Vacuum System Peripherals:

Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-1A Individual SUP spacer assembly: SY3000-38-3A SUP/EXH block assembly (for R): SX3000-51-6A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-3A SUP/EXH block assembly (for S): SX3000-51-7A SUP/EXH block assembly (for RS): SX3000-51-8A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

assembly DXT031-38-1A Applicable individual EXH spacer assembly DXT155-17-1A Stations VV5F3 05 40 2 02 R port 02 2 stations P port 20 20 stations A, B port 3-4-25 26 Series VF3000 B Mount (Integrated type) Applicable solenoid valve Bottom ported/Individual EXH type Type 50 VV5F3 05 50 4 02 VF350Applicable blanking plate assembly DXT031-38-1A EXH (R) port (Valve body) Stations 02 2 stations

AC Servo Motor Driver (Pulse input type/Positioning type ）

.1 Servo motor combination error 1 DB 1A Servo motor combination error 1A.2 Servo motor control mode combination error DB 0 1 1 0 1A.4 Servo motor combination error 2 DB 1B Converter alarm 1B.1 Converter unit error DB 0 0 1 0 Encoder initial 1E.1 Encoder malfunction DB 0 1 1 0 1E.2 Load-side encoder malfunction DB 1E communication error 2 Encoder initial 1F.1 Incompatible encoder DB 0 1 1

AC Servo Motor Driver (Network card type ）

The operation direction of Homing method -38 is opposite to that of Homing method -6.

smcmaintenancepartslist

C3SL-36W w e C1SL-2 C2SL-2 C3SL-2 Metal t C1SL-23 C2SL-23 C3SL-23 IN OUT C3LL-8 Metal bowl with level gauge r i C3LL-38 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank Metal bowl with level gauge Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

Table of Contents

(27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33) 42 (35) 48 (35) 44 (37) 47 (34) 43 (36) ZPY40 49 (35) 50 (37) 49 (35) 44 (38) 46 (38) ZPY50 ( ): Figures for female thread connections.

Spacer Type: Individual SUP Spacer, Individual SUP/EXH Spacer Assembly: Straight, Port Size: ø12

LEC-OM07605CN

1A.1 (1) LECSS2T (2) (2) [Pr.

Table of Contents

, Contact: 1a) 06 3/4 Note) Terminal box for 24 VDC is available for 5, 6 (LED light).

Valve Single Unit

Port size M5 x 0.8 SX3000 Port size M5 x 0.8 SX3000 SX3000-38-20A SX5000-38-1 A SX7000-38-1 A SX3000-39-20A SX5000-39-1 A SX7000-39-1 A 1 8 1 4 SX5000 1 8 1 4 Note) For protection of the wiring unit section from drain, it should be piped at the EA port so that it will not be directly exposed to exhaust from the valve.

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

VFS

2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !0 03 04 Non plug-in type VVF4000-1A-2VVF4000-2A-1 VVF4000-2A-2 Plug-in type End plate (U side) assembly !1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

AXT625-4-1#1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-6 AXT625-28-1A (Terminal section with adapter plate) No.

Modular Type Lubricators Series AL

AV C4SL-3W C4SL-6 C4SL-36 AF Nylon C4SL-36W C4SL-2 C4SL-23 C4LL-8 C4LL-38 Metal Metal bowl with level gauge 121538-1A 121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank Metal bowl with level gauge Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

AC

AL Model Port size A B C D M N P R B B E F G H J K L M5 X 0.8 38.5 50 70.5 70.5 88 88 108 108 108 16 23 26 26 33 36 40 40 40 105 147.5 4.5 5.5 7 7 9 9 12 12 12 50 80 80 80 105 105 105 105 105 91 140 181 181 238 253 300 310 315 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 25.5 38 38 38 41 40.5 48 48 48 84.5 124.5 153 153 188 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

4D 9.7 0E 160 2E 37 4E 9.4 0F 150 2F 36 4F 9.1 10 140 30 35.2 50 8.8 11 132 31 33.1 51 8.3 12 125 32 31.3 52 7.8 13 118 33 29.6 53 7.4 14 112 34 28.1 54 7.0 15 107 35 26.8 55 6.7 16 102 36 25.6 56 6.4 17 97 37 24.5 57 6.1 18 93 38 23.4 58 5.9 19 90 39 22.5 59 5.6 1A 86 3A 21.6 5A 5.4 1B 83 3B 20.8 5B 5.2 1C 80 3C 20.1 5C 5.0 1D 77 3D 19.4 5D 4.9 1E 75 3E 18.8 5E 4.7 1F 72 3F 18.2 5F 4.5

SYJ3000/5000/7000

How to Order Applicable solenoid valve Refer to page 1-5-38.

Base Mounted Metal Seal/Rubber Seal Series VQ

VQ1000 VVQ1000-1A-2-C3 VVQ1000-1A-2-C4 VVQ1000-1A-2-C6 VVQ1000-1A-2-M5 Port size With One-touch fitting for 3.2 With One-touch fitting for 4 With One-touch fitting for 6 M5 thread For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),