 6 Series VXB For Steam Replacement Parts How to order maintenance kit Maintenance Kit Insulated Adapter (for Individual Parts) VXB021-20-1A (1 set) VXB215 KT

AP500

Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High flow Higher flow capacity with internal changes only, no change in external dimensions.

Modular F.R.L. Units

Replacement Parts Description Material HNBR Y200T-A Y220P-050S Y300T-A Y320P-050S Y400T-A Y420P-050S Y500T-A Y520P-050S Seal 26 Series AC Mounting Position for Spacer with Bracket Bracket 3-port valve for residual pressure: V T-shaped spacer: T Pressure switch: S Check valve: K IN OUT OUT IN Bracket A1 A2 A3 A4 A1 K S T V KS KT KV KST A3 43.2 57.2 57.2 75.2 80.2 Attachment Model A3 57 74

Modular/F.R.L. Units Series AC

IN OUT IN OUT Bracket A1 A3 A2 A1 A4 K S T V KS KT KV KST A3 43 57 57 75 80 96 Attachment Model A1 41.5 55 55 72.5 77.5 93 A2 43 57 57 75 A3 43 57 57 75 A1 41.5 55 55 72.5 A1 41.5 55 55 72.5 A2 43 57 57 75 A1 41.5 55 55 72.5 A2 48 61 76 76 99 104 124 124 129 A2 43 57 57 75 80 96 A2 61 76 76 99 A2 61 76 76 99 A3 57 74 74 95 A2 43 57 57 75 A3 57 74 74 95 A3 43 57 57 75

BODY ASSEMBLY (KT-ITV2030-3R), INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, 21, IT2000 NO SIZEPART, 0.3784 lb

Cooling Capacity: 100 (11.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: KT (K + T)

Cooling Capacity: 150 (15.7kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: KT (K + T)

Cooling Capacity: 200 (20.5kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: KT (K + T)

Cooling Capacity: 250 (25kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: KT (K + T)

Cooling Capacity: 250 (24kW), Thread: N (NPT, w/Rc-NPT Conversion Fitting), Option: KT (K + T)

Cooling Capacity: 250 (24kW), Thread: Rc, Option: KT (K + T)

LEC-OM02704CN

AC DC 2. 12 3 12 (2) ()40 10(555) (12.1) A P (12.1) KT [m2] [W] [] [56] A P T K (12.1),P 12.1A 12.1 40() () () 12.2 12 4 12 12.3 (AE6)OFF 10 11000 (EMG) (EMG) 12.3.1 (1) 12.3 (12.2) ((2)(a)(b)) ON (EMG) (EMG) OFF V0 te 12.3 t 1J Lmax V L 0 (12.2) e 60 J M Lmax VO JM JL te [mm] [mm/min] [kgcm 2] [kgcm 2] [s] [s] 7kW10ms11k22kW (50ms) 12 5 12 (2) (12.2) (a) 200V 25 73

LEC-OM02904

AC DC 2. 10 3 10 (2) ()40 10(555) (10.1) A P (10.1) KT [m2] [W] [] [56] A P T K (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10 10.3 (E6) OFF 10 11000 (EM1) (EM1) 10.3.1 (1) 10.3 (10.2) ((2)(a)(b)) ON EM1 (EM1) OFF V0 te 10.3 t 1J Lmax V L 0 (10.2) e 60 J M Lmax VO JM JL te [mm] [mm/min] [kgcm 2] [kgcm 2] [s] [s] 7kW10ms11k22kW (50ms) 10 5 10 (2) (10.2) (a) 200V 25 73 20 23

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (w/Flow Adjustment Valve), Thread: Rc, Port Size: 04 (1/2), Output Specification/Temperature Sensor: KT (OUT1: Analogue 4 to 20 mA - OUT2: Analogue 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket

Modular F.R.L. Unit

A A A A IN OUT IN OUT Bracket L3 L2 L1 L4 L1 K S T V KS KT KV KST L3 43 57 57 75 80 96 Attachment Model L2 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 L1 41.5 55 55 72.5 L2 61 76 76 99 L2 43 57 57 75 80 96 L1 41.5 55 55 72.5 L2 43 57 57 75 L3 43 57 57 75 L1 41.5 55 55 72.5 L3 43 57 57 75 L1 41.5 55 55 72.5 77.5 93 98 98 L2 43 57 57 75 80 96 96 101 L1 28 41.5 55 55 72.5 77.5