CM2

BBA3: D-B5/B6/G5 BBA4: D-C7/C8/H7 "D-H7BAL" switch is set on the cylinder with the screws above when shipped.

VFS

2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !0 03 04 Non plug-in type VVF4000-1A-2VVF4000-2A-1 VVF4000-2A-2 Plug-in type End plate (U side) assembly !1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !

CM2

BBA3: For D-B5/B6/G5 BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

51

33.5 38 43.5 50.5 59 69.5 Bore size Bore size 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 8.5 11 11.5 21.5 21.5 30.5 31.5 12 14.5 15 14.5 25 25 20.5 21 22.5 34.5 34.5 45.5 45.5 24 24.5 26 26.5 38 38 10 12.5 13 23 23 31.5 32.5 22 22.5 24 36 36 47 47 8 9.5 10 20 20 29 30 19 19.5 21 33 33 44 44 13 15.5 16 15.5 26 26 25 25.5 27 27.5 39 39 12.5 15 15.5 15 25.5 25.5 24.5

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

fitting ass'y for 6 C8: One-touch fitting ass'y for 8 DIN rail clamp screw 23 P=22 L1 L2 L3 (C6, C8) (C6, C8) 9.5 9.5 (C6, C8) (C6, C8) Mounting hole for 2-M4 9.5 9.5 4.5 Mounting hole for 2-M6 IN IN IN IN 5.5 80 6.5 (40) 69.5 58 80 37.5 39.5 Residual pressure release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting

Modular Type Lubricators Series AL

AV C4SL-3W C4SL-6 C4SL-36 AF Nylon C4SL-36W C4SL-2 C4SL-23 C4LL-8 C4LL-38 Metal Metal bowl with level gauge 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank Metal bowl with level gauge Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

RSQ

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B U A 36.7 D-H7 D-H7W D-H79F D-H7BAL B U A 29 D-H7C B U A 38.2 Proper Auto Switch Mounting Position Auto Switch Mounting Height D-C7 D-C8 D-H7 D-H7W D-H79F D-H7BAL U Auto switch model D-H7BAL D-H7W D-H7 D-H7C D-C7 D-C8 D-C73C D-C80 D-C73C D-C80C D-H7NF D-H7C

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

57.5 22.5 (30.5) 21.5 (29.5) 20.5 (28.5) 17.5 (25.5) 16 (24) 19 (27) 32 33.5 33.5 33 30.5 54.5 57.5 56 53 58.5 59.5 24.5 (33.5) 23.5 (32.5) 22.5 (31.5) 19.5 (28.5) 18 (27) 21 (30) 40 38 38 37.5 35 60.5 63.5 62 59 64.5 65.5 29.5 (41.5) 28.5 (40.5) 27.5 (39.5) 24.5 (36.5) 23 (35) 26 (38) 50 43.5 43.5 43 40.5 71.5 74.5 73 70 75.5 76.5 29.5 (41.5) 28.5 (40.5) 27.5 (39.5) 24.5 (36.5) 23 (35)

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

CG1

(30.5) 26 (38) 26 (38) A HS A A A B 19.5 (27.5) 19.5 (27.5) 20.5 (28.5) 23 (32) 27.5 (39.5) 27.5 (39.5) A HS A HS B 15 (22.5) 15 (22.5) 15.5 (23.5) 18 (27) 22.5 (34.5) 22.5 (34.5) 31 (45) 31 (45) 30 24.5 27 27.5 29 24 27 25.5 27.5 20 30 27 27 27.5 29 24 29.5 25.5 30 25 31 30.5 28 28.5 30 25 33 26.5 33.5 32 35.5 35 32.5 33 34.5 29.5 37.5 31 38 40 43 40.5 40 40.5 42 37 43 38.5 43.5 50 43 47.5

Round Type Low Pressure Hydraulic Cylinder Series CH
M

6 8 11.5 6.5 32 18.5 13 16 11.5 15 18.5 14.5 13.5 19.5 13.5 8 10 13.5 8.5 40 23 17.5 17 21 19.5 23 24 20 18 19 13.5 15.5 19 14 Auto switch mounting heights (mm) D-C7 D-C8 D-H7 D-H7W D-H7F D-H7BAL D-G39 D-K39 D-A33 D-A34 D-A44 D-B5/B6 D-B59W D-G5NTL D-H7C D-C73C D-C80C Bore size (mm) HS HS HS HS HS 24.5 27.5 27 62 72 20 27 30 29.5 64.5 74.5 25 30.5 33.5 33 68 78 32 40 35 38 37.5 72.5 82.5

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

A B D +0.058 0 +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 +0.3 +0.1 AD-EI-20 AD-EI-25 AD-EI-32 AD-CHN-40 -0.016 -0.034 -0.016 -0.034 -0.016 -0.034 -0.016 -0.034 Y-02 Y-03 Y-04C YHN-04 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 3.2 3.2 4 4 10 10 12 16 9 9 16 16 36 38 55 55 16 18 22 22 9 9 12 15 20 25 32 40 12 12 13 13 20 20 24 24 14 14 25 25 18 18 38 38 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 3.2 x 16l

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

CL

BBA3: For D-B5/B6/G5 BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

CL

BBA3: For D-B5/B6/G5 BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

Table of Contents

Blanking plate assembly Fitting assembly Refer to page 14-4-38.

XM, XY

AS568-016V XLD50-2-9-1A AS568-016V XLD63-2-9-1A XLD80-2-9-1A Standard AS568-009V S Valve seal assembly r XGT XLD80-2-9-1A XMD XYD XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1A AS568-009 Special CYV Note 1) List the optional seal material symbol (refer to Table 1 below) after the model number, except for the standard seal material (FKM: compound no. 1349-80, produced by Mitsubishi