Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

M5 Note 4) (68.4) 57.3 PE Vacuum (V) port (M5) Note 4) 20.3 29.4 P V 9.7 Exhaust part 17.7 22.8 0.8 87.2 Note 1) 10 Circuit diagram 5 6 E F Note 1) The above dimensions are for ZQ1 1U-K2 L-F .

SYJ3000/5000/7000

28.1 [35.1] 12.7 2-2.6 (For mounting) Built-in One-touch fitting: SYJ5120(-F) G H C4, N3 C6, N7 4 3.5 19.5 3.5 B A P R1 16 15 10.6 R2 One-touch fitting (A, B port) 32.3 (3.2) 21 M5 x 0.8 (P, R1, R2 port) 1.4 (PE port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector

0.4

P/T kit 2 to 24 stations C8 (8) F kitD-sub connector P kitFlat ribbon cable T kitTerminal block box L kitLead wire S kitSerial transmission C3 (3.2) 643 (Single) 754 (Double, 3-position) Option: Direct EXH outlet with built-in silencer VQ100 C4(4) S kit 2 to 16 stations VQ1000 VV5Q11Side VQ101 C6 (6) L kit 1 to 8 stations M5 (M5 thread) F/P kit 2 to 24 stations F kitD-sub connector P kitFlat

Table of Contents

Refer to pages starting with 181 for mounting. 95 100 8(4)-6.2 B 95 ( ) ( ) (170) A 95 110 20 95 ( ) ( ) (150) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H212SC-100-F LG1H212SC-200-F LG1H212SC-300-F LG1H212SC-400-F LG1H212SC-500-F LG1H212SC-600-F LG1H212SC-700-F LG1H212SC-800-F LG1H212SC-900-F LG1H212SC-1000-F LG1H212SC-1200-F 80 180 280 380 480 580 680 780 880

ISO Cylinder

H S + Stroke F Rail mounting (A) Band mounting (B) Without magnet ZZ + Stroke With rod boot (Wh) Width across flats K 8 8 l C e (JH) h AM f KK (JW) Dimensions [mm] Bore size AM BE C EE F G1 G2 H (HR) K KK KV KW NA ND S SW (WH) ZZ 8 12 M12 x 1.25 4 M5 x 0.8 12 7 5 28 13.4 M4 x 0.7 19 6 15 12 46 7 16 86 10 12 M12 x 1.25 4 M5 x 0.8 12 7 5 28 14.2 M4 x 0.7 19 6 15 12 46 7 16 86 12 16 M16 x

Mechanically Jointed Rodless Cylinder Series MY1

needle M5 x 0.8 (Port) 2 x M5 x 0.8 G G 2 x M5 x 0.8 (Hexagon socket head plug) MY3A MY3B (Hexagon socket head plug) GB M5 x 0.8 (Hexagon socket head plug) N A MY3M Z + Stroke M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) 2 x 2 x J depth K XX (WW) XX (WW) M5 x 0.8 M5 x 0.8 (Port) (Hexagon socket head plug) MY1BG MY1BG VV VV 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) (Hexagon

CJ2

WA S NN NA MM GA LZ LY LX LT LH LC LB H F Z D Y B A WW X Bore size (mm) 10 16 66 M8 x 1.0 21 M4 x 0.7 7.5 32 16.5 24 1.6 9 4.5 16.5 28 8 122 4 7 15 5 15 4.5 14.5 67 M10 x 1.0 21 M5 x 0.8 7.5 42 25 33 2.3 14 5.5 23 28 8 123 5 9 18.3 6 15 5.5 14.5 6-3-53 54 54 Series CJ2ZW Flange Style (F) CJ2ZWF Bore size Stroke Mounting nut 2-FC Mounting hole Cover surface Piping port M5 x 0.8 B 0 0.3 S

Stability of suction position,

x 1 M5 x 0.8/ Effective thread depth 5 M10 x 1 M5 x 0.8/ Effective thread depth 5 9.5 9.5 9.5 M10 x 1 15 44.6 14.5 44.1 Seal washer Seal washer Seal washer 26.5 3 40 31 31 26 2 26 2.5 Width across flats 6 35 32 6 43 40 6 Width across flats 6 53 50 6 Width across flats 6 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/

MXQ

end) 14 6.5 F 4-M5 x 0.8 thread depth 7 49 3.5 1 14.5 28 24.5 24.5 29 24 58 Retraction end adjuster 6 N-M5 x 0.8 thread depth 6 11 5.5 Adjuster at extension end 5H9 depth 5 +0.030 0 36.5 (Adjuster at extension end) Bottom view of MXQ16L-50 1 11 5.5 11 12 I J 5.5 3 11 2-M5 x 0.8 thread depth 8 Operating port 2-M5 x 0.8 5H9 depth 5 +0.030 0 Max. 12 (Retraction end adjuster) 13 35 45 HA GA

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

01 M5 x 0.8 Nil F N T Rc G NPT NPTF 1 8 EA, EB port: M5 x 0.8 Option F With bracket Body ported VF1 1 2 1 L 01 0 Not installed when delivered Manifold VF1 1 3 0 1 L 01 Port size (A, B) Body option Type of actuation Coil rated voltage M5 01 M5 x 0.8 Electrical entry 0 Standard 1 8 3 Common exhaust type for main and pilot valve 1 Single solenoid 2 Double solenoid 1 2 G Grommet (Lead wire:

MY1

x L M F x L M F x L F F L L L 90 Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1MW/CW How to Order MY1 M W 25 300 A93 Number of auto switches Guide type 2 pcs. 1 pc.

ZP

Hexagon width across flats 8 Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 12 Hexagon width across flats 12 (Miniature tube fitting Series M5) (Miniature tube fitting Series M5) Hexagon width across flats 7 Hexagon width across flats 7 H: M5 x 0.8 H: M6 x 1 F H: M6 x 1 H: M8 x 1 A B K L Y Model A B C D E C D E L K Y Model F G G G G F F ZPY10B ZPY13B ZPY40B ZPY50B 10

Compact Hydraulic Cylinder

Mounting bolt Example: M5 x 50L 4 pcs.

Parallel Style Air Gripper Series MHZ

Number of fingers and therefore, When = 0.2 When = 0.1 mg F > 2 x mg F = x 4 2 x 0.2 mg F = x 4 2 x 0.1 With a representing the extra margin, F is determined by the following formula: = 10 x mg = 20 x mg mg F = x a 2 x 10 x Workpiece weight 20 x Workpiece weight Note) Even in cases where the coefficient of friction is greater than = 0.2, for reasons of safety, select a gripping force

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Lightweight: Max. 21 g lighter (When an M5 female thread is used.) ZSE20(F)/ ISE20 ZSE30A(F)/ ISE30A 17.5 mm (20/20A) ZSE20(F)/ISE20 M5 female thread ZSE30A(F)/ISE30A M5 female thread Improved Installability Enclosure Grommet type Connector type Wiring is possible after piping has been connected.

Proposals for Energy Saving

VM-33A Push button (Flush) VM130-01-33 VM132-M5-33 VM-34AR Red VM130-01-34R VM130-01-34B VM130-01-34G VM130-01-34Y VM132-M5-34R VM132-M5-34B VM132-M5-34G VM132-M5-34Y Selector (2 position) VM-34AB Black VM-34AG Green VM-34AY Yellow VM-36A Key selector (2 position) VM130-01-36 VM132-M5-36 Red VM151-01-35R VM151-01-35B VM151-01-35G VM151-01-35Y VM153-M5-35R VM153-M5-35B VM153-M5-35G VM153-M5

Air Slide Table Series MXQ

This could cause auto switch malfunction. 25 KA 13 M 3 x M6 x 1 thread depth 13 5H9 depth 5 +0.030 0 2 N 1 x F 14.5 (Adjuster at extension end) 18 27 7 F 4 x M5 x 0.8 thread depth 8 30 1.5 60 3 33 31 30 17.5 35 70 6 Retraction end adjuster 5H9 depth 5 +0.030 0 Adjuster at extension end 15 6 N x M5 x 0.8 thread depth 8 Note 1) Note 2) 45.5 (Adjuster at extension end) Bottom view of MXQ20L

Table of Contents

/2000 AQ2000/3000 AQ3000 1 8 Standard 1 4 0 1 M5 x 0.8 8 3 1 8 Note) AQ150 only 1 2 AQ5000 3 4 Thread type Metric thread (M5) Rc NPT G Nil N F Caution Be sure to read before handling.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

) 23 7 2.3 R P Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11 11.5 M plug connector (M): 10-SYJ52M-M-M5 (-F) DIN terminal (D,Y): 10-SYJ52MD Y-M5 (-F) M8 connector (WO): 10-SYJ52M-WO-M5 (-F) L plug connector (L): 10-SYJ52M-L-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 65.5 [67.7] 60.9 28.1 [35.1]

Magnetically Coupled Rodless Cylinder

Displacement of Section A when force acts on Section F Displacement of Section A when force acts on Section F F A F Guide central axis (1 axis type) F For the double axis type, this is the cylinders central axis.