48 How to Order Needle Valve/Flow Rate Characteristics 0 2 F A 1 AS 1 M3 X790 06 AS1201F-M350 45 40 35 30 25 20 15 10 5 0 0.5 0 1 1.5 2 2.5 3 3.5 4 4.5 5 6 7 8 Inlet pressure: 0.5 MPa Port size Push-lock type Body size Flow rate [L/min (ANR)] 1 M3 x 0.5 M3 M3 x 0.5 Applicable tubing O.D.
) Sound absorbing material (PE sintered body) Case (PE) Rod (C3604) Note 1) About the display of products material PP: Polypropylene PE: Polyethylene C3604: Copper alloy Note 2) Recommended flow rate is the flow at 0.5 MPa in the inlet pressure. 5-10-6 7 Silencer High Noise Reduction Type Series AN02 How to Order Over 35 dB (A) noise reduction Case adopts UL94-V0 grade Flame resistant material
1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !
BUS 4632 SY 4632 4632 PE PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 3.2, 1/8" 4, 5/32" 6, 1/4" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 4 5/32" 4-M8 One-touch fitting [X: External pilot port] Applicable tubing O.D.: 4 5/32" SYJ SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-
h) Air Flow Rate (ANR) (Note1) At Expected Outlet Press.Dew Point of 45 F (7.2C) 11 SCFM (19 m3/h) 16 SCFM (27 m3/h) 26 SCFM (45 m3/h) 43 SCFM (74 m3/h) 62 SCFM (106 m3/h) 80 SCFM (136 m3/h) At Expected Outlet Press.Dew Point of 50 F (10C) 12 SCFM (20 m3/h) 17 SCFM (28 m3/h) 28 SCFM (47 m3/h) 45 SCFM (77 m3/h) 65 SCFM (110 m3/h) 86 SCFM (147 m3/h) Operating Pressure 100psig (0.7MPa) Rated
1 3 IDX-OM-W011 1 IDF4E11E-10AC100V IN OUT AC100V IDF4E11E-20AC200V L N PE M3 1.25-3 6.5mm 1-1 IDF Series 1 4 IDX-OM-W011 1 IDF15E1 () 1-1 IDF Series 1 5 IDX-OM-W011 1 IDF15E1-10 (AC100V ) AC100V () IDF15E1-20 (AC200V ) L N PE M3 6.5mm 2 1.25mm 1-1 IDF Series 1 6 IDX-OM-W011 2 2 1 IDF4E 15E1 46kg 2 2 2 2 2 1 2000 240 600mm 050 600mm 600mm 600mm 600mm 2-1 IDF Series
IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ON/OFF 3 3 5 ( ) 11-1 IDU Series 11 1 IDX-OM-W029 11 T 11-4 1) 2) 3) 4) 1 2 3 PE L.N: PE: L2 1 2 3 PE L3 L1 LN Alarm Running LN PE PE:Ground LN L1,L2,L3: PE PE M3 6.5mm 2 :1.25mm :17 11-5 3 5-2 IDU55E/75E-23 11-4 IDU Series 11 2 IDX-OM-W029 11 T 11-6 IDU22E-23-T IDU37E-23-T GFCI For Option R GFCI R Operation
M3 screw is used for the connection part. Make sure to use round crimped terminal.
) L1 L2 PE L3 M3 6.5mm 2 1.25mm 12-4 () () ONOFF 12-5 R 6-4 6-3 T 13-6 13-3 IDF Series 12-3 12 2 IDX-OM-W026 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 13-3 ON 3 () 5 /1 () IDF Series 13-1 13 1 IDX-OM-W026 13 T 13-4 1 2 3 PE L3 L1 L2 PE 1 2 3 L1L2L3 PE: PE: LN: LN PE: PE: PE: M3 6.5mm M3 2 1.25mm 6.5mm 2 1.25mm () () 13-5 3 5-2 IDF55E/75E
) 17 11-4 () () ONOFF 11-5 1-1 IDU Series 11-4 11 2 IDX-OM-W023 12.S 12 S 12-1 IDU8E15E1-10 IDU Series 12-1 IDX-OM-W023 12.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 IDX-OM-W023 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W023 13 T 13-4 1 PE L N 3 2 L,N: PE: LN PE M3 (0.63Nm) 6.5mm
M3 screw is used for the connection part. Make sure to use round crimped terminal.
Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 11. Note 2) A model with PD port (M3) is available as an option. Refer to page 11.
IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30, IDF55E-30, (Single phase AC200V) IDF75E-30 (3 phase AC200V) L N PE L1 L2 L3 PE Customer Connection Side Customer Connection Side Terminal Connecting Screw: M3 Terminal Connecting Screw: M3 Applied Pressure Terminal: 1.25-3 Applied Pressure Terminal: 1.25-3 (Width 6.5mm and below) (Width 6.5mm and below) IDF Series 1-1 Parts Name and Functions
Max. 3.5 VFR VQ7 3 position (241) Double (231) Single (153) 3 position (240) Double (230) Single (153) 3 position (204) Double (194) Single (135) 4 x Rc 1/8 Pilot EXH port: PE 4 x Rc 1/8 Pilot EXH port: PE 4 x Rc 1/8 Pilot EXH port: PE (With light/surge voltage suppressor: 104.5) (With light/surge voltage suppressor: 119.5 (121.5)) (With light/surge voltage suppressor: 109) (With light/surge
Circuit ZQ11U-K2D F DK With L type plug connector Type J2 ZQ11U-J2Supply valve Suction filter Bracket A (standard) 2-3.2 through Pilot exhaust port (PE port) Note 4) Body mounting hole Note 2) Air supply port (P port) Note 4) (M3 x 0.5, piping not required) (68.4) (M5 x 0.8) Vacuum port (V port) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The
port (P port) Note 4) (M3 x 0.5, piping not required) (68.4) (M5 x 0.8) Vacuum port (V port) Note 4) 57.3 PE 29.4 (M5 x 0.8) 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-K2 L-F.
.: 4, 5/32" 6, 1/4" 13.3 (Pitch) P = 10.5 13.3 24 24 16.2 16.2 34 17 36.7 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 X P 1 A 4 One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8, 5/16" One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" M5 x 0.8 [4(A), 2(B) port] Applicable D-sub connector: equivalent { } JIS-X-5101
P 3 5 1 PE port 2-Rc 1/8 3(R2), 5(R1) port 22.2 die-cast hole (For manifold gasket positioning) Rc 1/4 1(P) port L plug connector (L): VQZ3120 1(R)-L-C6/C8/C10/02 DIN terminal (Y): VQZ3120 1(R)-Y-C6/C8/C10/02 300 108.5 (Lead wire length) 72 Indicator light 111.5 MAX. 10 30.5 <35.5> Applicable cable O.D.
T R 2 x P (Plug) 2 x P D 2 x P (Plug) GB GA S Q JC J K PD C + Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64 9 3 9 11 M4 x 0.7 10 M3 x 0.5 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z 12
Model Thread size Tightening torque 0.6 lbfft [0.8 Nm] 1.0 lbfft [1.4 Nm] 0.6 lbfft [0.8 Nm] 53-SY5000 53-SY7000 53-SY9000 M3 M4 M3 39 Series 53-SY5000/7000/9000 Specific Product Precautions 3 Be sure to read before handling. Refer to back cover for Safety Precautions and Handling Precautions for SMC Products (M-E03-3) for 3/4/5 Port Solenoid Valves Precautions.